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Study of spray-mist-assisted laser processing of micro-structures on CVD diamond surface

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Abstract

Micro-structured chemical vapor deposition (CVD) diamonds with different geometric features tend to demonstrate outstanding performance and functionality in certain aspects. In this paper, an ablation model for machining micro-structures on the surface of CVD diamond coatings using spray-mist-assisted laser processing was established. Firstly, the principle of spray-mist-assisted laser processing was described, where the water film formed by spray impingement was taken into account for its influence on the laser beam through reflection and absorption, resulting in energy losses, as well as refraction causing focal plane shift. Next, a single groove ablation model was developed based on Gaussian optics and ablation threshold theory. Subsequently, the model validity was verified through laser ablation experiments. Meanwhile, the influences of laser parameters, including laser power, scanning speed, and defocusing distance on the machining characteristics, were discussed. Finally, utilizing raster scanning and incorporating the matrix convolution method, the laser ablation model was further extended. Micro-structures with parabolic-like profiles were achieved, indicating the applicability of this approach in guiding the fabrication of micro-structures with specific contours.

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Funding

This work was supported by Enterprise Innovation and Development Joint Program of the National Natural Science Foundation of China (No. U20B2032), National Natural Science Foundation of China (No. 51875135), and Open Research Foundation of State Key Laboratory of Intelligent Manufacturing Equipment and Technology in Huazhong University of Science and Technology, China (IMETKF2023005).

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Authors and Affiliations

  1. Centre for Precision Engineering, School of Mechatronics Engineering, Harbin Institute of Technology, Harbin, 150001, China

    Bing Guo, Zhenfei Guo, Zhongbo Zhang, Jianfei Jia, Qingyu Meng & Qingliang Zhao

  2. Beijing Institute of Control Engineering, Beijing, 100094, China

    Zhaoqi Zeng

  3. State Key Laboratory of Superabrasives, Zhengzhou Research Institute for Abrasives & Grinding Co. Ltd, Zhengzhou, 450001, China

    Kenan Li

  4. Beijing Spacecrafts, Beijing, 100094, China

    Lei Xu

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  1. Bing Guo
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Contributions

BG: conceptualization, methodology, formal analysis, supervision, writing—review and editing, writing—original draft. ZG: conceptualization, methodology, formal analysis, visualization, writing—original draft, writing—review and editing. ZZ: conceptualization, methodology, formal analysis, investigation, data curation, writing—original draft. JJ: methodology, formal analysis, writing—original draft. QM: data curation, writing—original draft. QZ: resources, data curation. ZZ: Resources, data curation, writing—original draft. KL: resources, supervision, writing—original draft. LX: visualization, writing—original draft.

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Correspondence to Bing Guo.

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Guo, B., Guo, Z., Zhang, Z. et al. Study of spray-mist-assisted laser processing of micro-structures on CVD diamond surface. Int J Adv Manuf Technol 130, 3851–3865 (2024). https://doi.org/10.1007/s00170-024-12958-5

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