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Analytical and Bioanalytical Chemistry

, Volume 407, Issue 11, pp 3045–3053 | Cite as

New reference and test materials for the characterization of energy dispersive X-ray spectrometers at scanning electron microscopes

  • Vanessa Rackwitz
  • Michael Krumrey
  • Christian Laubis
  • Frank Scholze
  • Vasile-Dan HodoroabaEmail author
Research Paper
Part of the following topical collections:
  1. Reference Materials for Chemical Analysis

Abstract

Checking the performance of energy dispersive X-ray spectrometers as well as validation of the results obtained with energy dispersive X-ray spectrometry (EDX) at a scanning electron microscope (SEM) involve the use of (certified) reference and dedicated test materials. This paper gives an overview on the test materials mostly employed by SEM/EDX users and accredited laboratories as well as on those recommended in international standards. The new BAM reference material EDS-CRM, which is currently in the process of certification, is specifically designed for the characterization of EDS systems at a SEM through calibration of the spectrometer efficiency in analytical laboratories in a simple manner. The certification of the spectra by means of a reference EDS is described. The focus is on the traceability of EDS efficiency which is ensured by measurements of the absolute detection efficiency of silicon drift detectors (SDD) and Si(Li) detectors at the laboratory of the PTB using the electron storage ring BESSY II as a primary X-ray source standard. A new test material in development at BAM for testing the performance of an EDS in the energy range below 1 keV is also briefly presented.

Keywords

EDX EDS Performance check SEM Test materials Spectrometer efficiency 

Notes

Acknowledgments

Thanks are due to European Metrology Research Programme (EMRP) for funding the SurfChem project (http://www.emrp-surfchem.bam). The EMRP is jointly funded by the EMRP participating countries within EURAMET and the European Union. Many discussions with Dr. M. Procop are gratefully acknowledged by V.-D. H. The authors thank also Dr. W. Bremser (BAM-1.4) for the first evaluation of the homogeneity and stability measurements and Dr. V. Wachtendorf (BAM-7.5) for carrying out the climatic tests.

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Copyright information

© Springer-Verlag Berlin Heidelberg 2014

Authors and Affiliations

  • Vanessa Rackwitz
    • 1
  • Michael Krumrey
    • 2
  • Christian Laubis
    • 2
  • Frank Scholze
    • 2
  • Vasile-Dan Hodoroaba
    • 1
    Email author
  1. 1.BAM Federal Institute for Materials Research and TestingBerlinGermany
  2. 2.Physikalisch-Technische Bundesanstalt (PTB)BerlinGermany

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