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Real-time deadlock-free scheduling for semiconductor track systems based on colored timed Petri nets

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Abstract

This paper addresses the problem of real-time deadlock-free scheduling for a semiconductor track system. The system is required to process wafers continuously, cassette by cassette. The process is not necessarily a repeated one. In addition, the system is deadlock-prone and its modules are failure-prone. Thus, real-time scheduling approaches are required to achieve high-performance. The problem can be solved in a hierarchical way. A deadlock avoidance policy is developed for the system as a lower-layer controller. With the support of the deadlock avoidance policy, heuristic rules are proposed to schedule the system in real-time. An effective modeling tool, colored–timed resource-oriented Petri net, is presented. It is shown that with this model we can schedule a system to achieve satisfactory results in real-time. This method is tolerant to module failures.

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Acknowledgements

This work was supported in part by the Chinese National Science Foundation under Grant 60574066 and by the National Outstanding Young Scientist Research Awards under Grant 60228004.

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Authors and Affiliations

  1. Department of Mechatronics Engineering, Guangdong University of Technology, Guangzhou, 510090, People’s Republic of China

    Naiqi Wu

  2. Department of Electrical and Computer Engineering, New Jersey Institute of Technology, Newark, NJ, 07102-1982, USA

    MengChu Zhou

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  1. Naiqi Wu
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  2. MengChu Zhou
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Correspondence to Naiqi Wu.

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Wu, N., Zhou, M. Real-time deadlock-free scheduling for semiconductor track systems based on colored timed Petri nets. OR Spectrum 29, 421–443 (2007). https://doi.org/10.1007/s00291-006-0046-3

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