Abstract
A novel technology for manufacturing circuitry, differing from conventional methods, called laser micro-cladding electronic pastes is presented. In this article, high-quality silver conductors were made on an Al2O3 substrate by this method. The process and corresponding mechanisms are described in detail. The experimental results show that the conductive lines produced have a minimum line width of 20 μm, which is much smaller than the current limitations of conventional processes. The resistivity can reach the order of 10-6 Ω cm, which is the same level for pure bulk silver. Optical micrographs and SEM morphology observations were also carried out.
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81.15.Fg; 42.70.Hj; 42.62.-b; 42.62.Cf; 61.80.Ba
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Li, X., Li, H., Chen, Y. et al. Silver conductor fabrication by laser direct writing on Al2O3 substrate. Appl. Phys. A 79, 1861–1864 (2004). https://doi.org/10.1007/s00339-004-2914-5
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DOI: https://doi.org/10.1007/s00339-004-2914-5