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Deep UV laser induced fluorescence in fluoride thin films

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Abstract.

Fluorescence experiments have been performed to study the interaction of 193-nm laser radiation with dielectric thin films of LaF3, AlF3, and MgF2. Spectral- and time-resolved measurements reveal the presence of cerium in LaF3 and the influence of hydrocarbons in MgF2 and LaF3. Virtually no fluorescence response is observable in the case of AlF3. Supplementary measurements on multilayer stacks confirm the contribution of hydrocarbon and cerium emission in high-reflective UV mirrors upon ArF excimer laser irradiation. Energy density dependent measurements indicate a linear absorption process as the origin of UV laser induced fluorescence in LaF3. Luminescence calculations are applied as a helpful tool in order to account for interference effects that are inherently to be found in the multilayer emission spectra.

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Authors and Affiliations

  1. Fraunhofer Institut für Angewandte Optik und Feinmechanik, Schillerstrasse 1, 07745 Jena, Germany, , , , , , DE

    J. Heber, N. Danz & N. Kaiser

  2. Institut für Physikalische Hochtechnologie e.V. Jena, Winzerlaer Strasse 10, 07745 Jena, Germany, , , , , , DE

    C. Mühlig & W. Triebel

  3. Southwall Europe GmbH, Southwallstrasse 1, 01900 Grossröhrsdorf, Germany, , , , , , DE

    R. Thielsch

Authors
  1. J. Heber
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  2. C. Mühlig
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  3. W. Triebel
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  4. N. Danz
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  5. R. Thielsch
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  6. N. Kaiser
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Additional information

Received: 21 May 2002 / Accepted: 23 May 2002 / Published online: 10 September 2002

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ID="*"Corresponding author. Fax: +49-3641/807-601, E-mail: heber@iof.fraunhofer.de

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Heber, J., Mühlig, C., Triebel, W. et al. Deep UV laser induced fluorescence in fluoride thin films . Appl Phys A 76, 123–128 (2003). https://doi.org/10.1007/s00339-002-1502-9

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  • DOI: https://doi.org/10.1007/s00339-002-1502-9

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