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Fabrication of fine-pitch TiO2-organic hybrid dot arrays using multi-photon absorption of femtosecond pulses

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Abstract

TiO2-organic hybrid dot arrays were produced from TiO2-organic hybrid films by a multi-beam laser interference technique of femtosecond laser pulses. The hybrid films were prepared from titanium alkoxide and β-diketonate by the sol–gel method. Films were exposed to interference light from femtosecond pulses which have an intensity distribution over the pitch of the order of a micron. The chemical structures of the hybrid film were changed by multi-photon absorption from femtosecond pulses, and made chemical patterning possible after the development process. The precursor arrays of the TiO2-organic hybrid material were calcined at 450 °C. TiO2-organic hybrid dot arrays with a refractive index of 2 were obtained.

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Authors and Affiliations

  1. PRESTO-JST, Research Institute for Electronic Science, Hokkaido University, Sapporo, Japan

    H. Segawa

  2. Department of Ecosystem Engineering, The University of Tokushima, 2-1 Minamijyousanjima-cho, Tokushima, Japan

    S. Matsuo

  3. CREST-JST, Research Institute for Electronic Science, Hokkaido University, Sapporo, Japan

    H. Misawa

Authors
  1. H. Segawa
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  2. S. Matsuo
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  3. H. Misawa
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Corresponding author

Correspondence to H. Segawa.

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PACS

78.20.e; 81.20.Fw; 82.50.Pt

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Segawa, H., Matsuo, S. & Misawa, H. Fabrication of fine-pitch TiO2-organic hybrid dot arrays using multi-photon absorption of femtosecond pulses. Appl. Phys. A 79, 407–409 (2004). https://doi.org/10.1007/s00339-004-2704-0

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  • DOI: https://doi.org/10.1007/s00339-004-2704-0

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