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Aerostatic moving stage positioning compensation using a numerical algorithm combined with an image acquisition method

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Abstract

In this study, positioning error measurements and compensation techniques were developed for a two-dimensional (2D) coplanar aerostatic system. Standard optical template targets were acquired using charge-coupled device (CCD) image acquisition; after which, positioning errors were measured and compensated for. A 2D Lagrange equation was utilized to compensate for the precision of the precision aerostatic system. Experimental results showed that X- and Y-axis positioning accuracy improved from 5.06 to 1.53 μm and from 3.99 to 1.06 μm, respectively, signifying improvements of over 70%.

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Authors and Affiliations

  1. Department of Mechatronics Engineering, National Changhua University of Education, Changhua, 50007, Taiwan

    Ming-Fei Chen & Pei-Hao Wang

  2. Taiwan Instrument Research Institute, National Applied Research Laboratories, 20 R&D Road VI, Hsinchu Science Park, Hsinchu, 30076, Taiwan

    Wen-Tse Hsiao

Authors
  1. Ming-Fei Chen
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  2. Pei-Hao Wang
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  3. Wen-Tse Hsiao
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Corresponding author

Correspondence to Wen-Tse Hsiao.

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Chen, MF., Wang, PH. & Hsiao, WT. Aerostatic moving stage positioning compensation using a numerical algorithm combined with an image acquisition method. Int J Adv Manuf Technol 104, 1203–1210 (2019). https://doi.org/10.1007/s00170-019-04077-3

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  • DOI: https://doi.org/10.1007/s00170-019-04077-3

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