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A thick SU-8 mask for microabrasive jet machining on glass

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Abstract

This work presents the implementation of a thick SU-8 layer as a mask in the microabrasive jet machining (μ-AJM) process. A microchannel with an aspect ratio of 0.33, which was obtained in this work, had an arc-shape with a width of 190 μm and a depth of 70 μm. The process phenomena that are important for achieving a qualified microchannel for microfluidic applications are discussed. By using the repeated sequence of steps proposed in this paper, three-dimensional microchannels on a single glass slide can be fabricated.

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Authors and Affiliations

  1. Mechanical Engineering Department, Faculty of Engineering, University of Indonesia, Kampus Baru UI Depok, 16424, Indonesia

    Agung Shamsuddin Saragih

  2. School of Mechanical Engineering, Yeungnam University, 214-1 Daedong, Gyeongsan, Kyoungbuk, 712-749, Republic of Korea

    Tae Jo Ko

Authors
  1. Agung Shamsuddin Saragih
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  2. Tae Jo Ko
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Correspondence to Tae Jo Ko.

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Saragih, A.S., Ko, T.J. A thick SU-8 mask for microabrasive jet machining on glass. Int J Adv Manuf Technol 41, 734–740 (2009). https://doi.org/10.1007/s00170-008-1520-7

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  • DOI: https://doi.org/10.1007/s00170-008-1520-7

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