Skip to main content

Advertisement

Log in

Effect of dispersion performance of polishing slurry on the polishing quality of glass-ceramics in bonnet polishing

  • ORIGINAL ARTICLE
  • Published:
The International Journal of Advanced Manufacturing Technology Aims and scope Submit manuscript

Abstract

As a material with both glass and ceramic properties, glass-ceramics have been widely used because of its low expansion coefficient, stable physical and chemical properties, and good mechanical properties. In order to obtain the super-smooth surface of glass-ceramics, the bonnet polishing method was used in this paper. Firstly, the removal mechanism of glass-ceramics was analyzed, and the influence of particle size on the removal mode was obtained by establishing the indentation depth model of free abrasive particles. Secondly, the best polishing slurry formulation was obtained by investigating the dispersion of abrasive particles in polishing slurry with different kinds and contents of dispersants. Then, through the comparative experiment of glass-ceramics polishing, it was proved that the dispersion effect of abrasive particles in polishing slurry has a significant impact on the polishing quality. Finally, through orthogonal experiments, the optimal processing parameters were selected, and only the alumina abrasive particles with an average size of 2.5 μm were used to obtain a super-smooth surface with a surface roughness Ra of 3.16 nm.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6
Fig. 7
Fig. 8
Fig. 9
Fig. 10
Fig. 11
Fig. 12
Fig. 13
Fig. 14
Fig. 15

Similar content being viewed by others

Data availability

Not applicable here.

Code availability

Not applicable.

References

  1. Yang X, Qiu Z, Li X (2019) Investigation of scratching sequence influence on material removal mechanism of glass-ceramics by the multiple scratch tests. Ceram Int 45:861–873

    Article  Google Scholar 

  2. Li P, Chen S, Jin T, Yi J, Liu W, Wu Q, Peng W, Dai H (2021) Machining behaviors of glass-ceramics in multi-step high-speed grinding: grinding parameter effects and optimization. Ceram Int 47:4659–4673

    Article  Google Scholar 

  3. Fuertes V, Cabrera J, Seores J, Muñoz D, Fernández F, Enríquez E (2019) Enhanced wear resistance of engineered glass-ceramic by nanostructured self-lubrication. Mater Des 168:107623

    Article  Google Scholar 

  4. Li S, Xu Y, Zhang X, Lu P (2022) Formation and crystal growth of needle-like rutile in glass- ceramics. J Eur Ceram Soc 42:3313–3320

    Article  Google Scholar 

  5. Wang Y, Zhang Y, Zhang L, Zhang J, Li C, Yu G, Chen J (2017) The application and development of ultra low expansion glass-ceramic in aerospace area. Space Optics Earth Imag Space Navigation 10463:104630G1–104630G6

    Google Scholar 

  6. Hartmann P, Jedamzik R, Carré A, Krieg J, Westerhoff T (2021) Glass ceramic ZERODUR®: even closer to zero thermal expansion: a review, part 2. J Astron Telesc Instrum Syst 7:020902

    Google Scholar 

  7. Hartmann P, Jedamzik R, Reichel S, Schreder B (2010) Optical glass and glass ceramic historical aspects and recent developments: a Schott view. Appl Opt 49:D157–D176

    Article  Google Scholar 

  8. Alzahrani S, Pintori G, Sglavo M (2021) Conventional and electric field-assisted ion exchange on glass-ceramics for dental applications. J Eur Ceram Soc 41:5341–5348

    Article  Google Scholar 

  9. Chen Y, Lin C, Cheng H (2006) Polishing glass-ceramic based rigid disk. Mater Sci Forum 505:1213–1218

    Article  Google Scholar 

  10. Gorodkin G, Novikova Z (2012) Influence of flowing parameter of magnetorheological polishing slurrys (MRPFs) on the quality of processing polycrystalline glass ceramics. J Intell Mater Syst Struct 23:959–962

    Article  Google Scholar 

  11. Kumar M, Das M (2022) Performance evaluation of rotational-magnetorheological Glass-ceramic polishing (R-MRGP) process setups. Arab J Sci Eng 21:1–16

    Article  Google Scholar 

  12. Savvides N (2005) Surface microroughness of ion-beam etched optical surfaces. J Appl Phys 97:053517

    Article  Google Scholar 

  13. Zhao W, Zhang L, Yang Z (2012) Experimental investigation into electrorheological fluid-assisted polishing of glass-ceramic. Appl Mech Mater 184:977–980

    Article  Google Scholar 

  14. Zhu W, Beaucamp A (2019) Ultra-precision finishing of low expansion ceramics by compliant abrasive technologies: a comparative study. Ceram Int 45:11527–11538

    Article  Google Scholar 

  15. Zhu W, Beaucamp A (2020) Compliant grinding and polishing: a review. Int J Mach Tools Manuf 158:103634

    Article  Google Scholar 

  16. Shi C, Peng Y, Hou L, Wang Z, Guo Y (2018) Micro-analysis model for material removal mechanisms of bonnet polishing. Appl Opt 57:2861–2872

    Article  Google Scholar 

  17. Li Y, Liu Y, Wang C, Niu X, Ma T, Xu Y (2018) Role of dispersant agent on scratch reduction during copper barrier chemical mechanical planarization. ECS J Solid State Sci Technol 7:317–322

