Abstract
This paper analyzes the limitations of wire cut electrical discharge machining (WEDM) servo system in processing semiconductors, specifically its failure to distinguish an open circuit, normal discharge from a short-circuit state. This paper proposes a new servo system based on current pulse probability detection. Given the basic linear relationship between feed speed and current pulse probability, an appropriate control of current pulse probability can guarantee a suitable servo feed speed in machining semiconductors by WEDM. Contrast experiments are performed to verify the feasibility of this system.
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Zhidong, L., Haoran, C., Huijun, P. et al. Automatic control of WEDM servo for silicon processing using current pulse probability detection. Int J Adv Manuf Technol 76, 367–374 (2015). https://doi.org/10.1007/s00170-014-6252-2
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DOI: https://doi.org/10.1007/s00170-014-6252-2