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Determination of stoichiometry and concentration of trace elements in thin BaxSr1–xTiO3 perovskite layers

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Abstract

This paper describes an analytical procedure for determining the stoichiometry of BaxSr1–xTiO3 perovskite layers using inductively coupled plasma mass spectrometry (ICP-MS). The analytical results of mass spectrometry measurements are compared to those of X-ray fluorescence analysis (XRF). The performance and the limits of solid-state mass spectrometry analytical methods for the surface analysis of thin BaxSr1–xTiO3 perovskite layers – sputtered neutral mass spectrometry (SNMS) – are investigated and discussed.

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Authors and Affiliations

  1. Central Department of Analytical Chemistry (ZCH), Research Centre Jülich, 52425, Jülich, Germany

    J. S. Becker & S. F. Boulyga

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  1. J. S. Becker
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  2. S. F. Boulyga
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Received: 6 December 2000 / Revised: 26 January 2001 / Accepted: 1 February 2001

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Becker, J., Boulyga, S. Determination of stoichiometry and concentration of trace elements in thin BaxSr1–xTiO3 perovskite layers. Fresenius J Anal Chem 370, 527–533 (2001). https://doi.org/10.1007/s002160100755

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  • DOI: https://doi.org/10.1007/s002160100755

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