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Design and control of a new 3-PUU fast tool servo for complex microstructure machining

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Abstract

Ultra-precision fast tool servo (FTS) machining technology is an effective method for complex surface microstructure machining. However, as for a single degree-of-freedom FTS, it can only achieve a high-rate reciprocating movement in one direction; thus, it cannot realize ultra-precision machining for some complex microstructural surface. Therefore, a novel flexure-based fast tool servo device composed of two platforms and three branched chains is proposed in this work, which aims to realize a robotic ultra-precision machining with XYZ translational precision motion. Each of the branched chain is made up of a prismatic pair, two hook hinges, and a connecting rod. The FTS mechanism design and modeling are carried out firstly; then, the FTS device characterization in terms of statics analysis and modal analysis is conducted; in order to suppress the hysteresis nonlinearity and improve the positioning precision, a new repetitive-compensated PID controller combined with an inverted modified Prandtl-Ishlinskii model is proposed to handle this issue. It indicates that the displacement amplification ratio is 3.87; thus, the workspace can reach to [− 85, 85]∪[− 80,80]∪[0,120]μm3, and the closed-loop positioning precision is 600 nm, which will be considered to fulfill practical FTS machining tasks.

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References

  1. Brecher C, Lange S, Merz M, Niehaus F, Wenzel C, Winterschladen M, Wech M (2006) NURBS based ultra-precision free-form machining. CIRP Ann Manuf Technol 55:547–550

    Article  Google Scholar 

  2. Fang FZ, Zhang XD, Weckenmann A, Zhang GX, Evans C (2013) Manufacturing and measurement of freeform optics. CIRP Annals-Manuf Technol 62:823–846

    Article  Google Scholar 

  3. Tao F, Cheng JF, Qi QL, Zhang M, Zhang H, Sui FY (2017) Digital twin driven product design, manufacturing and service with big data. Int J Adv Manuf Technol. https://doi.org/10.1007/s00170-017-0233-1

  4. Oliveira OG, Lima Monteiro DW, Costa RFO (2014) Optimized microlens-array geometry for Hartmann-Shack wavefront sensor. Opt. Laser Eng 55:155–161

    Article  Google Scholar 

  5. Ow YS, Breese MBH, Azimi S (2010) Fabrication of concave silicon micro-mirrors. Opt Express 18(14):14511–14518

    Article  Google Scholar 

  6. Wong S, Hong GS (2011) Optimal selection of machining parameters for fast tool servo diamond turning. Int J Adv Manuf Technol 57(1–4):85–99

    Google Scholar 

  7. Tao F, Bi L, Zuo Y, Nee A (2017) A cooperative co-evolutionary algorithm for large-scale process planning with energy consideration. J Manuf Sci Eng Trans ASME 139(6):061016-1–061016-11

    Article  Google Scholar 

  8. Tao F, Cheng Y, Zhang L, Nee A (2017) Advanced manufacturing systems: socialization characteristics and trends. J Intell Manuf 28(5):1079–1094

    Article  Google Scholar 

  9. Tao F, Qi QL (2017) New IT driven service-oriented smart manufacturing: framework and characteristics. IEEE Trans Syst, Man and Cybern: Syst. https://doi.org/10.1109/TSMC.2723764

  10. Pan A, Gao B, Chen T, Si J, Li C, Chen F, Hou X (2014) Fabrication of concave spherical microlenses on silicon by femtosecond laser irradiation and mixed acid etching. Opt Express 22(12):15245–15250

    Article  Google Scholar 

  11. Lu X, Trumper DL (2005) Ultrafast tool servos for diamond turning. CIRP Ann Manuf Technol 54:383–388

    Article  Google Scholar 

  12. Sang HS, Lee KL, Lee KM, Bang YB (2009) Fabrication of free-form surfaces using a long-stroke fast tool servo and corrective figuring with on-machine measurement. Int J Mach Tools Manuf 49(12):991–997

    Google Scholar 

  13. Yu DP, Hong GS, Wong YS (2011) Profile error compensation in fast tool servo diamond turning of micro-structured surfaces. Int J Mach Tools Manuf 52(1):13–23

    Article  Google Scholar 

  14. Scheiding S, Yi AY, Gebhardt A, Li L, Risse S, Eberhardt R, Tunnermann A (2011) Freeform manufacturing of a microoptical lens array on a steep curved substrate by use of a voice coil fast tool servo. Opt Express 19(24):23938–23951

