Abstract
Solid freeform fabrication has attracted considerable attention lately because of its ability to build a 3D structure with a complex and arbitrary shape. This work presents initial studies to adapt this technology for the fabrication of meso-/micro-3D structures. A pulsed Nd:YAG laser was used for laser microdeposition (additive) and micromachining (subtractive) processes. An ultrasonic-based micropowder feeding system was developed to generate precise patterns of micropowders on a substrate without any pre-processing. Laser microdeposition of copper and stainless steel micropowders was accomplished. The characterization of micromachining was performed on stainless steel and copper plates with a laser beam of wavelengths of 355 nm and 266 nm. The integration of laser microdeposition and micromachining processes improved the resolution and edge quality of the meso-/micropatterns.
Similar content being viewed by others
References
Jiang XN, Sun C, Zhang X, Xu B, Ye YH (2000) Micro-stereolithography of lead zirconate titanate thick film on Silicon Substrate. Sens Actuators A 87(1–2):72–77
Zhang X, Jiang XN, Sun C (1999) Micro-stereolithography for polymeric and ceramic microstructures. Sens Actuators A 77(2):149–156
Varadan VK, Varadan VV, Motojima S (1996) Three-dimensional polymeric and ceramic MEMS and their applications. Proceedings of SPIE. Smart Structures and Materials 1996: Smart Electronics and MEMS, vol 2722, pp 156–164
Varadan VK, Varadan VV (2000) Micropump and venous valve by micro stereo lithography. Proceedings of SPIE. Smart Structures and Materials 2000: Smart Electronics and MEMS, vol 3990, pp 246–254
Maruo S, Ikuta K (1999) Movable microstructures made by two-photon three-dimensional microfabrication. Proceedings of the International Symposium on Micro Machine and Human Science, Piscataway, NJ, pp 173–178
Maruo S, Ikuta K (2000) Three-dimensional microfabrication by use of single-photon-absorbed polymerization. Appl Phys Lett 76(19):2656–2658
Cohen A, Zhang G, Tseng F, Mansfeld F, Frodis U, Will P (1998) EFAB: Batch production of functional, fully-dense metal parts with micron-scale features. Solid Freeform Fabrication Proceedings, Austin, TX, pp 161–168
Weiss LE, Merz R, Prinz FB, et al. (1997) Shape deposition manufacturing of heterogeneous structures. J Manuf Syst 16(4):239–248
Li XC, Golnas A, Prinz F (2000) Shape deposition manufacturing of smart metallic structures with embedded sensors. Proceedings of SPIE: Smart Structures and Materials 2000: Sensory Phenomena and Measurement Instrumentation for Smart Structures and Materials, vol 3986, pp 160–171
Chrisey DB, Gamota DR, Helvajian H, Taylor CP (2000) Materials development for direct write technologies. Materials Research Society Symposium Proceedings 624:3–8
Mazumder J, Kar A (1995) Theory and application of laser chemical vapor deposition. Plenum, New York, pp 215–293
Jean D, Duty C, Fuhrman B, Lackey WJ (1999) Precision LCVD system design with real time process control. Solid Freeform Fabrication Proceedings, Austin, TX, pp 59–65
Renn MJ, Vdovin O, Weiman CE, Anderson DZ, Cornell EA (1995) Laser-guided atoms in hollow-core optical fibers. Phys Rev Lett 75:3253–3256
Pique A, Chrisey DB, Fitz-Gerald JM, et al. (2000) Direct writing of electronic and sensor materials using a laser transfer technique. J Mater Res 15(9):1872–1875
Griffith ML, Keicher DM, Atwood CL, et al. (1996) Free form fabrication of metallic components using laser engineered net shaping (LENS). Solid Freeform Fabrication Proceedings, Austin, TX, pp 125–132
Lewis GK, Nemec R, Milewski J, Thoma DJ, Cremers D, Barbe M (1994) Directed light fabrication. Proceedings of SPIE: ICALEO ’94 : Laser Materials Processing, vol 2500, pp 17–26
Mazumder J, Schifferer A, Choi J (1999) Direct materials deposition: designed macro and microstructure. Mater Res Innov 3(3):118–131
Miller JC (1994) Laser ablation. Springer, Berlin Heidelberg New York
Swenson E, Sun Y, Dunsky C (2000) Laser micromachining in the microelectronics industry: a historical overview. Proceedings of SPIE: Laser Beam Shaping, vol 4095, pp 118–132
Gower MC (1993) Excimer lasers: current and future applications in industry and medicine. Crafer RC, Oakley PJ (eds) Laser processing in manufacturing. Chapman & Hall, London
Ramos J, Estrela R, Pitarch L, Julia J, Pascual B (1999) Laser micromachining of metals. Proceedings of SPIE: Computer-Controlled Microshaping, vol 3822, pp 207–213
Li J, Ananthasuresh G (2001) Quality study on the excimer laser micromachining of electro-thermal-compliant micro devices. J Micromechan Microeng 11(1):38–47
Hartke K, King K, Farson D, Ely K (2000) Micromachining with a frequency converted diode-pumped Nd:YAG laser. Proceedings of SPIE: Laser Precision Microfabrication, vol 4088, pp 248–251
Stamm U, Fiebig M, Govorkov S, et al. (2000) Novel results of laser precision microfabrication with excimer lasers and solid-state lasers. Proceedings of SPIE: Laser Precision Microfabrication, SPIE, 4088, pp 118–123
Toenshoff H, Von AF, Ostendorf A, Willmann G, Wagner T (1999) Precision machining using UV and ultrashort pulse lasers. Proceedings of SPIE: Design, Test, and Microfabrication of MEMS and MOEMS, vol 3680, pp 536–545
Illy EK, Withford MJ, Brown D, Piper JA (1997) High-speed microdrilling of polymers using high PRF UV lasers. Proceedings of SPIE. CLEO ’97: Summaries of papers presented at the Conference on Lasers and Electro-Optics, Optical Society of America, vol 11, pp 359
Ready JF (2001) LIA Handbook of Laser Materials Processing. Magnolia Publishing, Inc., Orlando, Florida, USA, Chap. 1
Lehane C, Kwok HS (2001) Enhanced drilling using a dual-pulse Nd:YAG laser. Appl Phys A 73:45–48
Ready JF (2001) LIA Handbook of Laser Materials Processing. Magnolia Publishing, Inc., Orlando, Florida, USA, Chap. 5
Govorkov SV, Slobodtchikov EV, Wiessner AO, Basting D (2000) High accuracy microdrilling of steel with solid-state UV laser at 10 mm/sec rate. Proceedings of SPIE: Laser Applications in Microelectronic and Optoelectronic Manufacturing V, vol 3933, pp 365–370
Chang JJ, Warner BE (1996) Laser-plasma interaction during visible-laser ablation of metals. Appl Phys Lett 69(4):473–475
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
Choi, H., Yang, Y. & Li, X. Experimental study on integration of laser-based additive/subtractive processes for meso/micro solid freeform fabrication. Int J Adv Manuf Technol 26, 335–341 (2005). https://doi.org/10.1007/s00170-003-2008-0
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s00170-003-2008-0