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Investigation into the role of cold atmospheric plasma on the precision grinding of RB-SiC ceramic at room temperature

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Abstract

RB-SiC ceramic is one of the most important and useful materials as optical precision elements in many scientific research fields. In this paper, a novel cold atmospheric plasma (CAP) process via oxygen (O2), which is based on the precision grinding process in surface technology to modify at room temperature for grinding with a combination of plasma oxidation surface modification, is proposed. To identify the performance of the proposed cold atmospheric plasma process via oxygen method on the surface modification of RB-SiC ceramic fabrication of the precision grinding process, precision grinding test was conducted. To reveal the fundamental issue in the grinding of RB-SiC ceramic, surface-modified layer and mathematical model of the grinding trajectory via the point P(Ai, Aj) model analysis were conducted to investigate the effect of the composite process on grinding force and the mechanism of surface material removal in the presence of plasma oxidation. As a result of the method included the kept constant during the precision grinding of the composite process self-adaption-grinding process to avoid the deviation caused by second grinding particle entry. As a summary, we provide a significant cold atmospheric plasma-precision grinding compound process toward the establishment of the basic theory by analyzing the mechanism of the experimental test design and computation. The process and technical difficulties of RB-SiC ceramic and mechanism of surface modified layer material removal during precision grinding were solved.

Graphical abstract

The single-precision grinding and composite process schematic diagram process of the grinding wheel: (a) Traditional precision grinding process; (b) Cold atmospheric plasma (CAP) via oxygen (O2) based on the precision grinding process.

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Change history

  • 05 September 2022

    Springer Nature’s version of this paper was updated to present the correct Abbreviation list.

Abbreviations

a p :

Precision grinding depth, μm

Δa p :

The depth of grinding, μm

b :

The width of precision grinding face, mm

e s :

The grinding force-the grinding specific energy, J/mm3

dA :

The actual contact area during the grinding process, mm2

D RB-SiC :

The diameter of the RB-SiC ceramic, mm

E RB-SiC :

The precision grinding power, W

f grinding wheel :

The tangent and normal of the grinding force, N

F :

The grinding force, N/mm2

F i :

The grinding force per-unit area, N/mm2

F t :

The tangential grinding force, N

F n :

Normal grinding force, N

N Diamond wheel speed :

The speed of diamond wheel, r/min

RT :

The room temperature, ℃

△ t :

Rotation interval time, min

Ω s :

Constant speed, m/s

V grinding wheel :

The workpiece volume, mm3/s or the speed ratio, μm/s

θ :

Rotating angle of the grinding wheel, deg

Ψ i :

The rotation angle, deg

Ω s :

The constant speed, mm3/s

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Acknowledgements

This work was funded and financially supported by the National Science and Technology Major Project of the Ministry of Science and Technology of China (Grant No. 2018ZX04015001-005), National Natural Science Foundation of China (52105467), and Startup Fund for Young Faculty at SJTU (SFYF at SJTU) (21X010500621). We wish to express gratitude for the generous support from Shanghai Jiao Tong University associate researcher Long Zhang and Tianjin University of Technology and Education (TUTE) associate Prof. Xiangyu Zhang. Also, we wish to thank Dianrong Luan for grinding process, one devote for the precision machinery offer senior expert, senior technician. The original process idea is designed by Jiabin Xu, a Ph.D. candidate under the guide from Prof. Feihu Zhang. The authors would like to thank the editors and anonymous reviewers for their objective opinions and suggestions, which greatly improved the presentation and peer-review recognition of this paper.

Funding

This work was funded and financial support by the National Science and Technology Major Project of the Ministry of Science and Technology of China (Grant No. 2018ZX04015001-005), National Natural Science Foundation of China (52105467), and Startup Fund for Young Faculty at SJTU (SFYF at SJTU) (21X010500621).

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Authors and Affiliations

  1. School of Mechatronics Engineering, Aeronautical and Astronautical Science and Technology, Harbin Institute of Technology, Harbin, China

    Jiabin Xu, Kechong Wang, Bao Guo & Feihu Zhang

  2. School of Electronic Information and Electrical Engineering, Shanghai Jiao Tong University, Shanghai, China

    Xiaoshuang Rao

  3. School of Marine Science and Technology, Sino-Europe Membrane Technology Research Institute, Harbin Institute of Technology, Weihai, China

    Xiaoyu Xu

  4. School of Mechanical and Power Engineering, Harbin University of Science and Technology, Harbin, China

    Lifei Liu

  5. Laboratory of Optical System Advance Manufacturing Technology, Fine Mechanics and Physics (CIOMP), Changchun Institute of Optics, Changchun, China

    Yingjie Li

Authors
  1. Jiabin Xu
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  2. Xiaoshuang Rao
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  3. Xiaoyu Xu
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  4. Kechong Wang
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  5. Bao Guo
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  6. Lifei Liu
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  7. Yingjie Li
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  8. Feihu Zhang
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Correspondence to Xiaoshuang Rao or Feihu Zhang.

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Highlights

• The work shows the cold atmospheric plasma via oxygen (O2) composite methods by the active surface “free radical” is concentration higher than a single type of the precision grinding process.

• The effectiveness of surface modification be measured and evaluated by the magnitude and direction of the RB-SiC ceramic surface modification layer and removal efficiency of Si phase and SiC phase.

• In the work, we propose a new method for cold atmospheric plasma based on the precision grinding process to research on surface modification of RB-SiC ceramic hard-brittle material by precision grinding problems to test its performance. In such cases, the finish-surface quality of the RB-SiC ceramic is easy to be further improved and provide a satisfactory result at an affordable single-precision grinding process cost.

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Xu, J., Rao, X., Xu, X. et al. Investigation into the role of cold atmospheric plasma on the precision grinding of RB-SiC ceramic at room temperature. Int J Adv Manuf Technol 122, 1233–1243 (2022). https://doi.org/10.1007/s00170-022-09554-w

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