Skip to main content
SpringerLink
Log in

Research on laser-assisted micro-milling of fused silica

  • ORIGINAL ARTICLE
  • Published:
The International Journal of Advanced Manufacturing Technology Aims and scope Submit manuscript

Abstract

Fused silica glass and other hard and brittle materials are widely used in optical components, microfluidic chips and other fields, which have the characteristics of high hardness, low ductility, and difficult processing. Using traditional milling method not only causes tool wear, but also causes the surface and sub-surface damage of components, which seriously affects the quality of components. In order to improve the surface quality and processing efficiency, laser-assisted micro-milling process is proposed in this paper. Using laser as a material softening tool, the ductility domain of the material can be enlarged, and the surface roughness of the fused silica workpiece can be effectively improved. In this paper, through the method of finite element simulation and experiments, the relationship between laser parameters and processing temperature of fused silica elements is calculated, and several groups of laser parameters are selected as experimental parameters. The experimental results shows that the surface roughness of fused silica workpiece can be effectively reduced to 51 nm, and the tool wear width can be reduced to 3.8 μm after laser assisted.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6
Fig. 7
Fig. 8
Fig. 9
Fig. 10

Similar content being viewed by others

Data availability

Not applicable.

Code availability

Not applicable.

References

  1. Song HW, Dan JQ, Chen X, Xiao JF, Xu JF (2018) Experimental investigation of machinability in laser-assisted machining of fused silica. Int J Adv Manuf Technol 97(1–14):1–12

    Google Scholar 

  2. Liu FD, Chen GL, Hu Q (2016) Material removal model of chemical mechanical polishing for fused silica using soft nanoparticles. Int J Adv Manuf Technol 88:3515–3525

    Article  Google Scholar 

  3. Pease RF, Chou SY (2008) Lithography and other patterning techniques for future electronics. Proc IEEE 96(2):248–270

    Article  Google Scholar 

  4. Darvishi S, Cubaud T, Longtin JP (2012) Ultrafast laser machining of tapered microchannels in glass and PDMS. Opt Lasers Eng 50:204–214

    Article  Google Scholar 

  5. Bhatt D, Hutt DA, Conway PP (2012) Excimer laser machining of microvias in glass substrates for the manufacture of high density interconnects. Appl Phys B: Lasers Opt 108:137–147

    Article  Google Scholar 

  6. Ebenezer OA, Dalton C (2020) Fabrication of a 3D multi-depth reservoir micromodel in borosilicate glass using femtosecond laser material processing. Micromachines 11:1082

    Article  Google Scholar 

  7. Konari PR, Clayton YD, Vaughan MB, Khandaker M, Hossan MR (2021) Experimental analysis of laser micromachining of microchannels in common microfluidic substrates. Micromachines 12:138

    Article  Google Scholar 

  8. Takeuchi Y, Sawada K, Sata T (1996) Ultraprecision 3D micromachining of glass. CIRP Ann Manuf Technol 45(1):401–404

    Article  Google Scholar 

  9. Shirakashi T, Obikawa T (2003) Feasibility of gentle mode machining of brittle materials and its condition. J Mater Process Technol 138:522–526

    Article  Google Scholar 

  10. Abual-Rub RK (2007) Prediction of micro and nanoindentation size effect from conical or pyramidal indentation. Mech Mater 39(8):787–802

    Article  Google Scholar 

  11. Muhammad A, Mustafizur R, Wong YS (2011) Ultraprecision ductile mode machining of glass by micromilling process. J Manuf Process 13(1):50–59

    Article  Google Scholar 

  12. Takenori O, Takashi M (2008) Influence of tool inclination on brittle fracture in glass cutting with ball end mills. J Mater Process Technol 202(1–3):61–69

    Google Scholar 

  13. Dobrev T, Dimov SS, Thomas AJ (2006) Laser milling: modelling crater and surface formation. ARCHIVE Proc Inst Mech Eng Part C J Mech Eng Sci 220(11):1685–1696

    Article  Google Scholar 

  14. Shen XW, Yang BD, Lei ST (2010) Distinct element modeling of laser assisted milling of silicon nitride ceramics. J Manuf Process 12(1):30–37

    Article  Google Scholar 

  15. Zhang CB, Ao HR, Jiang HY, Zhou NN (2021) Investigations on start-up performances of novel hybrid metal rubber-bump foil bearings. Tribol Int 154:106751

    Article  Google Scholar 

Download references

Funding

This research was funded by National Natural Science Foundation of China (Nos. 51175123, 51105112, and 51905130), National Science and Technology Major Project (No. 2013ZX04006011-205), and China Postdoctoral Science Foundation (Nos. 2019M651276 and 2019TQ0078).

Author information

Authors and Affiliations

  1. Center for Precision Engineering, Harbin Institute of Technology, Harbin, 150001, China

    Yuan Jin, Bo Wang, Peng Ji, Zheng Qiao, Duo Li & Fei Ding

Authors
  1. Yuan Jin
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Bo Wang
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Peng Ji
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Zheng Qiao
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. Duo Li
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. Fei Ding
    View author publications

    You can also search for this author in PubMed Google Scholar

Contributions

Theory, experiment, and writing.

Corresponding author

Correspondence to Zheng Qiao.

Ethics declarations

Ethics approval

Not applicable.

Consent to participate

I agree to participate.

Consent for publication

I agree to publish.

Competing interests

The authors declare no competing interests.

Additional information

Publisher's note

Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.

Rights and permissions

Springer Nature or its licensor (e.g. a society or other partner) holds exclusive rights to this article under a publishing agreement with the author(s) or other rightsholder(s); author self-archiving of the accepted manuscript version of this article is solely governed by the terms of such publishing agreement and applicable law.

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Jin, Y., Wang, B., Ji, P. et al. Research on laser-assisted micro-milling of fused silica. Int J Adv Manuf Technol 124, 69–77 (2023). https://doi.org/10.1007/s00170-022-10535-2

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s00170-022-10535-2

Keywords

Search

Navigation