Abstract
Micromoulds are generally produced by lithography methods that often use glass and silicon wafer as substrates, with the exception of the Lithographie Galvanoformung Abformung (LIGA) method, which uses metal substrate. These fabricated moulds are then integrated into the injection moulding machine for mass production. This paper presents the use of vacuum casting methods to produce micromoulds instead of lithography. Silicone rubber is used as the mould material, which is capable of achieving nanometre surface finish. The master pattern of 1-mm diameter microgear of 60-μm teeth width and 38-μm thickness was created by standard ultraviolet (UV) lithography using SU8 photoresist. Using the vacuum casting method, ten polyurethane microgear specimens of 1-mm diameter and 38-μm thickness using the silicone rubber micromoulds have been successfully cast under vacuum conditions as a demonstration. Measurement from white-light interferometry (WLI) showed that all of the microgear cavities in the micromoulds were dimensionally accurate and consistent to the master microgear, proving that its repeatability is possible.
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References
Ghantasala MK, Hayes JP, Harvey EC, Sood DK (2001) Patterning, electroplating and removal of SU-8 moulds by excimer laser micromachining. J Micromech Microeng 11:133–139
Li M, Chen L, Chou SY (2005) Injection molding of 3D microstructures by μPIM. Microsyst Technol 11:210–213
Li M, Chen L, Chou SY (2001) Direct three-dimensional patterning using nanoimprint lithography. Appl Phys Lett 78(21):3322–3324
Kupka RK, Bouamrane F, Cremers C, Megtert S (2000) Microfabrication: LIGA-X and applications. Appl Surf Sci 164(1):97–110
Kim S-H, Lee S-H, Kim Y-K (2002) A high-aspect-ratio comb actuator using UV-LIGA surface micromachining and (110) silicon bulk micromachining. J Micromech Microeng 12:128–135
Chua CK, Leong KF, Lim CS (2003) Rapid prototyping: principles and applications, 2nd edn. World Scientific, Singapore, pp 306–310
Chung S, Park S, Lee I, Jeong H, Cho D (2005) Replication techniques for a metal microcomponent having real 3D shape by microcasting process. Microsys Technol 11:424–428
Chung S, Im Y, Kim H, Jeong H, Dornfeld DA (2003) Evaluation of micro-replication technology using silicone rubber molds and its applications. Int J Mach Tools Manuf 43(13):1337–1345
Levinson HJ (2001) Principles of lithography. SPIE Press, Washington, DC
Thian S, Tang Y, Fuh JYH, Wong YS, Loh HT, Lu L, Tee DZS (2006) Formation of micromoulds via UV lithography of SU8 photoresist and nickel electrodeposition. Proc Inst Mech Eng B J Eng Manuf 220(2) 329–333
Tan WK (2005/2006) Fabrication of micro-moulds and its applications to micro-fabrication. BEng thesis, National University of Singapore, Singapore
Tee KH (2005/2006) Dimensional metrology in microcomponents. BEng thesis, National University of Singapore, Singapore
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Thian, S.C.H., Tang, Y., Tan, W.K. et al. The manufacture of micromould and microparts by vacuum casting. Int J Adv Manuf Technol 38, 944–948 (2008). https://doi.org/10.1007/s00170-007-1151-4
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DOI: https://doi.org/10.1007/s00170-007-1151-4