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Investigation of a compliant precision positioning stage with folding function

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Abstract

A foldable compliant XY precision positioning stage with good decoupling property in both axes is developed for precision applications. The compliant rolling-contact element (CORE) is innovatively incorporated in the design of the stage to realize the folding function for compacting the mechanism structure. The input stiffness of the motion platform is determined using the matrix method and is verified by a conventional stiffness modeling method. Finite element analysis (FEA) simulations of three bridge-type amplifiers are conducted and compared to determine the preferable one for magnifying the limited output displacement of the actuator. A foldable stage is then assembled and its decoupling capability and dynamic performances are investigated with the ANSYS software. In addition, a prototype is fabricated to experimentally test the performance of the stage. Results demonstrate that the employed proportional-integral-derivative (PID) feedback controller can settle in 70 ms without overshooting. The closed-loop controlled stage is able to reach a resolution of 2 μm and has small tracking errors within ± 1 μm in the circular-contouring tests.

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Funding

The authors would like to thank the support provided by the National Natural Science Foundation of China (Grant No. 51575544), the State Key Laboratory of Ultra-precision Machining Technology in the Department of Industrial and Systems Engineering of Hong Kong Polytechnic University(G-UAPM), and a grant from the Research Committee of The Hong Kong Polytechnic University under the student account code RK34.

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Authors and Affiliations

  1. State Key Laboratory of Ultra-precision Machining Technology, Department of Industrial and Systems Engineering, The Hong Kong Polytechnic University, Hung Hom, Kowloon, 999077, Hong Kong, SAR, China

    Yanlin Xie, Yangmin Li, Chifai Cheung, Xigang Chen & Ruobing Wang

  2. Department of Electronic and Electrical Engineering, Southern University of Science and Technology, Xueyuan Avenue, Shenzhen, 518055, Guangdong, China

    Xiao Xiao

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  1. Yanlin Xie
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Correspondence to Yangmin Li.

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Author contribution

Yanlin Xie: conceptualization, investigation, original draft. Yangmin Li: supervision, resources, review, and editing. Chifai Cheung: supervision, review, and editing. Xiao Xiao: methodology, review, and editing. Xigang Chen: validation, review, and editing. Ruobing Wang: software, review, and editing.

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Xie, Y., Li, Y., Cheung, C. et al. Investigation of a compliant precision positioning stage with folding function. Int J Adv Manuf Technol 124, 3343–3358 (2023). https://doi.org/10.1007/s00170-022-10410-0

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