    Article  Google Scholar 

  18. Asghar K, Qasim M, Nelabhotla M, Das D (2016) Effect of surfactant and electrolyte on surface modification of c-plane GaN substrate using chemical mechanical planarization (CMP) process. Colloids Surf A Physicochem Eng Asp 497:133–145

    Article  Google Scholar 

  19. Zeng N, Zhao H, Liu Y, Wang C, Luo C, Wang W, Ma T (2021) Optimizing of the colloidal dispersity of silica nanoparticle slurries for chemical mechanical polishing. Silicon 14:7473–7481

    Article  Google Scholar 

  20. Zhang Z, Liu W, Song Z (2010) Particle size and surfactant effects on chemical mechanical polishing of glass using silica-based slurry. Appl Opt 49:5480–5485

    Article  Google Scholar 

  21. Bernard P, Kapsa P, Coudé T, Abry J (2005) Influence of surfactant and salts on chemical mechanical planarisation of copper. Wear 259:1367–1371

    Article  Google Scholar 

  22. Ma L, Gong Y, Chen X (2014) Study on surface roughness model and surface forming mechanism of ceramics in quick point grinding. Int J Mach Tools Manuf 77(2):82–92

    Article  Google Scholar 

  23. Dong Z, Cheng H (2014) Study on removal mechanism and removal characters for SiC and fused silica by fixed abrasive diamond pellets. Int J Mach Tools Manuf 85(5):1–13

    Google Scholar 

  24. Cao ZC, Cheung CF, Zhao X (2016) A theoretical and experimental investigation of material removal characteristics and surface generation in bonnet polishing. Wear 360:137–146

    Article  Google Scholar 

  25. Chen H, Guo D, Xie G, Pan G (2016) Mechanical model of nanoparticles for material removal in chemical mechanical polishing process. Friction 4:153–164

    Article  Google Scholar 

  26. Zhao Y, Chang L (2002) A micro-contact and wear model for chemical–mechanical polishing of silicon wafers. Wear 252(3-4):220–226

    Article  Google Scholar 

  27. Li T, Sun H, Wang D, Huang J, Li D, Lei F, Sun D (2021) High-performance chemical mechanical polishing slurry for aluminum alloy using hybrid abrasives of zirconium phosphate and alumina. Appl Surf Sci 537:147859

    Article  Google Scholar 

  28. Wang W, Zhang B, Shi Y, Zhou D, Wang R (2022) Improvement in dispersion stability of alumina suspensions and corresponding chemical mechanical polishing performance. Appl Surf Sci 597:153703

    Article  Google Scholar 

  29. Deng H, Zhong M, Xu W (2022) Effects of different dispersants on chemical reaction and material removal in ultrasonic assisted chemical mechanical polishing of sapphire. ECS J Solid State Sci Technol 11:033007

    Article  Google Scholar 

  30. Pan R, Zhao W, Wang Z, Ji S, Gao X, Chen D, Fan J (2021) Research on an evaluation model for the working stiffness of a robot-assisted bonnet polishing system. J Manuf Process 65:134–143

    Article  Google Scholar 

  31. Li H, Walker D, Zheng X, Su X, Wu L, Reynolds C, Yu G, Li T, Zhang P (2019) Mid-spatial frequency removal on aluminum free-form mirror. Opt Express 27:24885–24899

    Article  Google Scholar 

  32. Naderi O, Nyman M, Amiri M, Sadeghi R (2019) Synthesis and characterization of silver nanoparticles in aqueous solutions of surface active imidazolium-based ionic liquids and traditional surfactants SDS and DTAB. J Mol Liq 273:645–652

    Article  Google Scholar 

  33. Hou J, Du W, Meng F, Zhao C, Du X (2018) Effective dispersion of multi-walled carbon nanotubes in aqueous solution using an ionic-Gemini dispersant. J Colloid Interface Sci 512:750–757

    Article  Google Scholar 

Download references

Funding

This study was financially supported by the Science and Technology Project of Fujian Province (2018H6013), National Natural Science Foundation of China (51905182), and Fundamental Research Funds for the Central Universities (ZQN-805).

Author information

Authors and Affiliations

Authors

Contributions

Ziwei Wu designed and performed the experiments. Jianyun Shen and Xian Wu analyzed the experimental results. Ziwei Wu contributed in the ideal and paper writing. Yunfeng Peng contributed language and figure correction. Shanlong Lin and Linbin Huang contributed the reference materials collecting. Xuepeng Huang and Laifa Zhu provided help and guidance during the experiments. All the authors have read and agreed to the published version of the manuscript.

Corresponding author

Correspondence to Jianyun Shen.

Ethics declarations

Ethics approval

Not applicable.

Consent to participate

Not applicable.

Consent for publication

Not applicable.

Conflict of interest

The authors declare no competing interests.

Additional information

Publisher’s note

Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.

Rights and permissions

Springer Nature or its licensor (e.g. a society or other partner) holds exclusive rights to this article under a publishing agreement with the author(s) or other rightsholder(s); author self-archiving of the accepted manuscript version of this article is solely governed by the terms of such publishing agreement and applicable law.

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Wu, Z., Shen, J., Wu, X. et al. Effect of dispersion performance of polishing slurry on the polishing quality of glass-ceramics in bonnet polishing. Int J Adv Manuf Technol 127, 107–121 (2023). https://doi.org/10.1007/s00170-023-11532-9

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s00170-023-11532-9

Keywords

Navigation