Skip to main content
SpringerLink
Log in

Fabrication of periodic nanostructure using a multi-tip diamond tool: depth prediction and material removal mechanism

  • ORIGINAL ARTICLE
  • Published:
The International Journal of Advanced Manufacturing Technology Aims and scope Submit manuscript

Abstract

Periodic nanostructures have been widely used in many fields, such as optics, biomedical, and superhydrophobic surface, which has drawn increasing attention in the last few years. It is still challenging how to fabricate a large-scale periodic nanostructure with high efficiency and good consistency. In this study, a multi-tip diamond tool is utilized to machine large-scale ripple structures based on a homemade four-axis micro-machine tool. A theoretical model based on orthogonal cutting is established to investigate the relationship between the cutting force and the machined depth. The theoretical normal values calculated using this established model agree well with the experimental results. Moreover, the subsurface characterizations of the machined multi-grooves with depths of 220 nm and 1030 nm are investigated by TEM. The TEM results reveal that geometrically necessary boundaries (GNBs), subgrains, dislocations, and stacking faults are induced in the cutting process for the multi-grooves with a depth of 220 nm owing to the accumulation of strain. For the multi-grooves with a depth of 1030 nm, the sample materials undergo a more severe shear and high defect concentration, which could cause the slip band, nanocrystallites, and amorphous structures. Large-scale ripple structures with the ranges of 200 μm × 500 μm and 450 μm × 500 μm, respectively, are machined by scratching 40 times with a feed of 5 μm and 30 times with a feed of 15 μm. Our findings are significant for machining a high-quality periodic nanostructure with high efficiency and good consistency that can be used in the optical field.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6
Fig. 7
Fig. 8
Fig. 9
Fig. 10
Fig. 11

Similar content being viewed by others

References

  1. Sun M, Luo C, Xu L, Ji H, Ouyang Q, Yu D, Chen Y (2005) Artificial Lotus leaf by nanocasting. Langmuir 21:8978–8981. https://doi.org/10.1021/la050316q

    Article  Google Scholar 

  2. Wang J, Yan Y, Chang S, Han Y, Geng Y (2020) Label-free surface-enhanced Raman spectroscopy detection of absorption manner of lysozyme based on nanodots arrays. Appl Surf Sci 509:145332. https://doi.org/10.1016/j.apsusc.2020.145332

    Article  Google Scholar 

  3. Yao T, Wu P, Wu T, Cheng C, Yang S (2011) Fabrication of anti-reflective structures using hot embossing with a stainless steel template irradiated by femtosecond laser. Microelectron Eng 88:2908–2912. https://doi.org/10.1016/j.mee.2011.03.023

    Article  Google Scholar 

  4. Phan H, Nguyen T, Dinh T, Lacopi A, Hold L, Shiddiky M, Dao D, Nguyen N (2018) Robust free-standing nano-thin SiC membranes enable direct photolithography for MEMS sensing applications. Adv Eng Mater 20:1700858. https://doi.org/10.1002/adem.201700858

    Article  Google Scholar 

  5. Cho Y, Park J, Park H, Cheng X, Kim B, Han A (2010) Fabrication of high-aspect-ratio polymer nanochannels using a novel Si nanoimprint mold and solvent-assisted sealing. Microfluid Nanofluid 9:163–170. https://doi.org/10.1007/s10404-009-0509-3

    Article  Google Scholar 

  6. Wei D, Cheng K, Yao Y, Hsu S, Wei P, Huang J (2010) Color variation in periodic Ag line arrays patterned by using electron-beam lithography. J Nanosci Nanotechnol 10:4581–4585. https://doi.org/10.1166/jnn.2010.1690

    Article  Google Scholar 

  7. Dhawan A, Muth J, Leonard D, Gerhold M, Gleeson J, Dinh T, Russell P (2008) Focused ion beam fabrication of metallic nanostructures on end faces of optical fibers for chemical sensing applications. J Vac Sci Technol B 26:2168–2173. https://doi.org/10.1116/1.3013329

    Article  Google Scholar 

  8. Yan Y, Wang J, Geng Y, Zhang G (2022) Material removal mechanism of multi-layer metal-film nanomilling. CIRP Ann-Manuf Techn 71:61–64. https://doi.org/10.1016/j.cirp.2022.03.040

  9. Wang J, Geng Y, Li Z, Yan Y, Luo X, Fan P (2022) Study on the vertical ultrasonic vibration-assisted nanomachining process on single-crystal silicon. J Manuf Sci E-T ASME 144:041013. https://doi.org/10.1115/1.4052356

