Skip to main content
SpringerLink
Log in

Establishment and analysis of feasibility evaluation system and ultra-precision manufacturing technology for small aperture free-form surface optical element

  • ORIGINAL ARTICLE
  • Published:
The International Journal of Advanced Manufacturing Technology Aims and scope Submit manuscript

Abstract

Free-form optical elements are more and more broadly used in modern optical systems due to their distinctive characteristics. In order to realize the high-precision manufacturing of free-form optical element, the constraints on parameters of manufacture and measurement were established based on the designing parameters of free-form optical element. Meanwhile, the evaluation system for the machinability and detectability of free-form optical element was obtained by means of the corresponding mathematical model. Furthermore, the White Light Interference (WLI) stitching detection technology, coupled with the least square multi-parameter optimization algorithm, was used to solve shape-error measurement of free-form optical element. Additionally, a free-form surface compensation manufacturing mechanism of asymmetric shape error was established. Based on the above methods, the polynomial free-form optics were processed and measured. According to the surface shape measurement results, the same element was processed with compensation manufacturing twice. The surface shape precision was obviously improved from PV = 2553 nm and RMS = 481 nm to PV = 214 nm and RMS = 19.9 nm, which verified the effectiveness of the method. A significant value was unfolded in the engineering application of this method.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6
Fig. 7
Fig. 8
Fig. 9

Similar content being viewed by others

Data availability

Data underlying the results presented in this paper are not publicly available at this time but may be obtained from the authors upon reasonable request.

References

  1. Jannick P, Matthew A, Thomas J, Chris E, Aaron B, John C, Konstantinos F (2021) Freeform Optics Imaging Optica 8(2):161–176. https://doi.org/10.1364/OPTICA.413762

    Article  Google Scholar 

  2. Yang T, Duan Y, Cheng D, Wang Y (2021) Freeform surface imaging optical system design: theory, development and application. Acta Optics 41(1):115–143. https://doi.org/10.3788/AOS202141.0108001

    Article  Google Scholar 

  3. Yang L, Shen F, Ding Z, Tao X, Zheng Z, Wu F, Li Y, Wu R (2021) Freeform optical design of beam shaping systems with variable illumination properties. Opt Express 29(20):31993–32005. https://doi.org/10.1364/OE.436340

    Article  Google Scholar 

  4. Yang T, Jin G, Zhu J (2017) Automated design of freeform imaging systems. Light Sci Appl 6:e17081. https://doi.org/10.1038/lsa.2017.81

    Article  Google Scholar 

  5. Zheng X, Li Z, Zhang X, Fang F (2018) Manufacturing-constrained optical design methodology for cylindrical freeform reflective imaging system. Opt Express 26(17):22547–22562. https://doi.org/10.1364/OE.26.022547

    Article  Google Scholar 

  6. Sang X, Chen Z, Gao X, Yan B, Li H, Wang Y, Zhao L (2019) Design and fabrication of a wide-angle off-axis three-mirror head-mounted display system. Optik 191:139–145. https://doi.org/10.1016/j.ijleo.2019.06.001

    Article  Google Scholar 

  7. Wei L, Li Y, Jing J, Feng L, Zhou J (2018) Design and fabrication of a compact off-axis see-through head-mounted display using a freeform surface. Opt Express 26(7):8550–8565. https://doi.org/10.1364/OE.26.008550

    Article  Google Scholar 

  8. Yu B, Tian Z, Su D, Sui Y, Yang H (2019) Design and engineering verification of an ultrashort throw ratio projection system with a freeform mirror. Appl Opt 58(13):3575–3581. https://doi.org/10.1364/AO.58.003575

    Article  Google Scholar 

  9. Wu W, Jin G, Zhu J (2019) Optical design of the freeform reflective imaging system with wide rectangular FOV and low F-number. Results Phys 15:102688. https://doi.org/10.1016/j.rinp.2019.102688

    Article  Google Scholar 

  10. Shen Z, Yu J, Song Z, Chen L, Yuan Q, Gao Z, Pei S, Liu B, Ye J (2019) Customized design and efficient fabrication of two freeform aluminum mirrors by single point diamond turning technique. Appl Opt 58(9):2269–2276. https://doi.org/10.1364/AO.58.002269

