Abstract
Ion-beam emission from a gas field ion source can considerably be improved by employing base tips of spherical instead of paraboloidal geometry. With such tips, due to their better electrical field distribution, gas supply is enhanced and desorption reduced. As an important technical consequence, emission levels of gas ions at liquid-nitrogen temperature are sufficient for material-modification purposes.
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41.75.Ak; 82.65.Pa; 79.70.+q
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Kalbitzer, S. Optimised operation of gas field ion source. Appl. Phys. A 79, 1901–1905 (2004). https://doi.org/10.1007/s00339-004-2869-6
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DOI: https://doi.org/10.1007/s00339-004-2869-6