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Influence of electrochemical micromachining process parameters during fabrication of varactor micropattern

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Abstract

A simple method is demonstrated for the generation of micropattern of varactor by electrochemical micromachining (EMM), which is considered as the most effective advanced micromachining technique due to numerous advantages and wide range of applications. The generated micropatterns of varactor are used in many applications, i.e., radio frequency (RF) circuits including voltage-controlled oscillators and filters, parametric amplifiers, etc. Varactor is used as a variable capacitor which is used mainly for tuning the circuit by impedance matching. Usually, they are made of semiconductors and these cause losses in high-frequency communication. On the other hand, MEMS metal varactors tune their capacitance by adjusting the device’s physical parameters like dimensions, tuning area, and sometimes dielectric material via electromechanical actuation. The fabricated metal varactors enhance the tuning range of the varactor and reduce the losses. The varactor impression can be transferred on stainless steel surfaces by electrochemical micromachining. EMM set-up has been developed fruitfully to control the influence of electrochemical micromachining (EMM) parameters to obtain the controlled micro-features of varactor. The single patterned varactor tool is used for the mass production of varactors and avoids the need of masks on individual workpieces. The texturing time is short enough for application in an industrial context. One mathematical model is developed for the determination of theoretical depth of micropatterned surface and correlates with experimental results. The process has been characterized in terms of the effects of predominant process parameters such as machining voltage, duty ratio, pulse frequency, inter-electrode gap, and flow velocity on performance characteristics, i.e., material removal rate (MRR) and machining depth.

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Acknowledgements

The authors acknowledge the support from the University Grants Commission, New Delhi, under the CAS phase-IV program.

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Authors and Affiliations

  1. Production Engineering Department, Jadavpur University, Kolkata, -700032, India

    Sandip Kunar, Subrata Mahata & B. Bhattacharyya

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  1. Sandip Kunar
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  2. Subrata Mahata
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  3. B. Bhattacharyya
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Correspondence to Sandip Kunar.

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Kunar, S., Mahata, S. & Bhattacharyya, B. Influence of electrochemical micromachining process parameters during fabrication of varactor micropattern. Int J Adv Manuf Technol 96, 411–427 (2018). https://doi.org/10.1007/s00170-017-1563-8

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  • DOI: https://doi.org/10.1007/s00170-017-1563-8

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