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Experimental investigation on axial ultrasonic-assisted grinding of different crystal surfaces of single-crystal gallium oxide

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Abstract

Gallium oxide is a semiconductor material with notable optoelectronic properties and thermal stability, with potential applications in optoelectronics, aerospace, and new energy sources, among others. Nevertheless, due to its high hardness and brittleness, gallium oxide poses challenges in efficient processing. The conventional grinding of gallium oxide often results in compromised surface quality accompanied by cracks and defects. In this study, we compared the outcomes of conventional grinding (CG) and axial ultrasonic-assisted grinding (AUVAG) on the (100) and (010) planes of single-crystal β-Ga2O3 material to investigate the grinding performance of the β-Ga2O3 surface. With the inclusion of axial ultrasound, the grinding force, grinding force ratio, and surface roughness of the (100) plane decreased by 12.39%, 8.71%, and 21.14%, respectively. The (010) plane showed reductions of 25.36%, 18.65%, and 15.68%, respectively. Moreover, we explored the influence of process parameters, including wheel grinding speed, feed rate, grinding depth, and ultrasonic amplitude, on the grinding force and surface roughness through orthogonal tests. The optimal process combination was identified under the current test parameters. The findings revealed that the grinding force, grinding force ratio, and surface roughness of different crystalline planes of β-Ga2O3 were reduced to varied extents, enhancing surface quality in comparison to conventional grinding. Notably, the (010) plane of β-Ga2O3 demonstrated superior grinding performance compared to the (100) plane. The insights from this study offer valuable guidance for refining the grinding techniques and processes of single-crystal β-Ga2O3 material.

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The data that support the findings of this study are available from the corresponding author upon reasonable request.

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Funding

National Natural Science Foundation of China (Nos. 51675457), Yancheng Institute of Technology Postgraduate Innovation Program Project (SJCX22_XZ013), Jiangsu Key Laboratory for Design and Manufacture of Micro/Nano Biomedical Instruments and School of Mechanical Engineering (Southeast University), Jiangsu Postgraduate Research and Innovation Program.

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Authors and Affiliations

  1. College of Mechanical Engineering, Yancheng Institute of Technology, Yancheng, 224051, China

    Shixiang Hu, Hai Zhou, Youming Yang & Xiangpu Ren

  2. Jiangsu Zhonggui Heavy Industry Co., Ltd., Yancheng, 224011, Jiangsu, China

    Jinde Song

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  1. Shixiang Hu
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  2. Hai Zhou
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Contributions

Shixiang Hu: experimentation, data curation, and writing the original draft. Hai Zhou: supervision, conceptualization, and methodology. Youming Yang: data collection and manuscript revision. Xiangpu Ren: experimentation and methodology. Jinde Song: materials and technical support.

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Correspondence to Hai Zhou.

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I would like to declare on behalf of my co-authors that the work described was original research that has not been published previously and is not under consideration for publication elsewhere, in whole or in part. All the authors listed have approved the manuscript that is enclosed.

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Hu, S., Zhou, H., Yang, Y. et al. Experimental investigation on axial ultrasonic-assisted grinding of different crystal surfaces of single-crystal gallium oxide. Int J Adv Manuf Technol 131, 4543–4556 (2024). https://doi.org/10.1007/s00170-024-13294-4

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  • DOI: https://doi.org/10.1007/s00170-024-13294-4

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