Chemical vapor deposition-grown vertically aligned single-walled carbon nanotubes length assurance

  • Hatem Abuhimd
  • Ghulam Moeen Uddin
  • Abe Zeid
  • Yung Joon Jung
  • Sagar KamarthiEmail author


Chemical vapor deposition is one of the several viable methods for growing vertically aligned single-walled carbon nanotubes (VA-SWNTs). Utilizing cobalt (Co) catalyst supported on multilayer Al/SiO2 and a hydrocarbon feedstock, VA-SWNTs are grown in excess of a millimeter height. To control VA-SWNTs length, one has to use the right combination of process control variables such as hydrocarbon gas flow rate, chamber temperature, and chamber pressure. This paper presents a process meta-model-based full factorial experimental design and analysis to study the yield of tall VA-SWNTs. All of the process variables under the study play a role in influencing VA-SWNTs length; the current study investigates main effects and their interactions. The meta-model-based analysis demonstrates that the hydrocarbon flow rate and the chamber pressure are the most statistically significant control variables that influence the length of VA-SWNTs. In addition, the response surface graph confirms that a higher gas flow rate at lower chamber pressure will consistently yield tall VA-SWNTs. We found that gas flow rate is the most significant of the control variables and only the optimum gas flow rate can ensure the growth of tall VA-SWNTs. We noticed that the interaction of gas flow rate with chamber temperature is also significant to the length of VA-SWNTs grown. All these observations together indicate that the dynamic pressure of the gas in the chamber plays an important role in the assurance of the length of VA-SWNTs. Outcomes of this investigation are beneficial for moving us closer towards producing VA-SWNTs on a mass scale.


Vertically aligned single-walled carbon nanotubes (VA-SWNTs) Carbon nanotubes (CNTs) Chemical vapor deposition (CVD) Design of experiments Artificial neural networks (ANN) 


