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Investigation of interactions between fiber lasers and Si3N4 sheets for drilling square microholes with multi-ring strategy

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Abstract

A high pulsed fiber laser was utilized to drill square microholes in Si3N4 sheets in an atmospheric environment. Various processing parameters including scan spacing, number of scan passes, and number of multi-ring paths with a multi-ring strategy were adjusted to laser-drill Si3N4 sheets. The geometric characteristics of laser-drilled square microholes with shoulder height, taper angle, and corner radius were measured using a laser scanning microscope. X-ray diffraction was applied to examine the residual stress of the Si3N4 sheets before and after laser drilling. Moreover, the heat-affected zone and element content were examined using a scanning electron microscope. The experimental results exhibited that the optimal shoulder height of the square microhole drilled with the multi-ring strategy was 6.67 ± 0.21 μm, which was approximately 77% lower than that of 29.05 ± 10.95 μm for the square microhole drilled with the single-ring strategy. Moreover, the residual stresses of the original Si3N4 sheet and the square microholes laser-drilled by single-ring and multi-ring strategies were − 181.2 ± 41, 164.5 ± 31.9, and 104.6 ± 7.8 MPa, respectively. The proposed laser drilling technology with the multi-ring strategy can be widely used in the semiconductor industry for probe cards.

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References

  1. Hyun DE, Jeon JB, Lee YS, Kim YN, Kim M, Ko S, Koo SM, Shin WH, Park C, Lee DW (2022) Fabrication of large-area mullite–cordierite composite substrates for semiconductor probe cards and enhancement of their reliability. Materials 15(12):4283

    Article  Google Scholar 

  2. Nakamura S, Miura T, Tsuta M (2015) Straight through hole drilling in machinable ceramics. J Laser Micro Nanoeng 10(1):101

    Article  Google Scholar 

  3. Wang F, Cheng R, Li X (2009) MEMS vertical probe cards with ultra densely arrayed metal probes for wafer-level IC testing. J Microelectromechanical Syst 18(4):933–941

    Article  MathSciNet  Google Scholar 

  4. Tseng SF, Tsai YS (2022) Highly sensitive humidity sensors based on Li-C3N4 composites on porous graphene flexible electrodes. Appl Surf Sci 606:155001

    Article  Google Scholar 

  5. Tseng SF, Chen PS, Hsu SH, Hsiao WT, Peng WJ (2023) Investigation of fiber laser-induced porous graphene electrodes in controlled atmospheres for ZnO nanorod-based NO2 gas sensors. Appl Surf Sci 620:156847

    Article  Google Scholar 

  6. Ho CC, Kao JY (2023) Electric field assisted field monitoring laser drilling in transparent and hard brittle materials. Opt Laser Technol 163:109344

    Article  Google Scholar 

  7. Qingliang S, Tiyuan W, Qiang S, Fang Y, Hejun L, Fu MW (2023) Unraveling of the laser drilling of carbon/carbon composites: ablation mechanisms, shape evolution, and damage evaluation. Int J Mach Tools Manuf 184:103978

    Article  Google Scholar 

  8. Liu L, Chang C, Wu W, Pearton S, Ren F (2011) Circular and rectangular via holes formed in SiC via using ArF based UV excimer laser. Appl Surf Sci 257(6):2303–2307

    Article  Google Scholar 

  9. Liu Y, Wang C, Li W, Zhang L, Yang X, Cheng G, Zhang Q (2014) Effect of energy density and feeding speed on micro-hole drilling in C/SiC composites by picosecond laser. J Mater Process Technol 214(12):3131–3140

    Article  Google Scholar 

  10. Sciti D, Bellosi A (2001) Laser-induced surface drilling of silicon carbide. Appl Surf Sci 180(1–2):92–101

    Article  Google Scholar 

  11. Kacar E, Mutlu M, Akman E, Demir A, Candan L, Canel T, Gunay V, Sınmazcelik T (2009) Characterization of the drilling alumina ceramic using nd: YAG pulsed laser. J Mater Process Technol 209(4):2008–2014

    Article  Google Scholar 

  12. Wang C, Zhang L, Liu Y, Cheng G, Zhang Q, Hua K (2013) Ultra-short pulse laser deep drilling of C/SiC composites in air. Appl Phys A 111(4):1213–1219

