Abstract
As a material with both glass and ceramic properties, glass-ceramics have been widely used because of its low expansion coefficient, stable physical and chemical properties, and good mechanical properties. In order to obtain the super-smooth surface of glass-ceramics, the bonnet polishing method was used in this paper. Firstly, the removal mechanism of glass-ceramics was analyzed, and the influence of particle size on the removal mode was obtained by establishing the indentation depth model of free abrasive particles. Secondly, the best polishing slurry formulation was obtained by investigating the dispersion of abrasive particles in polishing slurry with different kinds and contents of dispersants. Then, through the comparative experiment of glass-ceramics polishing, it was proved that the dispersion effect of abrasive particles in polishing slurry has a significant impact on the polishing quality. Finally, through orthogonal experiments, the optimal processing parameters were selected, and only the alumina abrasive particles with an average size of 2.5 μm were used to obtain a super-smooth surface with a surface roughness Ra of 3.16 nm.
Similar content being viewed by others
Data availability
Not applicable here.
Code availability
Not applicable.
References
Yang X, Qiu Z, Li X (2019) Investigation of scratching sequence influence on material removal mechanism of glass-ceramics by the multiple scratch tests. Ceram Int 45:861–873
Li P, Chen S, Jin T, Yi J, Liu W, Wu Q, Peng W, Dai H (2021) Machining behaviors of glass-ceramics in multi-step high-speed grinding: grinding parameter effects and optimization. Ceram Int 47:4659–4673
Fuertes V, Cabrera J, Seores J, Muñoz D, Fernández F, Enríquez E (2019) Enhanced wear resistance of engineered glass-ceramic by nanostructured self-lubrication. Mater Des 168:107623
Li S, Xu Y, Zhang X, Lu P (2022) Formation and crystal growth of needle-like rutile in glass- ceramics. J Eur Ceram Soc 42:3313–3320
Wang Y, Zhang Y, Zhang L, Zhang J, Li C, Yu G, Chen J (2017) The application and development of ultra low expansion glass-ceramic in aerospace area. Space Optics Earth Imag Space Navigation 10463:104630G1–104630G6
Hartmann P, Jedamzik R, Carré A, Krieg J, Westerhoff T (2021) Glass ceramic ZERODUR®: even closer to zero thermal expansion: a review, part 2. J Astron Telesc Instrum Syst 7:020902
Hartmann P, Jedamzik R, Reichel S, Schreder B (2010) Optical glass and glass ceramic historical aspects and recent developments: a Schott view. Appl Opt 49:D157–D176
Alzahrani S, Pintori G, Sglavo M (2021) Conventional and electric field-assisted ion exchange on glass-ceramics for dental applications. J Eur Ceram Soc 41:5341–5348
Chen Y, Lin C, Cheng H (2006) Polishing glass-ceramic based rigid disk. Mater Sci Forum 505:1213–1218
Gorodkin G, Novikova Z (2012) Influence of flowing parameter of magnetorheological polishing slurrys (MRPFs) on the quality of processing polycrystalline glass ceramics. J Intell Mater Syst Struct 23:959–962
Kumar M, Das M (2022) Performance evaluation of rotational-magnetorheological Glass-ceramic polishing (R-MRGP) process setups. Arab J Sci Eng 21:1–16
Savvides N (2005) Surface microroughness of ion-beam etched optical surfaces. J Appl Phys 97:053517
Zhao W, Zhang L, Yang Z (2012) Experimental investigation into electrorheological fluid-assisted polishing of glass-ceramic. Appl Mech Mater 184:977–980
Zhu W, Beaucamp A (2019) Ultra-precision finishing of low expansion ceramics by compliant abrasive technologies: a comparative study. Ceram Int 45:11527–11538
Zhu W, Beaucamp A (2020) Compliant grinding and polishing: a review. Int J Mach Tools Manuf 158:103634
Shi C, Peng Y, Hou L, Wang Z, Guo Y (2018) Micro-analysis model for material removal mechanisms of bonnet polishing. Appl Opt 57:2861–2872
Li Y, Liu Y, Wang C, Niu X, Ma T, Xu Y (2018) Role of dispersant agent on scratch reduction during copper barrier chemical mechanical planarization. ECS J Solid State Sci Technol 7:317–322
Asghar K, Qasim M, Nelabhotla M, Das D (2016) Effect of surfactant and electrolyte on surface modification of c-plane GaN substrate using chemical mechanical planarization (CMP) process. Colloids Surf A Physicochem Eng Asp 497:133–145
