Abstract
Picosecond laser machining is an important modern technology for materials with high hardness. In this paper, micro-holes with several hundred micrometer diameter were drilled in SiC/SiC composite using picosecond laser, and the quality of the micro-holes under different machining parameters was investigated in detail. The results indicated that energy density and feeding speed had remarkable effect on the micro-hole quality. The roundness of the micro-holes on the laser entry side was rarely affected by energy density and feeding speed. However, the roundness of the micro-holes on the laser exit side and micro-hole diameters along processing direction were quite sensitive to the energy density and feeding speed. Feeding speed had little influence on the quality of drilling holes, except for more debris on the entry side with 11.2 μm/s feeding speed.
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References
Naslain R (2004) Design, preparation and properties of non-oxide CMCs for application in engines and nuclear reactors: an overview. Compos Sci Technol 64:155–170
Zhang LT, Cheng LF, Xu YD (2003) Process in research work of new CMC-SiC, Aeronaut. Manuf Technol 1:24–32 (in Chinese)
Hasegawa A, Kohyama A, Jones RH (2000) Critical issues and current status of SiC/SiC composites for fusion. J Nucl Mater 283–287:128–137
Filsinger D, Műnz S, Schulz A, Wittig S (2001) Experimental assessment of fiber-reinforced ceramics for combustor walls. J Eng Gas Turbines Power 123:271–276
Ohnabe H, Masaki S, Onozuka M (1999) Potential application of ceramic matrix composites to aero-engine components. Compos Part A 30(4):489–496
Mcnally CA, Folkes J, Pashby IR (2004) Laser drilling of cooling holes in aeroengines: state of the art and future challenges. Mater Sci Technol 20:805–813
Spriet P, Habarou G (1997) Applications of CMCs to turbojet engines: overview of the SEP experience. Key Eng Mater 127–131:1267–1276
Zhang CH, Ohmori H, Li W (2000) Small-hole machining of ceramic material with electrolytic interval-dressing (ELID-II) grinding. J Mater Prod Technol 105:284–293
Liew PJ, Yan JW, Kuriyagawa T (2014) Fabrication of deep micro-holes in reaction-bonded SiC by ultrasonic cavitation assisted micro-EDM. Int J Mach Tools Manuf 76:13–20
Ancona A, Döring S, Jauregui C, Röser F, Limpert J, Nolte S, Tünnermann A (2009) Femtosecond and picosecond laser drilling of metals at high repetition rates and average powers. Opt Lett 34(21):3304–3306
Jandeleit J, Horn A, Kreutz EW, Poprawe R (1997) Micromachining of metals and ceramics by nano- and picosecond laser radiations. Micromachining and Microfabrication Process Technology III, Bellingham, Wash.: SPIE, 34–42
Zahedi A, Tawakoli T, Azarhoushang B, Akbari J (2015) Picosecond laser treatment of metal-bonded CBN and diamond superabrasive surfaces. Int J Adv Manuf Technol 76(5–8):1479–1491
Kamlage G, Bauer T, Ostendorf A, Chichkov BN (2003) Deep drilling of metals by femtosecond laser pulses. Appl Phys A Mater 77:307–310
Bruneau S, Hermann J, Dumitru G, Sentis M, Axente E (2005) Ultra-fast laser ablation applied to deep-drilling of metals. Appl Surf Sci 248:299–303
Hu WQ, Shin YC, King GB (2010) Micromachining of metals, alloys, and ceramics by picosecond laser ablation. J Manuf Sci Eng 132(1):1–7
Molian P, Pecholt B, Gupta S (2009) Picosecond pulsed laser ablation and micromachining of 4H-SiC wafers. Appl Surf Sci 255:4515–4520
Parry JP, Shephard JD, Hand DP (2011) Laser Micromachining of Zirconia (Y-TZP) Ceramics in the Picosecond Regime and the Impact on Material Strength. Int J Appl Ceram Technol 8(1):163–171
Wang CH, Zhang LT, Liu YS, Cheng GH, Zhang Q, Hua K (2013) Ultra-short pulse laser deep drilling of C/SiC composites in air. Appl Phys A Mater 111:1213–1221
Liu YS, Wang CH, Li WN, Yang XJ, Zhang Q, Cheng LF, Zhang LT (2014) Effect of energy density on the machining character of C/SiC composites by picosecond laser. Appl Phys A 116:1221–1228
Liu YS, Wang CH, Li WN, Zhang LT, Yang XJ, Cheng GH, Zhang Q (2014) Effect of energy density and feeding speed on micro-hole drilling in C/SiC composites by picosecond laser. J Mater Process Technol 214:3131–3140
Wu SJ Themochemical Environmental Behaviors of 3D SiC/SiC Composite. PhD thesis, Northwestern Polytechnical University 2008. (in Chinese)
Moreno P, Méndez C, García A, Arias I, Rosoa L (2006) Femtosecond laser ablation of carbon reinforced polymers. Appl Surf Sci 252:4110–4119
Zhang YN, Zhang LT (2009) Friction of a C/SiC Composite Bearing in Air and in Combustion Environments. Int J Appl Ceram Technol 6(2):171–181
Döring S, Ullsperger T, Heisler F, Richter S, Tünnermann A, Nolte S (2013) Hole formation process in ultrashort pulse laser percussion drilling. Phys Procedia 41:424–433
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Liu, Y., Wang, J., Li, W. et al. Effect of energy density and feeding speed on micro-holes drilling in SiC/SiC composites by picosecond laser. Int J Adv Manuf Technol 84, 1917–1925 (2016). https://doi.org/10.1007/s00170-015-7844-1
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DOI: https://doi.org/10.1007/s00170-015-7844-1