    Article  Google Scholar 

  13. Zhang Y, Wang Y, Zhang J, Liu Y, Yang X, Zhang Q (2015) Micromachining features of TiC ceramic by femtosecond pulsed laser. Ceram Int 41(5):6525–6533

    Article  Google Scholar 

  14. Jia X, Li Z, Wang C, Li K, Zhang L (2023) Ji’an, Study of the dynamics of material removal processes in combined pulse laser drilling of alumina ceramic. Opt Laser Technol 160:109053

    Article  Google Scholar 

  15. Wang HJ, Chen Q, Lin DT, Zuo F, Zhao ZX, Wang CY, Lin HT (2018) Effect of scanning pitch on nanosecond laser micro-drilling of silicon nitride ceramic. Ceram Int 44(12):14925–14928

    Article  Google Scholar 

  16. Zhang J, Long Y, Liao S, Lin HT, Wang C (2017) Effect of laser scanning speed on geometrical features of nd: YAG laser machined holes in thin silicon nitride substrate. Ceram Int 43(3):2938–2942

    Article  Google Scholar 

  17. Chen Q, Wang HJ, Lin DT, Zuo F, Zhao ZX, Lin HT (2018) Characterization of hole taper in laser drilling of silicon nitride ceramic under water. Ceram Int 44(11):13449–13452

    Article  Google Scholar 

  18. Aizawa T, Inohara T (2019) Pico-and femtosecond laser micromachining for surface texturing. Micromachining 1:1–24

    Google Scholar 

  19. Jia X, Chen Y, Wang H, Zhu G, Zhu X (2020) Experimental study on nanosecond-millisecond combined pulse laser drilling of alumina ceramic with different spot sizes. Opt Laser Technol 130:106351

    Article  Google Scholar 

  20. Su L, Chen R, Huang Z, Zhou M, Zeng Q, Shi Q, Liao Z, Lu T (2018) Geometrical morphology optimisation of laser drilling in B4C ceramic: from plate to hollow microsphere, Ceram. Int 44(2):1370–1375

    Google Scholar 

  21. Tseng SF, Huang CC (2021) Investigation of interactions between high pulsed ultraviolet lasers and composite graphene/AgNWs films. Appl Surf Sci 570:151060

    Article  Google Scholar 

  22. Tseng SF, Yang YH (2022) Superhydrophobic graphene/ceramic templates for the preparation of particulate drugs. Ceram Int 48(2):2021–2030

    Article  Google Scholar 

  23. Li Z, Zheng H, Lim G, Chu P, Li L (2010) Study on UV laser machining quality of carbon fibre reinforced composites. Compos Part Appl Sci 41(10):1403–1408

    Article  Google Scholar 

  24. Wang X, Zheng H, Chu P, Tan J, Teh K, Liu T, Ang BC, Tay G (2010) Femtosecond laser drilling of alumina ceramic substrates. Appl Phys A 101(2):271–278

    Article  Google Scholar 

  25. Salama A, Li L, Mativenga P, Sabli A (2016) High-power picosecond laser drilling/machining of carbon fibre-reinforced polymer (CFRP) composites. Appl Phys A 122:73

    Article  Google Scholar 

  26. Hsiao WT, Tseng SF, Huang KC, Chiang D, Chen MF (2013) Micro-hole machining of silicon wafer in air and under de-ionized water by a pulsed UV laser system. Appl Phys A 110:565–570

    Article  Google Scholar 

  27. Li W, Huang Y, Chen X, Zhang G, Rong Y, Lu Y (2021) Study on laser drilling induced defects of CFRP plates with different scanning modes based on multi-pass strategy. Opt Laser Technol 144:107400

    Article  Google Scholar 

  28. Li J, Zhang W, Zheng H, Gao J, Jiang C (2023) Reducing plasma shielding effect for improved nanosecond laser drilling of copper with applied direct current. Opt Laser Technol 163:109372

    Article  Google Scholar 

  29. Chen MF, Chen YP, Hsiao WT, Wu SY, Hu CW, Gu ZP (2008) A scribing laser marking system using DSP controller. Opt Lasers Eng 46(5):410–418