    Article  Google Scholar 

  15. Zou Q, Yao JN, Wang T (2013) Analysis and design of a 2-DOF linear FTS device. The International Conference on Advance in Construction Machinery and Vehicle Engineering ICACMVE’13

  16. Zhu ZW, Zhou XQ, Liu ZW, Wang RQ, Zhu L (2014) Development of a piezoelectrically actuated two-degree-of-freedom fast tool servo with decoupled motions for micro-/nanomachining. Precis Eng 38(4):809–820

    Article  Google Scholar 

  17. Zhu ZW, To S, Kornel F, Ehmann, Zhou XQ (2017) Design, analysis, and realization of a novel piezoelectrically actuated rotary spatial vibration system for micro−/nano-machining. IEEE/ASME Trans Mechatron 22(3):1227–1237

    Article  Google Scholar 

  18. Tang H, Li Y (2015) Feedforward nonlinear PID control of a novel nanomanipulator using Preisach hysteresis compensator. Rob Comput Integr Manuf 34:124–132

    Article  Google Scholar 

  19. Tao F, Qi QL (2017) New IT driven service-oriented smart manufacturing: framework and characteristics. IEEE Trans Syst Man Cybern: Syst. https://doi.org/10.1109/TSMC.2017.2723764

  20. Tao F, Cheng J, Cheng Y, Gu S, Zheng TY, Yang H, Sim SDM (2017) A manufacturing service supply–demand matching simulator under cloud environment. Rob Comput Integr Manuf 45(6):34–46

    Article  Google Scholar 

  21. Tang H, Li Y (2015) A new flexure-based Yθ nanomanipulator with nanometer scale positioning resolution and millimeter range workspace. IEEE-ASME Trans Mechatron 20(3):1320–1330

    Article  Google Scholar 

  22. Wada T, Takahashi M, Moriwaki T, Nakamoto K (2007) Development of a three axis controlled fast tool servo for ultra precision machining (1st report). J Jpn Soc Precis Eng 73:1345–1349

    Article  Google Scholar 

  23. Wang H, Zhang X (2008) Input coupling analysis and optimal design of a 3-DOF compliant micro-positioning stage. Mech Mach Theory 43(4):400–410

    Article  MATH  Google Scholar 

  24. Eral HB, Mannetje DJCM, Oh JM (2013) Contact angle hysteresis: a review of fundamentals and applications[J]. Colloid Polym Sci 291(2):247–260

    Article  Google Scholar 

  25. Chaipanich A, Jiatanong N, Yimnirun R (2009) Ferroelectric hysteresis behavior in 0-3 PZT-cement composites: effects of frequency and electric field. Ferroelectr Lett Sect 36(3–4):59–66

    Article  Google Scholar 

  26. Huang Z, Zhao YS, Zhao TS (2014) Advanced spatial mechanism. Higher Education Press, Beijing

    Google Scholar 

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Acknowledgements

This work was supported in part by the Natural Science Foundation of China (5160051494, U1601202), Science and Technology Program of Guangzhou (201510010058), Natural Science Foundation of Guangdong (2014A030310204), and Guangdong General Programs for Science and Technology (2015A010104009, 2015B010104008, 2015B010133005).

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Authors and Affiliations

  1. Key Laboratory of Precision Microelectronic Manufacturing Technology and Equipment of Ministry of Education, Higher Education Mega Center, Guangdong University of Technology, Guangzhou, China

    Hui Tang, Hongcheng Li, Yunbo He, Jian Gao, Xin Chen & Jiedong Li

  2. Department of Industrial and Systems Engineering, Hong Kong Polytechnic University, Hung Hom, Kowloon, Hong Kong, China

    Suet To & Kai-Ming Yu

Authors
  1. Hui Tang
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  2. Hongcheng Li
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  3. Suet To
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  4. Kai-Ming Yu
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  5. Yunbo He
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  6. Jian Gao
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  7. Xin Chen
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  8. Jiedong Li
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Correspondence to Hui Tang or Yunbo He.

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Tang, H., Li, H., To, S. et al. Design and control of a new 3-PUU fast tool servo for complex microstructure machining. Int J Adv Manuf Technol 94, 3503–3517 (2018). https://doi.org/10.1007/s00170-017-1166-4

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  • DOI: https://doi.org/10.1007/s00170-017-1166-4

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