This paper reports a highly effective method for replicating large-area micropattern devices through hybrid extrusion rolling embossing using a roller mold, wherein a thin stainless steel mold with a large-area micropattern is wrapped onto a metallic roll to form a roller mold. During the hybrid extrusion rolling embossing period, the molten polymer film is extruded and immediately pressed against the embossing roller and roller mold, which results in the molten polymer completely filling the micropattern on the surface of the roller mold. Next, the molten polymer film is cooled and wound using a conveying system equipped with highly polished rollers. Thus, a continuous polymer film with many large-area micropattern devices can be fabricated. In this study, a new hybrid extrusion rolling embossing system was designed, constructed, and tested; the basic film extrusion and rolling embossing conditions were investigated; and the thickness uniformity of the polymer films and the replication quality of the micropattern devices were measured and analyzed. The results indicate that the hybrid extrusion rolling embossing can potentially be used for continuous mass production of large-area micropattern devices.
Rolling embossing Roller mold Micropattern
This is a preview of subscription content, log in to check access.
This study was supported by the Ministry of Science and Technology of Taiwan, R.O.C. (MOST 106-2221-E-151-018). In addition, the experimental and technical support from the Center for Micro/Nano Science and Technology (NCKU) is gratefully acknowledged.
Su YC, Shah J, Lin LW (2004) Implementation and analysis of polymeric microstructure replication by micro-injection molding. J Micromech Microeng 14:415–422CrossRefGoogle Scholar
Shen YK, Chang CY, Shen YS, Hsu SC, Wu MW (2008) Analysis for microstructure of microlens arrays on micro-injection molding by numerical simulation. International Communications in Heat and Mass Transfer 35:723–727CrossRefGoogle Scholar
Zhang N, Chu JS, Byrne CJ, Browne DJ, Gilchrist MD (2012) Replication of micro/nano-scale features by micro injection molding with a bulk metallic glass mold insert. J Micromech Microeng 22:065019CrossRefGoogle Scholar
Kimerling TE, Liu W, Kim BH, Yao D (2006) Rapid hot embossing of polymer microfeatures. Microsyst Technol 12:730–735CrossRefGoogle Scholar
Kuo CC, Hsu HJ (2013) Micro-hot embossing of Fresnel lens using precision micro-featured mold. Mater Manuf Process 28:1228–1233CrossRefGoogle Scholar
Lin MC, Yeh JP, Chen SC, Chien RD, Hsu CL (2013) Study on the replication accuracy of polymer hot embossed microchannels. International Communications in Heat and Mass Transfer 42:55–61CrossRefGoogle Scholar
Chan-Park MB, Neo WK (2003) Ultraviolet embossing for patterning high aspect ratio polymeric microstructures. Microsyst Technol 9:501–506CrossRefGoogle Scholar
Huang PH, Huang TC, Sun YT, Yang SY (2008) Fabrication of large area resin microlens arrays using gas-assisted ultraviolet embossing. Opt Express 16(5):3041–3048CrossRefGoogle Scholar
Chen JW, Cheng J, Zhang D, Chen SC (2016) Precision UV imprinting system for parallel fabrication of large-area micro-lens arrays on non-planar surfaces. Precis Eng 44:70–74CrossRefGoogle Scholar
Yeo LP, Ng SH, Wang ZF, Wang ZP, Frans de Rooij N (2009) Micro-fabrication of polymeric devices using hot roller embossing. Microelectron Eng 86:933–936CrossRefGoogle Scholar
Velten T, Bauerfeld F, Schuck H, Scherbaum S, Landesberger C, Bock K (2011) Roll-to-roll hot embossing of microstructures. Microsyst Technol 17:619–627CrossRefGoogle Scholar
Yi P, Shu Y, Deng Y, Peng L, Lai X (2015) Mechanism of forming defects in roll-to-roll hot embossing of micro-pyramid arrays I: experiments. J Micromech Microeng 25:105017CrossRefGoogle Scholar
J. Taniguchi, H. Yoshikawa, G. Tazaki, T. Zento, High-density pattern transfer via roll-to-roll ultraviolet nanoimprint lithography using replica mold, Journal of Vacuum Science & Technology B 30 (2012) 06FB07Google Scholar
Yoshikawa H, Taniguchi J, Tazaki G, Zento T (2013) Fabrication of high-aspect-ratio pattern via high throughput roll-to-roll ultraviolet nanoimprint lithography. Microelectron Eng 112:273–277CrossRefGoogle Scholar
Zhong ZW, Shan XC (2014) A study of meniscus formation and its effect on roll-to-roll UV embossing. Int J Eng Sci 85:10–19CrossRefGoogle Scholar
Jiang LT, Huang TC, Chiu CR, Chang CY, Yang SY (2007) Fabrication of plastic microlens arrays using hybrid extrusion rolling embossing with a metallic cylinder mold fabricated using dry film resist. Opt Express 15(19):12088–12094CrossRefGoogle Scholar
Chang CY, Tsai MH (2015) Development of a continuous roll-to-roll processing system for mass production of plastic optical film. J Micromech Microeng 25(12):125014CrossRefGoogle Scholar
Chang CY, Chu JH (2017) Innovative design of reel-to-reel hot embossing system for production of plastic microlens array films. Int J Adv Manuf Technol 89:2411–2420CrossRefGoogle Scholar