Abstract
TiCN/TiNbCN multilayer systems were synthetized on silicon substrates by radio frequency (r.f.) magnetron sputtering with alternatively changing the sputtering plasma composition between pure Ti+C and Nb elements under a reactive mixture of Ar/N2. Bilayer numbers were increased from nanometric range (15 nm) to higher micrometric range (1.5 μm). The structural and chemical properties were analyzed by X-ray diffraction, X-ray photoelectron spectroscopy (XPS), cross-sectional transmission electron microscopy (TEM), electron energy loss spectroscopy (EELS), and optical properties via color purity. The multilayer period effect on the optical properties such as color purity was studied and the color dependence as function of bilayer number with niobium (Nb) modulation in the TiCN/TiNbCN system determined. The spectra for all layers showed high reflectance at large wavelengths, e.g., 92% for the TiNbCN layer, 89% for the TiCN layer, and about 75% for the TiCN/TiNbCN multilayer deposited with n = 200 and Λ = 15 nm. So the changes in the color purity present novel color applied on machining tools (tungsten carbide insert) in relation to (Nb) fluctuation which can be applied in optical and industrial applications.
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Lee KT, Han SY, Park HJ (2017) Omnidirectional flexible transmissive structural colors with high-color-purity and high-efficiency exploiting multicavity resonances. Adv Opt Mater 5:1700284
Yang C, Shen W, Zhang Y, Li K, Fang X, Zhang X, Liu X (2015) Compact multilayer film structure for angle insensitive color filtering. Sci Rep Nat 5:9285
Siow PC, Ghani JA, Ghazali M, Haron CHC, Jaafar TR, Selamat MA (2013) Characterization of TiCN and TiCN/ZrN coatings for cutting tool application. Ceram Int 39(2):1293–1298
Li P, Chen L, Wang SQ, Yang B, Du Y, Li J, Wu MJ (2013) Microstructure, mechanical and thermal properties of TiAlN/CrAlN multilayer coatings. Int J Refract Met Hard Mater 40:51–57
Caicedo JC, Amaya C, Yate L, Gómez ME, Zambrano G, Alvarado-Rivera, Muñoz-Saldaña J, Prieto P (2010) TiCN/TiNbCN multilayer coatings with enhanced mechanical properties. Appl Surf Sci 256:5898–5904
Lee J-W (2016) Development of transition metal nitride hard coatings through the composition and processing control. Korean Vac Soc 8:301
Grigoriev SN, Vereschaka AA, Vereschaka AS, Kutin AA (2012) Cutting tools made of layered composite ceramics with nano-scale multilayered coatings. Procedia CIRP 1:301–306
Hanken DG, Naujok RR, Gray JM, Corn R (1997) Synthesis, spectroscopic characterization, and electro-optical properties of noncentrosymmetric azobenzene/zirconium phosphonate multilayer films. Anal Chem 69:240–248
Li ZG, Carcia PF (1992) Microstructural dependence of magnetic properties of Pt/Co multilayer thin films. J Appl Phys 71:842–848
Yang K, Clavero C, Skuza JR, Varela M, Lukaszew RA (2010) Surface plasmon resonance and magneto-optical enhancement on Au–Co nanocomposite thin films. J Appl Phys 107:103924
Kedawat G, Kumar P, Vijaya YK, Kumar Gupta B (2015) Fabrication of highly-efficient resonant structure assisted ultrathin artificially stacked Ag/ZnS/Ag multilayer films for color filters applications. J Mater Chem 3:26
Oh JH, Yang SJ, Sung Y-G, Do YR (2013) Improved color coordinates of green monochromatic pc-LED capped with a bandpass filter. Opt Express 21:4539–4550
Levi G, Kaplan WD, Bamberger M (1998) Structure refinement of titanium carbonitride (TiCN). Mater Lett 35:344–350
Sayagues JMCJ, Alcala MD, Gotor FJ (2007) Monophasic TiyNb1−yCxN1−x nanopowders obtained at room temperature by MSR. J Mater Chem 17:650–657
Caicedo JC, Amaya C, Yate L, Aperador W, Zambrano G, Gómez ME, Alvarado-Rivera J, Muñoz-Saldaña J, Prieto P (2010) Effect of applied bias voltage on corrosion-resistance for TiC1− xNx and Ti1− xNbxC1− yNy coatings. Appl Surf Sci 256:2876–2883
Qadri SB, Yang JP, Skelton EF, Ratna BR (1997) Evidence of strain and lattice distortion in lead sulfide nanocrystallites. Appl Phys Lett 70:1020–1021
Li G, Xia LF (2001) Low temperature synthesis of dense SiO2 thin films by ion beam induced chemical vapor deposition. Thin Solid Films 396:16–22
Kaloyeros A, Hoffman M, Williams WS (1986) Amorphous transition metal carbides. Thin Solid Films 141:237–250
Glaser A, Surnev S, Netzer FP, Fateh N, Fontalvo GA, Mitterer C (2007) Oxidation of vanadium nitride and titanium nitride coatings. Surf Sci 601:1153–1159
