Abstract
The real-time structural design of magnetron sputtered NiTi SMA (shape memory alloy) thin films is reported. During deposition the phase content was followed in-situ by synchrotron X-ray diffraction and controlled by varying the power of co-sputtering NiTi plus Ti for otherwise fixed deposition parameters. This method allows an optimization of the thin film in respect to its functional properties like phase transition temperature or adhesion, as well as an understanding of the actual growth process by revealing temporary intermediate growth states (different phases and precipitates) and diffusion processes during film growth.
Similar content being viewed by others
References
K. Shimizu, T. Tadaki: In: Shape Memory Alloys, Vol. I of Precision Machinery and Robotics, H. Funakubo (Ed.), (Gordon & Breach, Glasgow 1984)
W. Tang, B. Sundman, R. Sandström, C. Qiu: Acta Mater. 47, 3457 (1999)
M. Bendahan, J. Seguin, P. Canet, H. Carchano: Thin Solid Films 283, 61 (1996)
M. Kohl, K.D. Skrobanek, S. Miyazaki: Sens. Actuators 72A, 243 (1999)
J.L. Seguin, M. Bendahan, A. Isalgue, V. Esteve-Cano, H. Carchano, V. Torra: Sens. Actuators 74A, 65 (1999)
C.M. Pemble, B.C. Towe: Sens. Actuators 77A, 145 (1999)
M. Bendahan, K. Aguir, J.L. Seguin, H. Carchano: Sens. Actuators 74A, 242 (1998)
Committee on Advanced Materials and Fabrication Methods for Micro-electromechanical Systems: Micro-electromechanical systems, advanced materials and fabrication methods (National Materials Advisory Board, National Academy Press, Washington, D.C. 1997)
A. Ishida, V. Martynov: MRS Bulletin 27, 111 (2002)
R.M.S. Martins, R.J.C. Silva, F.M. Braz Fernandes, L. Pereira, P.R. Gordo, M.J.P. Maneira, N. Schell: Mat. Sci. Forum 455–456, 342 (2004)
W. Matz, N. Schell, W. Neumann, J. Bøttiger, J. Chevallier: Rev. Sci. Instrum. 72, 3344 (2001)
W. Matz, N. Schell, G. Bernhard, F. Prokert, T. Reich, J. Claußner, W. Oehme, R. Schlenk, S. Dienel, H. Funke, F. Eichhorn, M. Betzl, D. Pröhl, U. Strauch, G. Hüttig, H. Krug, W. Neumann, V. Brendler, P. Reichel, M.A. Denecke, H. Nitsche: J. Synchroton Radiat. 6, 1076 (1999)
J. Bøttiger, J. Chevallier, J.H. Petersen, N. Schell, W. Matz, A. Mücklich: J. Appl. Phys. 91, 5429 (2002)
N. Schell, W. Matz, J. Bøttiger, J. Chevallier, P. Kringhøj: J. Appl. Phys. 91, 2037 (2002)
N. Schell, J.H. Petersen, J. Bøttiger, A. Mücklich, J. Chevallier, K.P. Andreasen, F. Eichhorn: Thin Solid Films 426, 100 (2003)
N. Schell, T. Jensen, J.H. Petersen, K.P. Andreasen, J. Bøttiger, J. Chevallier: Thin Solid Films 441, 96 (2003)
Certified Scientific Software, P.O. Box 390640, Cambridge, MA 02139-0007, USA
http://www.esrf.fr/computing/scientific/xop/download.html
S. Stemmer, G. Duscher, C. Scheu, A.H. Heuer, M. Rühle: J. Mater. Res. 127, 1734 (1997)
International Centre for Diffraction Data, Swarthmore, PA 19081-2389, USA
K.K. Ho, G.P. Carman: Thin Solid Films 370, 18 (2000)
Author information
Authors and Affiliations
Corresponding author
Additional information
PACS
81.15.Cd; 61.10.Nz; 68.55.Jk
Rights and permissions
About this article
Cite this article
Schell, N., Martins, R. & Braz Fernandes, F. Real-time and in-situ structural design of functional NiTi SMA thin films. Appl. Phys. A 81, 1441–1445 (2005). https://doi.org/10.1007/s00339-004-3201-1
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s00339-004-3201-1