    Article  Google Scholar 

  11. Xie Y, Mao X, Li J, Wang F, Wang P, Gao R, Li X, Ren S, Xu Z, Dong R (2020) Optical design and fabrication of an all-aluminum unobscured two-mirror freeform imaging telescope. Appl Opt 59(3):833–840. https://doi.org/10.1364/AO.379324

    Article  Google Scholar 

  12. Ding Y, Yu J, Lu Z (2023) The relationship between adhesion morphology and cutting force in orthogonal cutting of 6061–T6 aluminum alloy. Int J Adv Manuf Technol 124:1971–1991. https://doi.org/10.21203/rs.3.rs-1288227/v1

    Article  Google Scholar 

  13. Dong Z, Yan Y, Peng G, Li C, Geng Y (2023) Effects of sandwiched film thickness and cutting tool water contact angle on the processing outcomes in nanoskiving of nanowires. Mater Design 225:111438. https://doi.org/10.1016/j.matdes.2022.111438

    Article  Google Scholar 

  14. Wang J, Yan Y, Li C, Geng Y (2023) Material removal mechanism and subsurface characteristics of silicon 3D nanomilling. Int J Mechanical Sci 242:108020. https://doi.org/10.1016/j.ijmecsci.2022.108020

    Article  Google Scholar 

  15. You K, Fang F, Yan G (2021) Surface generation of tungsten carbide in laser-assisted diamond turning. Int J Machine Tools Manuf 168:103770. https://doi.org/10.1016/j.ijmachtools.2021.103770

    Article  Google Scholar 

  16. Xing Y, Li C, Liu Y, Yang C, Xue C (2021) Fabrication of high-precision freeform surface on die steel by ultrasonic-assisted slow tool servo. Opt Express 29(3):3708–3723. https://doi.org/10.1364/OE.417307

    Article  Google Scholar 

  17. Fang F, Zhang X, Weckenmann A, Zhang G, Evans C (2013) Manufacturing and measurement of freeform optics. CIRP Ann 62(2):823–846. https://doi.org/10.1016/j.cirp.2013.05.003

    Article  Google Scholar 

  18. Huang Y, Li S, Zhang J, Yang C, Kong Y, Liu W (2021) Research on surface quality difference of microlens array fabricated by Fast Tool Servo cutting. IEEE Photonics J 13(2):2500309. https://doi.org/10.1109/JPHOT.2021.3069465

    Article  Google Scholar 

  19. Tanikawa S, Yan J (2022) Fabrication of micro-structured surface with controllable randomness by using FTS-based diamond turning. Precis Eng 73:363–376. https://doi.org/10.1016/j.precisioneng.2021.10.005

    Article  Google Scholar 

  20. Li Z, Fang F, Chen J, Zhang X (2017) Machining approach of freeform optics on infrared materials via ultra-precision turning. Opt Express 25(3):2051–2062. https://doi.org/10.1364/OE.25.002051

    Article  Google Scholar 

  21. Vinod M, Dali R, Kamal K, Vinod K, Gufran S (2019) Form error compensation in the slow tool servo machining of freeform optics. Int J Adv Manuf Technol 105(3):1623–1635. https://doi.org/10.1007/s00170-019-04359-w

    Article  Google Scholar 

  22. Yu D, Wong Y, Hong G (2011) Optimal selection of machining parameters for fast tool servo diamond turning. Int J Adv Manuf Technol 57:85–99. https://doi.org/10.1007/s00170-011-3280-z

    Article  Google Scholar 

  23. Zhang X, Fang F, Wang H, Wei G, Hu X (2009) Ultra-precision machining of sinusoidal surfaces using the cylindrical coordinate method. J Micromechanics Microeng 19(5):054004. https://doi.org/10.1088/0960-1317/19/5/054004

    Article  Google Scholar 

  24. Solomon A. Gugsa, Angela D (2005) Monte Carlo analysis for the determination of conic constant of an aspheric micro lens based on a scanning white light interferometric measurement. Proc. SPIE 5878, Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies II, 58780B. https://doi.org/10.1117/12.617528