Vyas A, Li KY, Zhou ZF, Shen YG (2005) Synthesis and characterization of CNx/TiN multilayers on Si(100) substrates. Surf Coat Technol 200:2293–2300
Cireasa R, Crunteanu A, Alexandrescu R, Morjan I, Martin C, Mihailescu IN, Oncioiu G (1998) Influence of process parameters on CNX films obtained by laser-CVD at two wavelengths. Carbon 36:775–780
Xu S, Kumar S, Li YA, Jiang N, Lee S (2000) Low temperature synthesis of highly trasnport carbon nitride thin films. J Phys Condens Matter 12-6:121
Lutz H, Bruns M, Link F, Baumann H (1998) Surface-and microanalytical characterization of silicon-carbonitride thin films prepared by means of radio-frequency magnetron co-sputtering. Thin Solid Films 332:230–234
Janovsk M, Bastl Z (1996) IR laser induced decomposition of tetrakis (dimethylamido) titanium for chemical vapor deposition of TiNx. lnfrared Phys Technol 37:727–731
Adelhelm C, Balden M, Kost F, Herrmann A, Lindig S (2008) Thermal induced structural changes of aC and aC: Ti films analyzed by NEXAFS and XPS. J Phys 100:1–4
Leparoux M, Author YK, Paris S, Schreuders C (2008) Microstructure analysis of RF plasma synthesized TiCN nanopowders. Int J Refract Met Hard Mater 26:277–285
Tan YS, Chooia SYM, Sin C-Y, Ee P-Y, Srinivasan MP, Pehkonen SO (2004) Characterization of low-k dielectric trench surface cleaning after a fluorocarbon etch. Thin Solid Films 462:250–256
Wang G, Li N, Li D (2007) Effect of Pd ions in the chemical etching solution. J Univ Sci Technol Beijing Miner Metall Mater 14:286–289
Shi L, Gu Y, Chen L, Yang Z, Ma J, Qian Y (2004) A co-reduction synthesis of superconducting NbC nanorods. J Phys Condens Matter 16:8459–8464
Omer AMM, Rusop M, Adhikari S, Adhikary S, Uchida H, Soga T, Umeno M (2006) Structural, optical and electrical characterization of amorphous carbon thin films grown on PTFE substrates for photovoltaic application. IEEE 1:287–290
Darlinski A, Halbritte J (2004) Angle-resolved XPS studies of oxides at NbN, NbC, and Nb surfaces. Surf Interface Anal 10:223–237
Arfaoui I, Guillot C, Coustya J, Antoine C (2002) Evidence for a large enrichment of interstitial oxygen atoms in the nanometer-thick metal layer at the NbO/Nb (110) interface. J Appl Phys 91:9319–9323
Alfonso JE, Buitrago J, Torres J, Santos B, Microelectronics JFM (2008) Crystallographic structure and surface composition of NbNx thin films grown by RF magnetron sputtering. Journal 39:1327–1328
M. De Koninck, P. Manseau, B. Marsan. Preparation and characterization of Nb-doped TiO2 nanoparticles used as a conductive support for bifunctional CuCo2O4 electrocatalyst J Electroanal Chem 611 (2007) 67–79
Jouve G, Severac C, Cantacuzene S (1996) XPS study of NbN and (NbTi) N superconducting coatings. Thin Solid Films 287:146–153
Lousa A, Esteve J, Mejía JP, Devia A (2007) Influence of deposition pressure on the structural mechanical and decorative properties of TiN thin films deposited by cathodic arc evaporation. Vacuum 81:1507–1510
Jedrzejowski P, Klemberg-Sapieha JE, Martinu L (2004) Optical properties and color of hard quaternary nanocomposite TiCxNy/SiCN coatings prepared by plasma enhanced chemical vapor deposition. Surf Coat Technol 188:371–375
Niyomsoan S, Grant W, Olson DL, Mishra B (2002) Variation of color in titanium and zirconium nitride decorative thin films. Thin Solid Films 415:187–194
Clair PL, Berer GP, Mooder JS (2000) Titanium nitride thin films obtained by a modified physical vapor deposition process. Thin Solid Films 376:9–15
Boxman RL, Martin PJ, Sanders D (1995) Handbook of vacuum arc science and technology. Noyes Publications, New Jersey, p 474
Acknowledgements
The authors acknowledge the Serveis Científico-Tecnics of the Universitat de Barcelona for support with the XRD, XPS, and TEM analyses.
Funding
This study was supported by “El patrimonio Autónomo Fondo Nacional de Financiamiento para la Ciencia, la Tecnología y la Innovación Francisco Jose de Caldas” under contract RC-No. 275-2011 with Center of Excellence for Novel Materials (CENM), and by “Vicerrectoría de investigaciones de la Universidad Militar Nueva Granada” under contract ING-2340-2017.
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Caicedo, J.C. New color from multilayer coating applied machining tools based on tungsten carbide insert. Int J Adv Manuf Technol 100, 865–876 (2019). https://doi.org/10.1007/s00170-018-2624-3
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DOI: https://doi.org/10.1007/s00170-018-2624-3