Abstract
The typical triangular-shaped microchannels fabricated by CO2 laser-based microchanneling of polymethyl methacrylate yield low performance in heat sinks, chemical reactors, and other microfluidic devices. Trapezoidal and rectangular microchannels are more commonly used and desired. To fabricate high-quality trapezoidal microchannels using a CO2 laser on polymethyl methacrylate substrates, a two-pass fabrication method is introduced using the offset ratio of 45% to yield a clean cross section. To determine the optimal process parameters to achieve trapezoidal microchannels of desired dimensions, the effects of process parameters were further investigated and groups of equations were derived based on nonlinear regression models. A microfluidic chip was fabricated to compare the performance of triangular and trapezoidal microchannels of the same cross sectional area. The results demonstrated the superior performance of the trapezoidal microchannel fabricated using two-pass fabrication. This indicates that the two-pass fabrication method is a viable rapid and economic solution for fabrication of high-quality microchannels on polymethyl methacrylate-based devices.
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References
Prakash S, Kumar S (2015) Fabrication of microchannels: a review. Proc Inst Mech Eng B J Eng Manuf 229(8):1273–1288
Hong TF, Ju WJ, Wu MC, Tai CH, Tsai CH, Fu LM (2010) Rapid prototyping of PMMA microfluidic chips utilizing a CO2 laser. Microfluid Nanofluid 9(6):1125–1133
Becker H, Gärtner C (2008) Polymer microfabrication technologies for microfluidic systems. Anal Bioanal Chem 390(1):89–111
Chen PC, Pan CW, Lee WC, Li KM (2014) An experimental study of micromilling parameters to manufacture microchannels on a PMMA substrate. Int J Adv Manuf Technol 71(9–12):1623–1630
Klank H, Kutter JP, Geschke O (2002) CO2-laser micromachining and back-end processing for rapid production of PMMA-based microfluidic systems. Lab Chip 2(4):242–246
Snakenborg D, Klank H, Kutter JP (2003) Microstructure fabrication with a CO2 laser system. J Micromech Microeng 14(2):182
Prakash S, Kumar S (2015) Profile and depth prediction in single-pass and two-pass CO2 laser microchanneling processes. J Micromech Microeng 25(3):035010
Xiang, H., Fu, J., & Chen, Z. (2006). 3D finite element modeling of laser machining PMMA. In: 2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems (pp. 942–946). IEEE.
Romoli L, Tantussi G, Dini G (2011) Experimental approach to the laser machining of PMMA substrates for the fabrication of microfluidic devices. Opt Lasers Eng 49(3):419–427
Chung CK, Lin SL (2011) On the fabrication of minimizing bulges and reducing the feature dimensions of microchannels using novel CO2 laser micromachining. J Micromech Microeng 21(6):065023
Chung CK, Tu KZ (2014) Application of metal film protection to microfluidic chip fabrication using CO2 laser ablation. Microsyst Technol 20(10–11):1987–1992
Li JM, Liu C, Zhu LY (2009) The formation and elimination of polymer bulges in CO2 laser microfabrication. J Mater Process Technol 209(10):4814–4821
Nayak NC, Lam YC, Yue CY, Sinha AT (2008) CO2-laser micromachining of PMMA: the effect of polymer molecular weight. J Micromech Microeng 18(9):095020
Huang Y, Liu S, Yang W, Yu C (2010) Surface roughness analysis and improvement of PMMA-based microfluidic chip chambers by CO 2 laser cutting. Appl Surf Sci 256(6):1675–1678
Kurnia JC, Sasmito AP, Birgersson E, Shamim T, Mujumdar AS (2014) Evaluation of mass transport performance in heterogeneous gaseous in-plane spiral reactors with various cross-section geometries at fixed cross-section area. Chem Eng Process Process Intensif 82:101–111
Gunnasegaran P, Mohammed HA, Shuaib NH, Saidur R (2010) The effect of geometrical parameters on heat transfer characteristics of microchannels heat sink with different shapes. Int Commun Heat Mass Transf 37(8):1078–1086
Bhuyan MK, Courvoisier F, Lacourt PA, Jacquot M, Furfaro L, Withford MJ, Dudley JM (2010) High aspect ratio taper-free microchannel fabrication using femtosecond Bessel beams. Opt Express 18(2):566–574
Darvishi S, Cubaud T, Longtin JP (2012) Ultrafast laser machining of tapered microchannels in glass and PDMS. Opt Lasers Eng 50(2):210–214
Sun Y, Kwok YC, Nguyen NT (2006) Low-pressure, high-temperature thermal bonding of polymeric microfluidic devices and their applications for electrophoretic separation. J Micromech Microeng 16(8):1681
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Zhang, S., Shin, Y.C. Effective methods for fabricating trapezoidal shape microchannel of arbitrary dimensions on polymethyl methacrylate (PMMA) substrate by a CO2 laser. Int J Adv Manuf Technol 93, 1079–1094 (2017). https://doi.org/10.1007/s00170-017-0445-4
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DOI: https://doi.org/10.1007/s00170-017-0445-4