Studying chemical vapor deposition processes with theoretical chemistry

  • Henrik PedersenEmail author
  • Simon D. Elliott
Part of the following topical collections:
  1. Modeling Chemical Vapor Deposition and Atomic Layer Deposition


In a chemical vapor deposition (CVD) process, a thin film of some material is deposited onto a surface via the chemical reactions of gaseous molecules that contain the atoms needed for the film material. These chemical reactions take place on the surface and in many cases also in the gas phase. To fully understand the chemistry in the process and thereby also have the best starting point for optimizing the process, theoretical chemical modeling is an invaluable tool for providing atomic-scale detail on surface and gas phase chemistry. This overview briefly introduces to the non-expert the main concepts, history and application of CVD, including the pulsed CVD variant known as atomic layer deposition, and put into perspective the use of theoretical chemistry in modeling these processes.


Chemical vapor deposition Atomic layer deposition Thin films Surface chemistry Gas phase chemistry Theoretical chemistry 



S. D. Elliott would like to acknowledge financial support from Science Foundation Ireland under the ALDesign project, 09/IN.1/I2628,


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Copyright information

© Springer-Verlag Berlin Heidelberg 2014

Authors and Affiliations

  1. 1.Department of Physics, Chemistry and BiologyLinköping UniversityLinköpingSweden
  2. 2.Tyndall National InstituteUniversity College CorkCorkIreland

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