  25. Lei Z, Liu X, Zhao L, Chen L, Li Q, Yuan T, Lu W (2016) A novel 3D stitching method for WLI based large range surface topography measurement. Opt Commu 359:435–447. https://doi.org/10.1016/j.optcom.2015.09.074

    Article  Google Scholar 

  26. Lu W, Chen S, Guo J, Wang X, Chen W (2021) 3D surface topography measurement of diffractive optical element based on white light interferometry stitching method. Proc. SPIE 12072, 10th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Micro- and Nano-Optics, Catenary Optics, and Subwavelength Electromagnetics, 120720R. https://doi.org/10.1117/12.2604523

  27. Amparo R, Raymond B (2010) Micro-stitching interferometry at the ESRF. Nucl Instrum Methods Phys Res 616(2–3):183–187. https://doi.org/10.1016/j.nima.2009.11.020

    Article  Google Scholar 

  28. Li R, Du X, Zhang Z (2015) Design, machining and measuring technique of ultra-precision freeform optics. China Machine Press, p128–136

  29. Huang Y, Li S, Zhao F, Zhang J, Yang C, Liu W (2022) Matching measurement strategy and form error compensation for freeform surface machining based on STS turning. Appl Sci 12(11):5584. https://doi.org/10.3390/app12115584

    Article  Google Scholar 

Download references

Acknowledgements

The authors thank Mr.Wang Shouyi for his help in the experiments.

Funding

Key Industry Innovation Chain Project of Shaanxi Provincial Science and Technology Department (2021ZDLGY12-05); Basic Scientific Research (JCKY2020426B009); Project of Shaanxi Provincial Science and the Technology Department (2022GY-222); “Belt and Road” Innovative Talent Exchange Program for foreign experts(DL2022040006L); Science and Technology on Transient Impact Laboratory Foundation(6142606203209).

Author information

Authors and Affiliations

  1. Shaanxi Province Key Laboratory of Thin Film Technology and Optical Test, School of Optoelectronic Engineering, Xi’an Technological University, Xi’an, 710021, Shaanxi Xi’an, China

    Shijie Li, Yuetian Huang, Chen Yang, Jin Zhang, Haifeng Liang, Changlong Cai & Weiguo Liu

  2. Xi’an North Electro-Optic Science &Technology Defense Co. Ltd., Shaanxi Xi’an, 710043, Xi’an, China

    Fengyuan Zhao

Authors
  1. Shijie Li
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Yuetian Huang
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Fengyuan Zhao
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Chen Yang
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. Jin Zhang
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. Haifeng Liang
    View author publications

    You can also search for this author in PubMed Google Scholar

  7. Changlong Cai
    View author publications

    You can also search for this author in PubMed Google Scholar

  8. Weiguo Liu
    View author publications

    You can also search for this author in PubMed Google Scholar

Contributions

Shijie Li: conceptualization, writing — original draft, methodology, formal analysis, project administration; Yuetian Huang: writing — original draft, data curation, visualization; Fengyuan Zhao: project administration; Chen Yang: writing — review and editing, validation, software; Jin Zhang: writing — review and editing, validation; Haifeng Liang: investigation, supervision; Changlong Cai: funding acquisition, supervision; Wuiguo Liu: resources, funding acquisition.

Corresponding author

Correspondence to Shijie Li.

Ethics declarations

Competing interests

The authors declare no competing interests.

Additional information

Publisher's note

Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.

Rights and permissions

Springer Nature or its licensor (e.g. a society or other partner) holds exclusive rights to this article under a publishing agreement with the author(s) or other rightsholder(s); author self-archiving of the accepted manuscript version of this article is solely governed by the terms of such publishing agreement and applicable law.

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Li, S., Huang, Y., Zhao, F. et al. Establishment and analysis of feasibility evaluation system and ultra-precision manufacturing technology for small aperture free-form surface optical element. Int J Adv Manuf Technol 127, 2299–2308 (2023). https://doi.org/10.1007/s00170-023-11651-3

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s00170-023-11651-3

Keywords

Search

Navigation