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Study on the ultrasonic guided wave and online visual monitoring for ultrasonic precise bonding


Ultrasonic precise bonding is an emerging technology in the application of polymer micro-assembly. The propagation of ultrasound changes with the interfacial polymer physical state in the ultrasonic bonding process. So the ultrasonic guided wave is an effective parameter to in-situ monitor the fusion degree. The time-frequency characteristics in the ultrasonic guided wave are analyzed by vibration analysis methods. The polymer interfacial fusion is online visual monitored by the high-speed HD camera. The fusion behavior of the thermal melt interface and the time-frequency characteristics are analyzed and correlated. Results indicate that the change of the interfacial thermal melt state is related to the time-frequency characteristics of the ultrasonic guided wave. The generation of the melting zone, the fusion of the melting zone, the rotation of the micro-device, the generation or disappearance of local air bubbles all lead to the changing of the harmonic frequency and intensity in the ultrasonic bonding process.

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Data Availability

The authors declare that the data and the materials of this study are available within the article.


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This work was supported by Liaoning Province “Xingliao Talent Program” project for young top talents (XLYC1807112)

General program funding for the China Postdoctoral Science Foundation (2019M651103).

The National Science Foundation of China under Grant (52005071).

Author information




Sun YB was responsible for the formulation of the overall plan. Cao MR was responsible for the experimental part. Zou L was responsible for the data analysis. Yang XH was responsible for the development of the detection system.

Corresponding author

Correspondence to Yibo Sun.

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Sun, Y., Cao, M., Zou, L. et al. Study on the ultrasonic guided wave and online visual monitoring for ultrasonic precise bonding. Int J Adv Manuf Technol 117, 971–984 (2021).

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  • Ultrasonic bonding
  • Vibration analysis
  • Time-frequency characteristics
  • In-situ visual monitoring
  • Ultrasonic guided wave