Skip to main content
Log in

Nanogrinding of soft–brittle monocrystalline mercury cadmium telluride using a ceramic bond ultrafine diamond grinding wheel

  • ORIGINAL ARTICLE
  • Published:
The International Journal of Advanced Manufacturing Technology Aims and scope Submit manuscript

Abstract

Nanogrinding experiments on soft–brittle monocrystalline mercury cadmium telluride (HgCdTe, MCT) were conducted using a novel developed ceramic bond ultrafine diamond grinding wheel. The experimental results showed that the ultrafine grinding wheel exhibited excellent grinding performance on HgCdTe wafers. Surface roughness Ra 1.4 nm, rms 1.7 nm, and PV 10.9 nm were respectively achieved under nanogrinding using this diamond grinding wheel. All the ground surfaces of MCT wafers exhibited ductile mode character, free of cracking and burn damage. The nanogrinding results were discussed in terms of the ceramic bond, as well as maximum undeformed chip thickness.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. Rogalski A (2005) HgCdTe infrared detector material: history, status and outlook. Rep Prog Phys 68(10):2267–2336

    Article  Google Scholar 

  2. Chen CS, Liu AH, Sun G, He JL, Wei XQ, Liu M, Zhang ZG, Man BY (2006) Analysis of laser damage threshold and morphological changes at the surface of a HgCdTe crystal. J Opt A Pure Appl Opt 8(1):88–92

    Article  Google Scholar 

  3. Bowen GJ, Blenkinsop ID, Catchpole R, Gordon NT, Harper MAC, Haynes PC, Hipwood L (2005) HOTEYE: a novel thermal camera using higher operating temperature infrared detectors. Proc SPIE Int Soc Opt Eng 5783:392–400

    Google Scholar 

  4. Lou LF, Frye WH (2009) Hall effect and resistivity in liquid-phase-epitaxial layers of HgCdTe. J Appl Phys 56(8):2253–2267

    Article  Google Scholar 

  5. Yang W, Chang K, Zhang SC (2008) Intrinsic spin hall effect induced by quantum phase transition in HgCdTe quantum wells. Phys Rev Lett 100(5):056602

    Article  Google Scholar 

  6. Lindle JR, Bewley WW, Vurgaftman I, Meyer JR, Thomas ML, Piquette EC, Edwall DD, Tennant WE (2007) HgCdTe negative luminescence devices with high internal and external efficiencies in the midinfrared. Appl Phys Lett 90(24):241119

    Article  Google Scholar 

  7. Zhou HX (2010) High-efficiency and ultraprecision grinding of soft–brittle CdZnTe crystals. Mater Manuf Process 25(6):418–423

    Article  Google Scholar 

  8. Singh R, Velicu S, Crocco J, Chang Y, Zhao J, Almeida LA, Markunas J, Kaleczyc A, Dinan JH (2005) Molecular beam epitaxy growth of high-quality HgCdTe LWIR layers on polished and repolished CdZnTe substrates. J Electron Mater 34(6):885–890

    Article  Google Scholar 

  9. Zeng DM, Jie WQ, Zha GQ, Wang T, Yang G (2007) Effect of annealing on the residual stress and strain distribution in CdZnTe wafers. J Crystal Growth 305(1):50–54

    Article  Google Scholar 

  10. Zhang ZY, Meng YW, Guo DM, Kang RK, Gao H (2010) Nanoscale machinability and subsurface damage machined by CMP of soft–brittle CdZnTe crystals. Int J Adv Manuf Technol 47(9–12):1105–1112

    Article  Google Scholar 

  11. Lee MY, Kim YH, Kim GH, Yang SC, Lee YS, Lee HC (2006) A new surface-flattening method using single-point diamond turning (SPDT) and its effects on LPE HgCdTe photodiodes. Semicond Sci Technol 21(1):40–43

    Article  Google Scholar 

  12. Rajic S, Datskos PG (1999) Novel fabrication and simple hybridization of exotic material MEMS. Proc SPIE Int Soc Opt Eng 3874:188–194

    Google Scholar 

  13. Zhang ZY, Guo DM, Kang RK, Gao H, Jin ZJ, Meng YW (2010) Subsurface crystal lattice deformation machined by ultraprecision grinding of soft–brittle CdZnTe crystals. Int J Adv Manuf Technol 47(9–12):1065–1081

    Article  Google Scholar 

  14. Wang Y, Zou J, Huang H, Zhou L, Wang BL, Wu YQ (2007) Formation mechanism of nanocrystalline high-pressure phases in silicon during nanogrinding. Nanotechnology 18(46):465705

    Article  Google Scholar 

  15. Huang H, Wang BL, Wang Y, Zou J, Zhou LB (2008) Characteristics of silicon substrates fabricated using nanogrinding and chemo-mechanical-grinding. Mater Sci Eng A 479(1–2):373–379

    Google Scholar 

  16. Zarudi I, Zhang LC (1998) Effect of ultraprecision grinding on the microstructural change in silicon monocrystals. J Mater Process Technol 84(1–3):149–158

    Article  Google Scholar 

  17. Miyauchi T, Tsujimura T, Handa K, Nakayama J, Shimuzu K (2009) Influence of silicon carbide filters in cast iron composite brake blocks on brake performance and development of a production process. Wear 267(5–8):833–838

    Article  Google Scholar 

  18. Fan SW, Zhang LT, Cheng LF, Tian GL, Yang SJ (2010) Effect of braking pressure and braking speed on the tribological properties of C/SiC aircraft brake materials. Compos Sci Technol 70(6):959–965

    Article  Google Scholar 

  19. Goswami AP, Das GC (2000) Role of fabrication route and sintering on wear and mechanical properties of liquid-phase-sintered alumina. Ceram Int 26(8):807–819

    Article  Google Scholar 

  20. Zhang ZY, Wu YQ, Guo DM, Huang H (2011) Phase transformation of single crystal silicon induced by grinding with ultrafine diamond grits. Scr Mater 64(2):177–180

    Article  Google Scholar 

  21. Malkin S, Guo CS (2008) Grinding technology: theory and applications of machining with abrasives, 2nd edn. Industrial Press Inc., New York

    Google Scholar 

  22. Zhang ZY, Wu YQ, Huang H (2010) New deformation mechanism of soft–brittle CdZnTe single crystals under nanogrinding. Scr Mater 63(6):621–624

    Article  Google Scholar 

Download references

Acknowledgment

The authors appreciate the financial support from the National Natural Science Foundation of China (51005037).

Author information

Authors and Affiliations

Authors

Corresponding author

Correspondence to Hongxiu Zhou.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Zhou, H., Wang, C., Zhao, D. et al. Nanogrinding of soft–brittle monocrystalline mercury cadmium telluride using a ceramic bond ultrafine diamond grinding wheel. Int J Adv Manuf Technol 60, 933–938 (2012). https://doi.org/10.1007/s00170-011-3667-x

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s00170-011-3667-x

Keywords

Navigation