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Operation and application of a new time-of-flight e-gas secondary neutral mass spectrometer (ToF–SNMS)

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Abstract

The low-pressure rf plasma of a secondary neutral mass spectrometer (e-gas SNMS) was connected with a time-of-flight (ToF) mass spectrometer for the first time. As opposed to ToF–SIMS in e-gas SNMS, the primary ion pulse cannot be used for triggering the flight time measurement. Therefore, an extraction pulse is used which at a defined time loads an ion package from the beam of the post-ionised particles into the ToF spectrometer. The newly developed ToF–SNMS system is described, and first experimental results are presented.

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Acknowledgements

We thank the European Union and the state of Rheinland-Pfalz for financial support within the Ziel-2-Programm.

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Authors and Affiliations

  1. Institute for Surface and Thin Film Analysis IFOS, Technical University of Kaiserslautern, 67663, Kaiserslautern, Germany

    M. Kopnarski & J. Lösch

  2. Research Center OPTIMAS, Technical University of Kaiserslautern, 67663, Kaiserslautern, Germany

    M. Kopnarski & J. Lösch

  3. Bulgarian Academy of Sciences, 1113, Sofia, Bulgaria

    L. Simeonov

Authors
  1. M. Kopnarski
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  2. J. Lösch
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  3. L. Simeonov
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Corresponding author

Correspondence to J. Lösch.

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Kopnarski, M., Lösch, J. & Simeonov, L. Operation and application of a new time-of-flight e-gas secondary neutral mass spectrometer (ToF–SNMS). Anal Bioanal Chem 393, 1913–1916 (2009). https://doi.org/10.1007/s00216-008-2571-1

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  • DOI: https://doi.org/10.1007/s00216-008-2571-1

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