Zeng N, Zhao H, Liu Y, Wang C, Luo C, Wang W, Ma T (2021) Optimizing of the colloidal dispersity of silica nanoparticle slurries for chemical mechanical polishing. Silicon 14:7473–7481
Zhang Z, Liu W, Song Z (2010) Particle size and surfactant effects on chemical mechanical polishing of glass using silica-based slurry. Appl Opt 49:5480–5485
Bernard P, Kapsa P, Coudé T, Abry J (2005) Influence of surfactant and salts on chemical mechanical planarisation of copper. Wear 259:1367–1371
Ma L, Gong Y, Chen X (2014) Study on surface roughness model and surface forming mechanism of ceramics in quick point grinding. Int J Mach Tools Manuf 77(2):82–92
Dong Z, Cheng H (2014) Study on removal mechanism and removal characters for SiC and fused silica by fixed abrasive diamond pellets. Int J Mach Tools Manuf 85(5):1–13
Cao ZC, Cheung CF, Zhao X (2016) A theoretical and experimental investigation of material removal characteristics and surface generation in bonnet polishing. Wear 360:137–146
Chen H, Guo D, Xie G, Pan G (2016) Mechanical model of nanoparticles for material removal in chemical mechanical polishing process. Friction 4:153–164
Zhao Y, Chang L (2002) A micro-contact and wear model for chemical–mechanical polishing of silicon wafers. Wear 252(3-4):220–226
Li T, Sun H, Wang D, Huang J, Li D, Lei F, Sun D (2021) High-performance chemical mechanical polishing slurry for aluminum alloy using hybrid abrasives of zirconium phosphate and alumina. Appl Surf Sci 537:147859
Wang W, Zhang B, Shi Y, Zhou D, Wang R (2022) Improvement in dispersion stability of alumina suspensions and corresponding chemical mechanical polishing performance. Appl Surf Sci 597:153703
Deng H, Zhong M, Xu W (2022) Effects of different dispersants on chemical reaction and material removal in ultrasonic assisted chemical mechanical polishing of sapphire. ECS J Solid State Sci Technol 11:033007
Pan R, Zhao W, Wang Z, Ji S, Gao X, Chen D, Fan J (2021) Research on an evaluation model for the working stiffness of a robot-assisted bonnet polishing system. J Manuf Process 65:134–143
Li H, Walker D, Zheng X, Su X, Wu L, Reynolds C, Yu G, Li T, Zhang P (2019) Mid-spatial frequency removal on aluminum free-form mirror. Opt Express 27:24885–24899
Naderi O, Nyman M, Amiri M, Sadeghi R (2019) Synthesis and characterization of silver nanoparticles in aqueous solutions of surface active imidazolium-based ionic liquids and traditional surfactants SDS and DTAB. J Mol Liq 273:645–652
Hou J, Du W, Meng F, Zhao C, Du X (2018) Effective dispersion of multi-walled carbon nanotubes in aqueous solution using an ionic-Gemini dispersant. J Colloid Interface Sci 512:750–757
Funding
This study was financially supported by the Science and Technology Project of Fujian Province (2018H6013), National Natural Science Foundation of China (51905182), and Fundamental Research Funds for the Central Universities (ZQN-805).
Author information
Authors and Affiliations
Contributions
Ziwei Wu designed and performed the experiments. Jianyun Shen and Xian Wu analyzed the experimental results. Ziwei Wu contributed in the ideal and paper writing. Yunfeng Peng contributed language and figure correction. Shanlong Lin and Linbin Huang contributed the reference materials collecting. Xuepeng Huang and Laifa Zhu provided help and guidance during the experiments. All the authors have read and agreed to the published version of the manuscript.
Corresponding author
Ethics declarations
Ethics approval
Not applicable.
Consent to participate
Not applicable.
Consent for publication
Not applicable.
Conflict of interest
The authors declare no competing interests.
Additional information
Publisher’s note
Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.
Rights and permissions
Springer Nature or its licensor (e.g. a society or other partner) holds exclusive rights to this article under a publishing agreement with the author(s) or other rightsholder(s); author self-archiving of the accepted manuscript version of this article is solely governed by the terms of such publishing agreement and applicable law.
About this article
Cite this article
Wu, Z., Shen, J., Wu, X. et al. Effect of dispersion performance of polishing slurry on the polishing quality of glass-ceramics in bonnet polishing. Int J Adv Manuf Technol 127, 107–121 (2023). https://doi.org/10.1007/s00170-023-11532-9
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s00170-023-11532-9