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  1. 1.
    Jorio A, Dresselhaus G, Dresselhaus MS (2008) Carbon nanotubes: advanced topics in the synthesis, structure, properties and applications. Springer, HeidelbergGoogle Scholar
  2. 2.
    Hata K, Futaba D, Mizuno K (2004) Water-assisted highly efficient synthesis of impurity-free single-walled carbon nanotubes. Science 306(5700):1362–1364CrossRefGoogle Scholar
  3. 3.
    Dresselhaus, MS And Dresselhaus, G. Avouris P. (2004) Carbon nanotubes. MRS BulletinGoogle Scholar
  4. 4.
    Dresselhaus M, Dresselhaus G, Avouris P (2001) Carbon nanotubes: synthesis, structure, properties, and applications. Springer, HeidelbergGoogle Scholar
  5. 5.
    Li W, Xie S, Qian L, Chang B (1996) Large-scale synthesis of aligned carbon nanotubes. Science 274:1701–1703CrossRefGoogle Scholar
  6. 6.
    Murakami Y (2004) Growth of vertically aligned single-walled carbon nanotube films on quartz substrates and their optical anisotropy. Chem Phys Lett 385(3–4):298–303CrossRefGoogle Scholar
  7. 7.
    Oconnell MJ (2006) Carbon nanotubes: properties and applications. CRC Press, Boca RatonCrossRefGoogle Scholar
  8. 8.
    Miller GP (2007) Carbon nanotubes, properties and applications. CRC Press and Taylor & Francis Group, Boca RatonGoogle Scholar
  9. 9.
    Klabunde KJ, Richards R, MyiLibrary (2009) Nanoscale materials in chemistry. Wiley, New YorkCrossRefGoogle Scholar
  10. 10.
    Hahm MG, Kwon Y-K, Lee E, Ahn CW, Jung YJ (2008) Diameter selective growth of vertically aligned single walled carbon nanotubes and study on their growth mechanism. J Phys Chem 112(44):17143–17147Google Scholar
  11. 11.
    Lu J-C, Jeng S-LJ, Kaibo W, Jye-Chyi L, USLINJ (2009) A review of statistical methods for quality improvement and control in nanotechnology. J Qual Technol 41(2):148–164Google Scholar
  12. 12.
    Tanaka K, Yamabe T, Fukui K (1999) The science and technology of carbon nanotubes. Elsevier, AmsterdamGoogle Scholar
  13. 13.
    Board E (2006) Understanding carbon nanotubes. Springer, HeidelbergGoogle Scholar
  14. 14.
    Yuangyai C, Nembhard HB (2009) Design of experiments: a key to innovation in nanotechnology, emerging nanotechnologies for manufacturing. Elsevier, SpringerGoogle Scholar
  15. 15.
    Desai S, Mohan R, Sankar J, Tiano T (2008) Understanding conductivity of single wall carbon nanotubes (SWNTs) in a composite resin using design of experiments. Int J NanomanufGoogle Scholar
  16. 16.
    Kukovecza MD, Nemesnagy E, Szabo R, Kiricsi I (2005) Optimization of CCVD synthesis conditions for single-wall carbon nanotubes by statistical design of experiments (DoE). Carbon. doi: 10.1016/j.carbon.2005.06.001
  17. 17.
    Yang Y, York JD, Xu J, Lim S, Chen Y, Haller GL (2005) Statistical design of C10-Co-MCM-41 catalytic template for synthesizing smaller-diameter single-wall carbon nanotubes. Microporous and Mesoporous Materials 86(1):303–313CrossRefGoogle Scholar
  18. 18.
    Yang Y, Lim S, Wang C, Du G, Haller GL (2004) Statistical analysis of synthesis of Co-MCM-41 catalysts for production of aligned single walled carbon nanotubes (SWNT). Microporous and Mesoporous Materials 74(1–3):133–141CrossRefGoogle Scholar
  19. 19.
    Cotasanchez G, Soucy G, Huczko A, Lange H (2005) Induction plasma synthesis of fullerenes and nanotubes using carbon black–nickel particles. Carbon 43(15):3153–3166CrossRefGoogle Scholar
  20. 20.
    Ting J, Chang C, Chen S, Lu D, Kung C, Huang F (2006) Optimization of field emission properties of carbon nanotubes by Taguchi method. Thin Solid Films. doi: 10.1016/j.tsf.2005.08.372
  21. 21.
    Maheshwar S, Apte P, Purandare S, Renju Z (2005) Application of the taguchi analytical method for optimization of effective parametersof the chemical vapor deposition process controlling the production of nanotubes/nanobeads. J Nanosci Nanotechnol 5(2):288–295CrossRefGoogle Scholar
  22. 22.
    Lin T-S, Wu C-F, Hsieh C-T (2006) Improvement on superhydrophobic behavior of carbon nanofibers via the design of experiment and analysis of variance. J Vac Sci Technol B 24(2):855CrossRefGoogle Scholar
  23. 23.
    Jahanshahi M, Jahan-Bakhsh R, Solmaz H, Razieh J (2007) Application of Taguchi method in the optimization of ARC-Carbon Nanotube Fabrication. AIP Conference ProceedingsGoogle Scholar
  24. 24.
    Prashantha K (2009) Taguchi analysis of shrinkage and warpage of injection-moulded polypropylene/multiwall carbon nanotubes nanocomposites. eXPRESS Polymer Letters 3(10):630–638CrossRefGoogle Scholar
  25. 25.
    Hahm M, Kwon Y, Busnaina A (2011) Structure controlled synthesis of vertically aligned carbon nanotubes using thermal chemical vapor deposition process. J Heat Tran 133:031001-1–031001-4CrossRefGoogle Scholar
  26. 26.
    Uddin GM, Cai Z, Ziemer KS, Zeid A, Kamarthi S (2010) Analysis of molecular beam epitaxy process for growing nanoscale magnesium oxide films. J Manuf Sci EngGoogle Scholar
  27. 27.
    Dasgupta T, Weintraub B, Joseph VR (2011) A physical–statistical model for density control of nanowires. IIE Transactions. doi: 10.1080/0740817X.2010.505124
  28. 28.
    Haykin S (2009) Neural networks and learning machines. Prentice Hall, Upper Saddle RiverGoogle Scholar
  29. 29.
    Kohonen T (2001) Self-organizing maps. Springer, HeidelbergzbMATHCrossRefGoogle Scholar
  30. 30.
    Liepmann HW, Roshko A (1957) Elements of gas dynamics. Courier Dover Publications, MineolaGoogle Scholar

Copyright information

© Springer-Verlag London Limited 2012

Authors and Affiliations

  • Hatem Abuhimd
    • 1
  • Ghulam Moeen Uddin
    • 1
  • Abe Zeid
    • 1
  • Yung Joon Jung
    • 1
  • Sagar Kamarthi
    • 1
    Email author
  1. 1.Department of Mechanical and Industrial EngineeringNortheastern UniversityBostonUSA

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