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Novel fabrication process for an array of elliptical zone plates by using direct laser lithography

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Abstract

An elliptical zone plate (EZP) is used to replace a Fresnel zone plate to focus a light beam when the optical axes of the incident and diffracted beams are not in a straight line. There are two advantages of using an EZP which contributes to improving the performance. First, the residual beam is not focused to the same direction of the main source. Second, the light returning from the focal plane is not directed to the light beam source. In this paper, we propose a method to fabricate an EZP with a direct laser lithographic system. In this paper, three types of writing (lithographic) paths were investigated to study the cause of the appearance of the ablation phenomenon and the side-wing effect. Then, we suggest a suitable fabricated motion to produce a fine EZP. In addition, an experiment setup for an optical evaluation system was introduced to verify the performance of the EZP array fabricated by the selected method.

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Authors and Affiliations

  1. Department of Science of Measurement, University of Science and Technology (UST), Daejeon, 305-350, Republic of Korea

    Nguyen Nu Hoang Anh, Young-Gwang Kim, Hyug-Gyo Rhee & Young-Sik Ghim

  2. Space Optics Team, Advanced Instrumentation Institute, Korea Research Institute of Standards and Science (KRISS), Daejeon, 305-340, Republic of Korea

    Nguyen Nu Hoang Anh, Young-Gwang Kim, Hyug-Gyo Rhee & Young-Sik Ghim

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  1. Nguyen Nu Hoang Anh
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  2. Young-Gwang Kim
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  3. Hyug-Gyo Rhee
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  4. Young-Sik Ghim
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Correspondence to Hyug-Gyo Rhee.

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Anh, N.N.H., Kim, YG., Rhee, HG. et al. Novel fabrication process for an array of elliptical zone plates by using direct laser lithography. Int J Adv Manuf Technol 106, 2629–2634 (2020). https://doi.org/10.1007/s00170-019-04818-4

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  • DOI: https://doi.org/10.1007/s00170-019-04818-4

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