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Fabrication and characterization of resistance temperature detector by smart mask design

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Abstract

The purpose of this study is to give detailed information about fabrication and characterization of resistance temperature detector by smart mask design. The effects of annealing on both structural and electrical properties were investigated. Changes in microstrain, lattice parameter and grain size values were observed by means of annealing. It has been shown that the structural changes cause a decrease in resistivity and sheet resistance values. Thousands of sensors can be fabricated according to the substrate size of thin film RTD produced. It is almost impossible to fabricate thousands of sensors with the same resistance value. But by the agency of the smart mask design proposed in this study, it is possible to adjust each RTD to the same resistance value by using the resistance adjustment points. Maximum TCR value was found to be around 3.98 × 10–3 at 0 0C. This value is very close to the standard TCR value 3.90 × 10–3 at 0 0C used for industrial applications.

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Availability of data and materials

The data presented here are available upon request (ramazanlok@ibu.edu.tr).

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Acknowledgements

Authors would like to thank Assist. Prof. Dr. Erhan Budak from Bolu Abant Izzet Baysal University, Department of Chemistry—for his valuable advices. Authors would like to thank Umutcan Gürer and Ozan Yılmaz in the Institute of graduate studies at Bolu Abant Izzet Baysal University—for their help during experimental studies.

Funding

This work is supported by the Scientific and Technological Research Council of Turkey (TUBITAK) and Arcelik A.S under TEYDEB 1505 (Grant Number: 5170059)—Technology and Innovation Support Programs Presidency and also supported in part by the Presidency of Turkey, Presidency of Strategy and Budget under Contract Number: 2016K12- 2834.

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Authors and Affiliations

  1. Physics Department, Bolu Abant Izzet Baysal University, 14030, Bolu, Turkey

    Ramazan Lok, Huseyın Karacali & Ercan Yilmaz

  2. Nuclear Radiation Detectors Application and Research Center, BAIBU, 14030, Bolu, Turkey

    Huseyın Karacali & Ercan Yilmaz

  3. Arcelik A.S Cooking Appliances Plant, 14300, Bolu, Turkey

    Alı Varol & Ugur Camli

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  1. Ramazan Lok
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Correspondence to Ramazan Lok.

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This article is part of the Topical Collection: New Intelligent Manufacturing Technologies through the Integration of Industry 4.0 and Advanced Manufacturing

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Lok, R., Karacali, H., Varol, A. et al. Fabrication and characterization of resistance temperature detector by smart mask design. Int J Adv Manuf Technol 122, 147–158 (2022). https://doi.org/10.1007/s00170-022-09041-2

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