Abstract
To solve the problem of fast convergence in large aperture plane optics continuous polishing, the concept of vibration-assisted polishing is proposed in this paper. The paper first builds a low-frequency short-range vibration processing platform based on large-size polishing tools. Then, the kinematics and polishing pressure of the optics without vibration and vibration are analyzed. Furthermore, the pressure distribution under the element is simulated based on the finite element method. Finally, the material removal rate (MRR) is calculated based on Preston equation, which proves that the removal rate of optics under vibration condition is higher. In this paper, the problem of optics removal efficiency in continuous polishing is solved and the material enhanced removal mechanism is revealed.
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Acknowledgements
I am grateful to CAEP for providing experimental conditions and financial support.
Funding
The funding agency is the Science Challenge Project (No. JCKY2016212A506-0501; TZ2016006-0501-01).
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YW and FZ contributed the central idea, analyzed most of the data, and wrote the initial draft of the paper. The remaining authors contributed to refining the ideas, carrying out additional analyses, and finalizing this paper.
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Zhang, F., Wang, Y., Liao, D. et al. The optic material removal rate improved by vibration assistance in continuous polishing. Int J Adv Manuf Technol 117, 3075–3082 (2021). https://doi.org/10.1007/s00170-021-07806-9
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DOI: https://doi.org/10.1007/s00170-021-07806-9