    Article  Google Scholar 

  30. Jigang H, Qin Q, Jie W, Hui F (2018) Two dimensional laser galvanometer scanning technology for additive manufacturing. Int J Manuf Mater Mech Eng 6(5):332–336

    Google Scholar 

  31. Wang HJ, Yang T (2021) A review on laser drilling and cutting of silicon. J Eur Ceram Soc 41(10):4997–5015

    Article  MathSciNet  Google Scholar 

  32. Schoderböck P, Köstenbauer H (2021) Residual stress determination in thin films by X-ray diffraction and the widespread analytical practice applying a biaxial stress model: an outdated oversimplification? Appl Surf Sci 541:148531

    Article  Google Scholar 

  33. Chai J, Zhu Y, Gao X, Shen T, Niu L, Li S, Jin P, Cui M, Wang Z (2022) Effects of residual stress and intragranular particles on mechanical properties of hot-pressed Al2O3/SiC ceramic composites. Ceram Int 48(16):23258–23265

    Article  Google Scholar 

  34. Krämer S, Faulhaber S, Chambers M, Clarke DR, Levi CG, Hutchinson JW, Evans A (2008) Mechanisms of cracking and delamination within thick thermal barrier systems in aero-engines subject to calcium-magnesium-alumino-silicate (CMAS) penetration. Mater Sci Eng : A 490(1–2):26–35

    Article  Google Scholar 

  35. Luo J, Stevens R (1997) The role of residual stress on the mechanical properties of Al2O3-5 vol% SiC nano-composites. J Eur Ceram Soc 17(13):1565–1572

    Article  Google Scholar 

  36. Bharatish A, Murthy HN, Aditya G, Anand B, Satyanarayana B, Krishna M (2015) Evaluation of thermal residual stresses in laser drilled alumina ceramics using Micro-raman spectroscopy and COMSOL multiphysics. Opt Laser Technol 70:76–84

    Article  Google Scholar 

  37. Tshabalala LC, Pityana S (2016) Surface texturing of Si3N4–SiC ceramic tool components by pulsed laser machining. Surf Coat Technol 289:52–60

    Article  Google Scholar 

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Funding

and acknowledgments.

The authors appreciate the National Science and Technology Council of Taiwan under Project Nos. MOST 111-2628-E-027-005-MY2 and NSTC 112-2622-E-027-012 for financial support.

Author information

Authors and Affiliations

  1. Department of Mechanical Engineering, National Taipei University of Technology, Taipei, 106344, Taiwan

    Shih-Feng Tseng & Guan-Lin Chen

  2. Taiwan Instrument Research Institute, National Applied Research Laboratories, Hsinchu, 300092, Taiwan

    Chien-Yao Huang & Donyau Chiang

  3. Department of Mechanical Engineering, Ming Chi University of Technology, New Taipei City, 243303, Taiwan

    Chil-Chyuan Kuo

  4. Research Center for Intelligent Medical Devices, Ming Chi University of Technology, New Taipei City, 243303, Taiwan

    Chil-Chyuan Kuo

  5. Department of Mechanical Engineering, Chang Gung University, Taoyuan City, 333323, Taiwan

    Chil-Chyuan Kuo

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  1. Shih-Feng Tseng
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  2. Guan-Lin Chen
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Contributions

Shih-Feng Tseng: Conceptualization; Investigation; Methodology; Project administration; Formal analysis; Writing- Original draft; Writing- Reviewing and Editing. Guan-Lin Chen: Data curation; Software; Investigation; Validation. Chien-Yao Huang: Conceptualization; Methodology; Validation. Donyau Chiang: Investigation; Validation. Chil-Chyuan Kuo: Conceptualization; Investigation; Formal analysis.

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Correspondence to Shih-Feng Tseng or Chil-Chyuan Kuo.

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Tseng, SF., Chen, GL., Huang, CY. et al. Investigation of interactions between fiber lasers and Si3N4 sheets for drilling square microholes with multi-ring strategy. Int J Adv Manuf Technol 132, 1557–1572 (2024). https://doi.org/10.1007/s00170-024-13383-4

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  • DOI: https://doi.org/10.1007/s00170-024-13383-4

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