Abstract
LTCC material is introduced as an excellent alternative to silicon, glass or plastic materials for the fabrication of miniaturised analytical devices, though it is most widely used in the automotive industry and microwave industry. Laser ablation of LTCC material was studied in this report. This kind of green tape material is mechanised by excimer laser (KrF, 248 nm) and UV laser (Nd:YAG, 355 nm) and, for the first time, by infrared laser (1,090 nm). The optical photos and the SEM photos of the LTCC ablated by different kinds of laser sources are given in this paper. For the first time, we discuss the laser ablation of LTCC by optical fibre sources. When using the excimer laser, the tapered structure can be easily seen from the SEM photo. However, a kind of clear and perfect ablation of LTCC can be seen for the first time by the 1,090-nm infrared laser ablation.
Similar content being viewed by others
Reference
LaVan DA, McGuire T, Langer R (2003) Small-scale systems for in vivo drug delivery. Nat Biotechnol 21:1184–1191 (01 Oct)
Hong JW, Quake SR (2003) Integrated nanolitre systems. Nat Biotechnol 21:1179–1183 (01 Oct)
Ferrari M (2005) Cancer nanotechnology: opportunities and challenges. Nat Rev Cancer 5:161–171 (01 Mar) Review
Lucchetta EM, Lee JH, Fu LA, Patel NH, Ismagilov RF (2005) Dynamics of Drosophila embryonic patterning network perturbed in space and time using micro fluidics. Nature 434:1134–1138 doi:10.1038/nature03509
Dittrich PS, Manz A (2006) Lab-on-a-chip: micro fluidics in drug discovery. Nat Rev Drug Discovery 5:210–218 (01 Mar) Review
Wei MK, Yang H (2003) Cumulative heat effect in excimer laser ablation of polymer PC and ABS. Int J Adv Manuf Technol 21(12):1029–1034 doi:10.1007/s00170-002-1431-y
Pan CT, Yang H, Wei MK (2007) 248 nm excimer laser drilling PI film for nozzle plate application. Int J Adv Manuf Technol 34(9–10):889–897 doi:10.1007/s00170-006-0653-9
Teterycz H, Kita J, Bauer R, Golonka LJ, Licznerski BW, Nitsch K et al (1998) New design of an SnO2 gas sensor on low temperature cofiring ceramics. Sens Actuators B 47:100–103 doi:10.1016/S0925-4005(98)00008-2
Gongora RM, Sola Laguna LM, Moffett PJ, Santiago-Aviles JJ (1999) The utilization of low temperature co-fired ceramics(LTCC-ML) technology for meso-scale EMS, a simple thermistor based flow sensor. Sens Actuators A 73:215–221 doi:10.1016/S0924-4247(98)00238-6
Khanna PK, Hornbostel B, Grimme R, Schafer W, Dorner J (2004) Miniature pressure sensor and micromachined actuator structure based on low temperature cofired ceramics and piezoelectric material. Mater Chem Phys 87:173–178 doi:10.1016/j.matchemphys.2004.05.021
Khanna PK, Hornbostel B, Burgard M, Schafer W, Dorner J (2005) Studies on three dimensional moulding, bonding and assembling of low temperature cofired ceramics for MEMS and MST applications. Mater Chem Phys 89:72–79 doi:10.1016/j.matchemphys.2004.08.031
Goldbach MAH, Keusgen M (2006) LTCC-based microchips for the electrochemical detection of phenolic compounds. Sensor Actuator B Chem 120:346–351
Ibañez-Garcia N, Machado Gonçalves RD, Mendes da Rocha Z, Góngora-Rubio MR, Seabra AC, Alonso Chamarro J (2006) LTCC meso-analytical system for chloride ion determination in drinking waters. Sensor Actuator B Chem 118:67–72
Hansu Birol TM, Ryser P (2006) Processing of graphite based sacrificial layer for microfabrication of low temperature co-fired ceramics (LTCC). Sensor Actuator Phys 130/31:560–567
Zhu J, Cheng J, Ang SS (2006) A low temperature co-fired ceramic mesofluidic separator. J Phys: Conf Ser 34:734–739
Jaroslaw K, Andrzej D, Golonka LJ, Andrzej B (2000) Properties of laser cut LTCC heaters. Microelectron Reliab 40:1005–1010 doi:10.1016/S0026-2714(00)00008-1
Jaroslaw K, Dziedzic A, Golonka LJ, Zawada T (2002) Laser treatment of LTCC for 3D structures and elements fabrication. Microelectron Int 19(3):14–18 doi:10.1108/13565360210444998
Zhang C, Liu D, Nieto-Santisteban M, Szalay A, DeWitt DJ, Heber G (2003) Laser direct write and its application in low temperature co-fired ceramic technology. Microelectronic Eng 70:41–49 doi:10.1016/S0167-9317(03)00389-7
Kordas K, Pap AE, Saavalainen J, Jantunen H, Moilanen P, Hapaniemi E et al (2005) Laser induced surface activation of LTCC materials for chemical metallization. IEEE Trans Adv Packag 28(2):259–263 doi:10.1109/TADVP.2005.847899
Cheng Jia Microfabrication of Microfluidic chip, Master Thesis, Southeast University, 2005, 6
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
Zhu, J., Yung, W.K.C. Studies on laser ablation of low temperature co-fired ceramics (LTCC). Int J Adv Manuf Technol 42, 696–702 (2009). https://doi.org/10.1007/s00170-008-1647-6
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s00170-008-1647-6