Abstract.
Hybrid laser processing for the precision microfabrication of glass materials, in which the interaction of a conventional pulsed laser beam and a medium on the material surface leads to effective ablation and modification, is reviewed. A major role of the medium is to produce strong absorption of the conventional laser beam by the material. Simultaneous irradiation by a vacuum ultraviolet (VUV) laser beam that possesses an extremely small laser fluence and an ultraviolet (UV) laser greatly improves the ablation quality and modification efficiency for fused silica (VUV-UV multiwavelength excitation process). The metal plasma generated by the laser beam effectively assists high-quality ablation of transparent materials by the same laser beam, resulting in microstructuring, cutting, color marking, printing, and selective metallization of glass materials (laser-induced plasma-assisted ablation (LIPAA)). The detailed discussion presented here includes the ablation mechanism of hybrid laser processing.
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Received: 18 December 2002 / Accepted: 20 January 2003 / Published online: 28 May 2003
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Sugioka, K., Obata, K., Hong, M. et al. Hybrid laser processing for microfabrication of glass . Appl Phys A 77, 251–257 (2003). https://doi.org/10.1007/s00339-003-2116-6
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DOI: https://doi.org/10.1007/s00339-003-2116-6