  10. Wang J, Yan Y, Li Z, Geng Y (2021) Towards understanding the machining mechanism of the atomic force microscopy tip-based nanomilling process. Int J Mach Tools Manuf 162:103701. https://doi.org/10.1016/j.ijmachtools.2021.103701

    Article  Google Scholar 

  11. Zhang S, Zhou Y, Zhang H, Xiong Z, To S (2019) Advances in ultra-precision machining of micro-structured functional surfaces and their typical applications. Int J Mach Tools Manuf 142:16–41. https://doi.org/10.1016/j.ijmachtools.2019.04.009

    Article  Google Scholar 

  12. Li C, Wu Y, Li X, Ma L, Zhang F, Huang H (2020) Deformation characteristics and surface generation modelling of crack-free grinding of GGG single crystals. J Mater Process Technol 279:116577. https://doi.org/10.1016/j.jmatprotec.2019.116577

    Article  Google Scholar 

  13. Li C, Zhang Y, Zhou G, Wei Z, Zhang L (2020) Theoretical modelling of brittle-to-ductile transition load of KDP crystals on (001) plane during nanoindentation and nanoscratch tests. J Mater Res Technol-Jmr&t 9:14142–14157. https://doi.org/10.1016/j.jmrt.2020.09.131

    Article  Google Scholar 

  14. Tian Z, Chen X, Xu X (2020) Molecular dynamics simulation of the material removal in the scratching of 4H-SiC and 6H-SiC substrates. Int J Extreme Manuf 2:045104. https://doi.org/10.1088/2631-7990/abc26c

    Article  Google Scholar 

  15. Ding J, Chang Y, Chen P, Zhang H, Ding Y, Lu H, Chen Y (2020) Dynamic modeling of ultra-precision fly cutting machine tool and the effect of ambient vibration on its tool tip response. Int J Extreme Manuf 2:025301. https://doi.org/10.1088/2631-7990/ab7b59

    Article  Google Scholar 

  16. Sun J, Luo X, Chang W, Ritchie J, Chien J, Lee A (2012) Fabrication of periodic nanostructures by single-point diamond turning with focused ion beam built tool tips. J Micromech Microeng 22:115014. https://doi.org/10.1088/0960-1317/22/11/115014

    Article  Google Scholar 

  17. Zhang J, Zhang J, Cui T, Hao Z, Zahrani A (2017) Sculpturing of single crystal silicon microstructures by elliptical vibration cutting. J Manuf Process 29:389–398. https://doi.org/10.1016/j.jmapro.2017.09.003

    Article  Google Scholar 

  18. Wang Y, Geng Y, Li G, Wang J, Fang Z, Yan Y (2021) Study of machining indentations over the entire surface of a target ball using the force modulation approach. Int J Extreme Manuf 3:035102. https://doi.org/10.1088/2631-7990/abff19

    Article  Google Scholar 

  19. Wang Y, Geng Y, Yan Y, Wang J, Fang Z (2020) Robust model predictive control of a micro machine tool for tracking a periodic force signal. Optim Control Appl Meth 41:2037–2047. https://doi.org/10.1002/oca.2642

    Article  MathSciNet  MATH  Google Scholar 

  20. Wang Y, Fan P, Luo X, Geng Y, Goel S (2021) Fabrication of three-dimensional sin-shaped ripples using a multi-tip diamond tool based on the force modulation approach. J Manuf Process 72:262–273. https://doi.org/10.1016/j.jmapro.2021.10.032

    Article  Google Scholar 

  21. Geng Y, Jia J, Li Z, Liu Y, Wang J, Yan Y (2021) Modeling and experimental study of machining outcomes when conducting nanoscratching using dual-tip probe on single-crystal copper. Int J Mech Sci 206:106649. https://doi.org/10.1016/j.ijmecsci.2021.106649

    Article  Google Scholar 

  22. Efe M, Gwalani B, Tao J, Song M, Kaspar T, Devaraj A, Rohatgi A (2021) Nanomechanical scratching induced local shear deformation and microstructural evolution in single crystal copper. Appl Surf Sci 562:150132. https://doi.org/10.1016/j.apsusc.2021.150132

    Article  Google Scholar 

  23. Wang Q, Bai Q, Chen J, Sun Y, Guo Y, Liang Y (2015) Subsurface defects structural evolution in nano-cutting of single crystal copper. Appl Surf Sci 344:38–46. https://doi.org/10.1016/j.apsusc.2015.03.061

