Abstract
High-efficiency condenser-type diffusion denuders of cylindrical and planar geometries are described. The film condensation of water vapor onto a cooled denuder surface can be used as a method for collecting water-soluble gases. By using SO2 as the test gas, the planar design offers quantitative collection efficiency at air sampling rates up to 5 L min−1. Coupled to ion chromatography, the limit of detection (LOD) for SO2 is 0.014 ppbv with a 30-min successive analysis sequence. The method has been successfully applied to the analysis of temperature- and humidity-controlled cleanroom air.
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Lue SJ, Wu T, Hsu H, Huang C (1998) J Chromatogr A 804:273
Lue SJ, Huang C (1999) J Chromatogr A 850:283
Muller CO, Joyce CT, Poppre MN (2000) Environ Progr 19:42
Tamaoki M, Nishiki K, Shimazaki A, Sasaki Y, Yanagi S (1995) IEEE/SEMI advanced semiconductor manufacturing conf, IEEE, Piscataway, NJ, USA, p 322
MacDonald SA, Clecak NJ, Wendt HR, Willson CG, Snyder CD, Knors CJ, Deyoe NB, Maltabes JG, Morrow JR, McGuire AE, Holmes SJ (1991) SPIE 1466 proc int soc for optical engineering, Bellingham, WA, USA, p 2
Ito H (1996) Solid State Technol 39:164
Yabumoto N, Tanaka M (1995) Denki Kagaku 63:494
Simon PK, Dasgupta PK, Vecera Z (1991) Anal Chem 63:1237
Simon PK, Dasgupta PK (1993) Anal Chem 65:1134
Genfa Z, Dasgupta PK, Dong S (1989) Environ Sci Technol 23:1467
Chang IH, Lee DS, Lee YK, Whang KJ (1997) Anal Sci 13:267
Dasgupta PK, Dong S, Hwang H, Yang HC, Genfa Z (1988) Atmos Environ 22:949
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Chang, IH., Lee, D.S. & Ock, SH. Condenser-type diffusion denuders for the collection of sulfur dioxide in a cleanroom. Anal Bioanal Chem 375, 456–459 (2003). https://doi.org/10.1007/s00216-002-1682-3
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DOI: https://doi.org/10.1007/s00216-002-1682-3