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Modeling of thrust and torque for drilling PTFE materials

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Abstract

Polytetrafluoroethylene (PTFE) as a material is widely used for ultra-clean flow control elements to replace metal in photolithography machines. However, delamination occurs during drilling and its creep resistance is poor. The traditional metal drilling model is not suitable for the PTFE. Hence, in this study, a mechanistic model to predict the thrust and torque distributing along the cutting edges is established. Firstly, the mathematical expression of the drill geometry is reviewed. Then, the rectangular cutting is converted to the oblique cutting utilizing coordinate transformation, this connects drilling and oblique cutting. Secondly, the forces on the rake and relief faces are taken into account and separated into multiple cutting loads. The discretized cutting loads are combined to develop a mechanical model for predicting the thrust and torque. Finally, the drilling experiments are conducted to verify and improve the model. The results show that the maximum errors of thrust and torque are 12% and 20%, respectively, the average errors are 5% and 9%, respectively. The proposed model could be used to guide the manufacturing of the key components in the semiconductor equipment industries.

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Availability of data and material

The data generated during and/or analyzed during the current study are available from the corresponding author on reasonable request.

Code availability

The code generated during the current study is available from the corresponding author on reasonable request.

Abbreviations

μ :

Cutting angle

Kc :

Cutting coefficient

Kp :

Contact coefficient

η :

Chip flow angle

T1, T2 :

Euler transformation matrix

f :

Feed rate

λ:

Friction angle

Kf :

Friction coefficient

Ff :

Friction force

β :

Helix angle

P:

Point angle

KrA :

The main angle of deflection

tp :

The half of core thickness

TM, Tm, Tch :

Transformation matrix

T :

The time of drilling

r A :

The dynamic radius of the specified position

Rm :

The length of minor cutting edge

he :

The height of the tool

\({\varnothing }_{n}\) :

The shear angle in vertical cuttings

I :

Inclination angle

Fn :

Normal forces

α n :

Normal rake angle

α :

Rake angle

γ :

Relief angle

Ac :

Relief contact area

Rc :

Radius of chisel edge

Rl :

Radius of main cutting edge

n :

Spindle speed

\(\varnothing\) :

Shear angle

Au :

Uncut area

ω :

Web angle

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Funding

This research was supported by the National Natural Science Foundation of China (52175395), and the Science Fund for Distinguished Young Scholars of Zhejiang Province (LR20E050002).

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Authors and Affiliations

  1. School of Mechanical Engineering, Hangzhou Dianzi University, Jianggan District, No. 1158Zhejiang Province, Hangzhou, 310005, People’s Republic of China

    Jing Ni, Lidong Han, Shaofeng Wu, Zhi Cui & Xiaotian Zeng

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  1. Jing Ni
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  2. Lidong Han
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  3. Shaofeng Wu
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  4. Zhi Cui
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  5. Xiaotian Zeng
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Contributions

Jing Ni: conceptualization, methodology, investigation, writing–original draft preparation. Lidong Han: conceptualization, supervision, validation. Shaofeng Wu: supervision, writing–reviewing, and editing. Zhi Cui: writing–reviewing, and editing. Xiaotian Zeng: editing. All authors read and approved the final manuscript.

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Correspondence to Shaofeng Wu.

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Ni, J., Han, L., Wu, S. et al. Modeling of thrust and torque for drilling PTFE materials. Int J Adv Manuf Technol 120, 215–226 (2022). https://doi.org/10.1007/s00170-021-08550-w

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