Abstract
The possibility of amorphization in Ni-Mo multilayered thin films was studied by the Ar+-ion-beam-assisted deposition (IBAD) technique. The amorphous phase was obtained in some of the samples and the nominal composition range was 30–60 at. % Ni. Face-centered cubic and bcc supersaturated solid solutions were also formed in the experiment. The evolution of phase and microstructure is interpreted according to the calculated Gibbs free-energy diagram of the Ni-Mo system. The kinetics of IBAD are also discussed.
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References
P. Duwez, R.H. Willens, W. Klement: J. Appl. Phys. 31, 1136 (1960)
B.X. Liu: Nucl. Instrum. Methods B 40–41, 603 (1989)
S.S. Lau, B.X. Liu, M.A. Nicolet: Nucl. Instrum. Methods 209–210, 97 (1983)
J.A. Knapp, D.M. Follstaedt: Phys. Rev. Lett. 55, 415 (1983)
J.K. Hirvonen: Mater. Sci. Rep. 6, 215 (1991)
F.A. Smidt: Int. Mater. Rev. 35, 61 (1990)
J.K. Hirvonen: Surf. Coat. Technol. 65, 84 (1994)
N. Sonnenberg, A.S. Longo, M.J. Cima, B.P. Chang, K.G. Ressler, P.C. McIntyre, Y.P. Liu: J. Appl. Phys. 74, 1027 (1993)
M. Ding, F. Zeng, F. Pan: Nucl. Instrum. Methods B 170, 79 (2000)
A.R. Miedema, A.K. Niessen, F.R. de Boer, R. Boom, W.C.M. Mattens: Cohesion in Metals: Transition Metal Alloys (North–Holland, Amsterdam 1989)
H.Y. Bai, B.X. Liu: J. Mater. Sci. Lett. 15, 1189 (1996)
Z.J. Zhang, B.X. Liu: J. Appl. Phys. 76, 3351 (1994)
A. Misra, S. Fayeulle, H. Kung, T.E. Mitchell, M. Nastasi: Appl. Phys. Lett. 73, 891 (1998)
G. Bellussi, V. Fattore: In: Studies in Surface Science and Catalysis, Vol. 69, ed. by P.A. Jacobs, N.I. Jaeger, L. Kubelkova, B. Wichterlova (Elsevier, Amsterdam 1991) p. 79
A.K. Niessen, A.R. Miedema, F.R. de Boeer, R. Boom: Physica B 151, 401 (1998)
J.A. Alonso, S. Simozar: Solid State Commun. 46, 765 (1983)
B.X. Liu, Z.J. Zhang: Phys. Rev. B 49, 12519 (1994)
B.X. Liu, W.S. Lai, Q. Zhang: Mater. Sci. Eng. 29, 1 (2000)
J.F. Ziegler, J.P. Biersack, U. Littmark: The Stopping and Range of Ions in Matter (Pergamon Press, New York 1985)
W. Bolse: Mater. Sci. Eng. A 253, 194 (1998)
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68.03; 68.35; 68.47
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Zhao, B., Zeng, F. & Pan, F. Formation of metastable alloy films in the Ni-Mo binary system by ion-beam-assisted deposition. Appl Phys A 77, 523–528 (2003). https://doi.org/10.1007/s00339-002-1482-9
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DOI: https://doi.org/10.1007/s00339-002-1482-9