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Experimental and numerical study of the CO2 laser-polishing edge effect on silica surface

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Abstract

CO2 laser glass polishing is an effective and widely studied method to acquire smooth and high-quality surfaces. In this study, the CO2 laser beam approximately 5 times larger than the width of the sample is used with slow scanning to polish a millimeter-sized silica rod sample. We have successfully reduced the Gaussian-filtered RMS surface roughness to 6.4 nm for an area of over 1.3 mm2. However, deformations are observed on the edges of the sample after the polishing process. This work focuses on the reasons and the approaches to overcome this deformation on the edges, presented for the first time in the literature. Experiments have revealed that these deformations result from the difference between the temperatures of the sample and its surrounding, not from the beam shape. A couple of approaches including masking, laser exposure timing, increasing the substrate temperature, and changing the substrate material, have been proposed to eliminate the deformations. Among these, replacing tungsten with silica as the substrate has been effective, and the direction of deformation is changed from upward to downward yielding smooth edges. The finite element method is used to further interpret the reason for this change with multiphysics like heat flux, heat transfer in solid and liquid, laminar flow, and deformed geometries. This work is believed to provide insight for future laser machining studies concerning the surface quality of millimeter and micron-scale optical components.

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Authors and Affiliations

  1. Sivas University of Science and Technology, 58000, Sivas, Turkey

    Yusuf Dogan

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  1. Yusuf Dogan
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This work is a single-authored paper, and material preparation, data collection, and analysis were performed; the first draft of the manuscript was written by Yusuf Dogan.

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Correspondence to Yusuf Dogan.

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Dogan, Y. Experimental and numerical study of the CO2 laser-polishing edge effect on silica surface. Int J Adv Manuf Technol 128, 1483–1491 (2023). https://doi.org/10.1007/s00170-023-12015-7

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  • DOI: https://doi.org/10.1007/s00170-023-12015-7

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