Ultrasonic precise bonding is an emerging technology in the application of polymer micro-assembly. The propagation of ultrasound changes with the interfacial polymer physical state in the ultrasonic bonding process. So the ultrasonic guided wave is an effective parameter to in-situ monitor the fusion degree. The time-frequency characteristics in the ultrasonic guided wave are analyzed by vibration analysis methods. The polymer interfacial fusion is online visual monitored by the high-speed HD camera. The fusion behavior of the thermal melt interface and the time-frequency characteristics are analyzed and correlated. Results indicate that the change of the interfacial thermal melt state is related to the time-frequency characteristics of the ultrasonic guided wave. The generation of the melting zone, the fusion of the melting zone, the rotation of the micro-device, the generation or disappearance of local air bubbles all lead to the changing of the harmonic frequency and intensity in the ultrasonic bonding process.
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This work was supported by Liaoning Province “Xingliao Talent Program” project for young top talents (XLYC1807112)
General program funding for the China Postdoctoral Science Foundation (2019M651103).
The National Science Foundation of China under Grant (52005071).
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Sun, Y., Cao, M., Zou, L. et al. Study on the ultrasonic guided wave and online visual monitoring for ultrasonic precise bonding. Int J Adv Manuf Technol 117, 971–984 (2021). https://doi.org/10.1007/s00170-021-07799-5
- Ultrasonic bonding
- Vibration analysis
- Time-frequency characteristics
- In-situ visual monitoring
- Ultrasonic guided wave