    Article  Google Scholar 

  24. Zhang P, Cao X, Zhang X, Wang Y (2021) Effects of cutting parameters on the subsurface damage of single crystal copper during nanocutting process. Vacuum 187:109420. https://doi.org/10.1016/j.vacuum.2020.109420

    Article  Google Scholar 

  25. Armarego E (2000) The unified-generalized mechanics of cutting approach—a step towards a house of predictive performance models for machining operations. Mach Sci Technol 4:319–362. https://doi.org/10.1080/10940340008945715

    Article  Google Scholar 

  26. Armarego E, Herath A (2000) Predictive models for machining with multi-edge form tools based on a generalised cutting approach. CIRP Ann 49:25–30. https://doi.org/10.1016/S0007-8506(07)62889-3

    Article  Google Scholar 

  27. Srinivasa Y, Shunmugam M (2013) Mechanistic model for prediction of cutting forces in micro end-milling and experimental comparison. Int J Mach Tools Manuf 67:18–27. https://doi.org/10.1016/j.ijmachtools.2012.12.004

    Article  Google Scholar 

  28. Yan Y, Wang Y, Wang J, Geng Y (2020) Effect of material removal state on the selection of theoretical models when scratching single-crystal copper using the load modulation approach. Proc Inst Mech Eng, Part B: J Eng Manuf 234:720–729. https://doi.org/10.1177/0954405419883055

    Article  Google Scholar 

  29. Shi Z, Zhang J, Zhao Q, Guo B, Wang H (2020) Transmission electron microscopy (TEM) study of anisotropic surface damages in micro-cutting polycrystalline aluminate magnesium spinel (PAMS) crystals. Ceram Int 46:20570–20575. https://doi.org/10.1016/j.ceramint.2020.05.069

    Article  Google Scholar 

  30. Tabor D (1951) The hardness of metals. Oxford University Press, Oxford

    Google Scholar 

Download references

Funding

The authors gratefully acknowledge the financial support of the National Natural Science Foundation of China (52035004), Natural Science Foundation of Heilongjiang Province of China (YQ2020E015), Science and Technology Based for Equipment Design and Manufacturing for Introduction Talents of Discipline to Universities 2.0 of the 111 project (Project No. BP0719002), Self-Planned Task (NO. SKLRS202001C) of State Key Laboratory of Robotics and System (HIT), Young Elite Scientist Sponsorship Program by CAST (No. YESS20200155), and the Fundamental Research Funds for the Central Universities (FRFCU5710050521, FRFCU5710091220).

Author information

Authors and Affiliations

  1. The State Key Laboratory of Robotics and Systems, Robotics Institute, Harbin Institute of Technology, Harbin, Heilongjiang, 150080, People’s Republic of China

    Jiqiang Wang, Yongda Yan & Yanquan Geng

  2. Center for Precision Engineering, Harbin Institute of Technology, Harbin, Heilongjiang, 150001, People’s Republic of China

    Jiqiang Wang, Yuzhang Wang, Yongda Yan & Yanquan Geng

Authors
  1. Jiqiang Wang
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Yuzhang Wang
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Yongda Yan
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Yanquan Geng
    View author publications

    You can also search for this author in PubMed Google Scholar

Contributions

Jiqiang Wang: methodology, validation, investigation, visualization, writing – original draft; Yuzhang Wang: investigation, writing – reviewing and editing; Yongda Yan: conceptualization, methodology, supervision, visualization, writing – reviewing and editing; Yanquan Geng: conceptualization, methodology, visualization, writing – reviewing and editing.

Corresponding author

Correspondence to Yanquan Geng.

Ethics declarations

Competing interests

The authors declare no competing interests.

Additional information

Publisher's note

Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.

Rights and permissions

Springer Nature or its licensor (e.g. a society or other partner) holds exclusive rights to this article under a publishing agreement with the author(s) or other rightsholder(s); author self-archiving of the accepted manuscript version of this article is solely governed by the terms of such publishing agreement and applicable law.

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Wang, J., Wang, Y., Yan, Y. et al. Fabrication of periodic nanostructure using a multi-tip diamond tool: depth prediction and material removal mechanism. Int J Adv Manuf Technol 123, 3485–3496 (2022). https://doi.org/10.1007/s00170-022-10451-5

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s00170-022-10451-5

Keywords

Search

Navigation