Abstract
The relation between structural and magnetic properties of Co-Ni-Cr-Al-Y-N thin films deposited by reactive r.f. magnetron sputtering was investigated. A marked change in the magnetic behaviour of the films with the different nitrogen partial pressure in the Ar/N2 deposition atmosphere was observed and qualitatively explained in correlation with the phase composition.
The nanocrystalline metal solid-solution obtained at low N2 content and the nanocrystalline nitride/amorphous composite obtained at high N2 content are not magnetic, whereas the amorphous phase produced for intermediate N2 pressures behaves like a ferromagnetic semi-permanent material. The results demonstrate the possibility of modulating the magnetic properties of r.f. magnetron sputtered Co-Ni-Cr-Al-Y-N thin films, thus opening a new route for magnetic multilayer deposition.
Similar content being viewed by others
References
S. Zhang, D. Sun, Y. Fu, H. Du: Surf. Coat. Technol. 167, 113 (2003)
S. Vepøek: J. Vac. Sci. Technol. A 17, 2401 (1999)
N.X. Sun, S.X. Wang: IEEE Trans. Magn. 36, 2506 (2000)
S. Acquaviva, A.P. Caricato, E. D’Anna, M. Fernandez, A. Luches, Z. Frait, E. Majkova, M. Ozvold, S. Luby, P. Mengucci: Thin Solid Films 433, 252 (2003)
S.J. Lee, J.E. Snyder, C.C.H. Lo, K.M. Campos-Anderson, J.W. Anderegg, D.C. Jiles: J. Appl. Phys. 94, 2607 (2003)
P. Scardi, Y.-H. Dong, C. Tosi: J. Vac. Sci. Technol. A 19, 2394 (2001)
M. Leoni, C. Tosi, P. Scardi: J. Mater. Sci. (2004) submitted
P. Scardi, Y.-H. Dong: J. Mater. Res. 16, 233 (2001)
P. Scardi, M. Leoni, Y.-H. Dong: Adv. X-ray Anal. 42, (2000) (On CD-ROM)
M. Leoni, U. Welzel, P. Scardi: J. Res. Natl. Inst. Stand. Technol. 108, 27 (2004)
Author information
Authors and Affiliations
Corresponding author
Additional information
PACS
68.55.-a; 75.70.Ak; 75.75.+a; 85.70.-w
Rights and permissions
About this article
Cite this article
Scardi, P., Leoni, M., Ausanio, G. et al. Magnetic and structural properties of nanocomposite Co-Ni-Cr-Al-Y-N thin films. Appl. Phys. A 81, 143–146 (2005). https://doi.org/10.1007/s00339-004-2990-6
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s00339-004-2990-6