Skip to main content
SpringerLink
Log in

Wettability and crystalline orientation of Cu nanoislands on SiO2 with a Cr underlayer

  • Published:
Applied Physics A Aims and scope Submit manuscript

Abstract

Cu thin films were grown by sputter deposition on SiO2 substrates with a Cr underlayer that is known to improve the adhesion between Cu and SiO2. The initial stage of Cu growth was investigated using transmission electron microscopy. Results showed that non-wetting spherical Cu nanoislands were formed with a random crystalline orientation on Cr/SiO2, and evolved into a randomly oriented polycrystalline thin film. These results were then compared with our previous results on the initial growth of Cu on SiO2 with and without a Ti underlayer. A quantitative model was proposed to explain the difference in dependence of the wettability of microscopic nanoislands and that of the adhesion of macroscopic thin films on interfacial interactions and surface energies.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. L.H. Lee: J. Adhes. Sci. Technol. 7, 583 (1993)

    Article  Google Scholar 

  2. B.D. Beake, J.S.G. Ling, G.J. Leggett: J. Mater. Chem. 8, 2845 (1998)

    Article  Google Scholar 

  3. N. Eustathopoulos, B. Drevet, M.L. Muolo: Mater. Sci. Eng. A 300, 34 (2001)

    Article  Google Scholar 

  4. S.-K. Koh, S.-K. Song, W.-K. Choi, H.-J. Jung: J. Mater. Research 10, 2390 (1995)

    Article  ADS  Google Scholar 

  5. P.B. Abel, A.L. Korenyi-Both, F.S. Honecy, S.V. Pepper: J. Mater. Research 9, 617 (1994)

    Article  ADS  Google Scholar 

  6. S.W. Russell, S.A. Rafalski, R.L. Spreitzer, J. Li, M. Moinpour, F. Moghadam, T.L. Alford: Thin Solid Films 262, 154 (1995)

    Article  ADS  Google Scholar 

  7. M. Hu, S. Noda, T. Okubo, Y. Yamaguchi, H. Komiyama: J. Appl. Phys. 94, 3492 (2003)

    Article  ADS  Google Scholar 

  8. M. Hu, S. Noda, Y. Tsuji, T. Okubo, Y. Yamaguchi, H. Komiyama: J. Vac. Sci. Technol. A 20, 589 (2002)

    Article  ADS  Google Scholar 

  9. M. Hu, S. Noda, H. Komiyama: J. Appl. Phys. 93, 9336 (2003)

    Article  ADS  Google Scholar 

  10. C. Liu, J. Erdmann, A. Macrander: Thin Solid Films 355–356, 41 (1999)

  11. M.J. O’Keefe, S. Horiuchi, J.M. Rigsbee, J.P. Chu: Thin Solid Films 247, 169 (1994)

    Article  ADS  Google Scholar 

  12. K. Shepherd, J.A. Kelber: Appl. Surf. Sci. 151, 287 (1999)

    Article  ADS  Google Scholar 

  13. A.G. Dirks, J.J. van den Brock: J. Vac. Sci. Technol. A 3, 2618 (1985)

    Article  ADS  Google Scholar 

  14. J.L. Murray: In: T.B. Massalski (Ed.), Binary Alloy Phase Diagrams (2nd ed.), (ASM International, Materials Park, OH, 1990)

  15. U. Admon, I. Dahan, M.P. Dariel, G. Kimmel, J. Sariel, A. Shtechman, B. Yahav, L. Zevin, D.S. Lashmorec: Thin Solid Films 251, 105 (1994)

    Article  ADS  Google Scholar 

  16. W.R. Tyson, W.A. Miller: Surf. Sci. 62, 267 (1977)

    Article  ADS  Google Scholar 

  17. S.H. Overbury, P.A. Bertrand, G.A. Somorjai: Chem. Rev. 75, 547 (1975)

    Article  Google Scholar 

  18. L.Z. Mezey, J. Giber: Jpn. J. Appl. Phys. 21, 1569 (1982)

    Article  ADS  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Department of Chemical System Engineering, The University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo, 113-8656, Japan

    M. Hu, S. Noda, T. Okubo & H. Komiyama

Authors
  1. M. Hu
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. S. Noda
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. T. Okubo
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. H. Komiyama
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to S. Noda.

Additional information

PACS

61.46.+w; 68.35.Md; 68.35.Np

Rights and permissions

Reprints and permissions

About this article

Cite this article

Hu, M., Noda, S., Okubo, T. et al. Wettability and crystalline orientation of Cu nanoislands on SiO2 with a Cr underlayer. Appl. Phys. A 79, 625–628 (2004). https://doi.org/10.1007/s00339-004-2604-3

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s00339-004-2604-3

Keywords

Search

Navigation