Abstract
Polyimide (PI) films were implanted with 40-keV Ar+ and 80-keV Ar2+ ions in a fluence range of 5.0×1014–1.5×1017 cm-2 at ion-current densities of 1–16 μA/cm2. It is shown that the conductivity of the samples rises with the ion-current density at a fixed fluence. Electrophysical parameters of the polyimide change stepwise with the implantation fluence when it exceeds a certain value. The change of electrical parameters of the implanted PI correlates with that of the optical and paramagnetic characteristics. The phenomenon of complete volatilisation of argon implanted with an energy of 40 keV due to surface heating and disordering under the high-power beam is found. It is shown that the change of ion charge and energy at constant beam-power density causes only a quantitative change in the polymer characteristics. A model of PI alteration and carbonised phase formation, taking into account the action of the high-power ion beam and the peculiarities of PI chemical structure, is developed to explain the observed effects. Implantation at high ion-current density can be suggested as an efficient practical means to control polymer conductivity and other parameters.
Similar content being viewed by others
References
C.K. Chiang, C.R. Fincher, Jr., Y.W. Park, A.J. Heeger, H. Shirakawa, E.J. Louis, S.C. Gau, A.G. MacDiarmid: Phys. Rev. Lett. 39, 1098 (1977)
T. Venkatesan, L. Calcagno, B.S. Elman, G. Foti: in Ion Beam Modification of Insulators, ed. by P. Mazzoldi, G.W. Arnold (Elsevier, Amsterdam 1987) p. 301
G. Marletta, F. Iacona: in Materials and Processes for Surface and Interface Engineering, ed. by Y. Pauleau (Kluwer, Dordrecht 1995) p. 597
R.E. Gied, M.G. Moss, J. Kaufmann, Y.Q. Wang: in Electrical and Optical Polymer Systems, ed. by D.L. Wise, G.E. Wnek, D.J. Trantolo, T.M. Cooper, J.D. Gresser (Marcel Dekker, New York 1998) p. 1011
V.N. Popok: Surf. Invest. 14, 843 (1999)
E.H. Lee: Nucl. Instrum. Methods B 151, 29 (1999)
D.V. Sviridov, V.B. Odzhaev, I.P. Kozlov: in Electrical and Optical Polymer Systems, ed. by D.L. Wise, G.E. Wnek, D.J. Trantolo, T.M. Cooper, J.D. Gresser (Marcel Dekker, New York 1998) p. 387
M. Iwaki: Nucl. Instrum. Methods B 175–177, 368 (2001)
P. Cottin, R.A. Lessard, E.J. Knystautas, S. Roorda: Nucl. Instrum. Methods B 151, 97 (1999)
A. Moliton, R. Antony, B. Lucas, B. Ratier, C. Moussant: Opt. Mater. 12, 199 (1999)
D.M. Rück: Nucl. Instrum. Methods B 166–167, 602 (2000)
I.P. Kozlov, V.B. Odzhaev, I.A. Karpovich, V.N. Popok, D.V. Sviridov: J. Appl. Spectrosc. 65, 390 (1998)
J. Davenas, X.L. Xu, G. Boiteux, D. Sage: Nucl. Instrum. Methods B 39, 754 (1989)
J.L. Magee, A. Chattejee: J. Phys. Chem. 84, 3529 (1980)
D. Fink, K. Ibel, P. Goppelt, J.P. Biersack, L. Wang, M. Behar: Nucl. Instrum. Methods B 46, 342 (1990)
G.R. Rao, Z.L. Wang, E.H. Lee: J. Mater. Res. 8, 927 (1993)
I.P. Kozlov, V.B. Odzhaev, V.N. Popok, I.I. Azarko, E.I. Kozlova: J. Appl. Spectrosc. 65, 583 (1998)
L.A. Laius, E.N. Dergacheva, T.J. Zhukova: in Polyimides, Chemistry and Characterization, ed. by C. Feger, M.M. Khojasteh, J.E. McGrath (Elsevier, Amsterdam 1989) p. 389
A.N. Aleshin, A.V. Gribanov, A.V. Dobrodumov, A.V. Suvorov, I.S. Shlimak: Solid State Phys. 31, 12 (1989)
A. De Bonis, A. Bearzotti, G. Marletta: Nucl. Instrum. Methods B 151, 101 (1999)
J.A. Weil, J.R. Bolton, J.E. Wertz: Electron Paramagnetic Resonance: Elementary Theory and Practical Applications (Wiley, New York 1994)
J.F. Ziegler: The stopping and range of ions in matter (SRIM-2000) [www.SRIM.org]
I.I. Azarko, V. Hnatowicz, I.P. Kozlov, E.I. Kozlova, V.B. Odzhaev, V.N. Popok: Phys. Status Solidi A 146, K23 (1994)
V.B. Odzhaev, I.I. Azarko, I.A. Karpovich, I.P. Kozlov, V.N. Popok, D.V. Sviridov, V. Hnatowicz, O.N. Jankovskij, V. Rybka, V. Švorčik: Mater. Lett. 23, 163 (1995)
A. Miotello, R. Kelly: Nucl. Instrum. Methods B 122, 458 (1997)
H. De Cicco, G. Saint-Martin, M. Alurralde, O.A. Bernaola, A. Filevich: Nucl. Instrum. Methods B 173, 455 (2001)
V. Švorčik, R. Endršt, V. Rybka, E. Arenholz, V. Hnatowicz, F. Černy: Eur. Polym. J. 32, 189 (1995)
C.Z. Hu, K.L. De Vris, J.D. Andrade: Polymer 28, 663 (1987)
L.H. Chou, H.W. Wang: J. Appl. Phys. 74, 4673 (1993)
V. Švorčik, E. Arenholz, V. Rybka, V. Hnatowicz: Nucl. Instrum. Methods B 122, 663 (1997)
V.N. Popok, I.A. Karpovich, V.B. Odzhaev, D.V. Sviridov: Nucl. Instrum. Methods B 148, 1106 (1999)
Author information
Authors and Affiliations
Corresponding author
Additional information
PACS
61.80.Jh; 61.82.Pv; 72.80.Le; 76.30.Pk; 78.30.Jw; 81.05.Lg
Rights and permissions
About this article
Cite this article
Popok, V., Azarko, I., Khaibullin, R. et al. Radiation-induced change of polyimide properties under high-fluence and high ion current density implantation. Appl. Phys. A 78, 1067–1072 (2004). https://doi.org/10.1007/s00339-003-2166-9
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s00339-003-2166-9