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Two-dimensional simulations of ion concentration distribution in microstructural electroforming

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Abstract

A theoretical model is constructed to predict the metal ion concentration distribution during the electroforming of high-aspect-ratio microstructures. Two-dimensional numerical simulations are then performed using COMSOL MultiphysicsTM software to investigate the effect of the processing conditions and the microstructure geometry on the electroforming results. The electroforming outcome is significantly dependent upon the current density and the microstructure aspect ratio, respectively. The simulation results for the electroforming of microstructural posts with an aspect ratio of 10:1 are found to be in good agreement with the analytical solutions.

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Authors and Affiliations

  1. Department of Mechanical Engineering, WuFeng Institute of Technology, Chia-Yi, 621, Taiwan

    Tsung-Hsun Tsai

  2. Graduate Institute of Precision Engineering, National Chung Hsing University, Taichung, 402, Taiwan

    Hsiharng Yang

  3. Department of mechanical Engineering, National Chung Hsing University, Taichung, 402, Taiwan

    Reiyu Chein

  4. Materials and Electro-Optics Research Division, Chung-Shan Institute of Science and Technology, Tao-Yuan, Taiwan

    Mau-Shiun Yeh

Authors
  1. Tsung-Hsun Tsai
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  2. Hsiharng Yang
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  3. Reiyu Chein
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  4. Mau-Shiun Yeh
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Correspondence to Hsiharng Yang.

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Tsai, TH., Yang, H., Chein, R. et al. Two-dimensional simulations of ion concentration distribution in microstructural electroforming. Int J Adv Manuf Technol 57, 639–646 (2011). https://doi.org/10.1007/s00170-011-3312-8

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  • DOI: https://doi.org/10.1007/s00170-011-3312-8

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