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Modeling laser-assisted particle removal using molecular dynamics

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Abstract

Laser-assisted particle removal, a method of cleaning nano- to micro-scale particles from surfaces, was modeled using molecular dynamics. A two-dimensional molecular model consisting of substrate, particle, and adsorbed fluid was used. In order to obtain statistical accuracy of cleaning efficiencies, over 1200 particle-removal simulations were conducted. The effects of fluid thickness and substrate temperature were both considered, and good qualitative agreement with experimental results was obtained. The molecular dynamics approach is shown to be an effective way to study these systems.

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Authors and Affiliations

  1. School of Computational Science and Information Technology, Florida State University, 32306-4120, Tallahassee , FL, USA

    K.M. Smith  & M.Y. Hussaini

  2. Department of Chemistry, Washington University, 63130, St. Louis, MO, USA

    L.D. Gelb

  3. Department of Chemistry and Biochemistry, Florida State University, 32306, Tallahassee, FL, USA

    S.D. Allen

Authors
  1. K.M. Smith
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  2. M.Y. Hussaini
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  3. L.D. Gelb
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  4. S.D. Allen
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Correspondence to K.M. Smith .

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PACS

81.65.Cf; 79.20.Ds

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Smith , K., Hussaini , M., Gelb , L. et al. Modeling laser-assisted particle removal using molecular dynamics. Appl Phys A 77, 877–882 (2003). https://doi.org/10.1007/s00339-003-2220-7

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  • DOI: https://doi.org/10.1007/s00339-003-2220-7

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