Abstract
This paper considers the control wafers downgrading problem (CWDP) in the wafer fabrication photolithography area. The objective of the research is to minimize the total cost of control wafers, while maintaining the same level of production throughput. For the problem under a pulling control production environment, a linear programming model is presented to set the supply rate of new control wafers and the recycle and downgrading rates so as to minimize the total cost of control wafers. A numerical example is given to illustrate the practicality of the model. The sensitivity of the linear programming model solution to changes in the underlying parameter values is also investigated. The results demonstrate that the proposed model is an effective tool for determining the control wafers downgrading policy.
This paper presents a linear programming model that considers the cost of new control wafers, recycle and downgrading control wafers in wafer fabrication. The proposed model improved the performance of control wafers management, and served as the basis for setting the usage rates of control wafers.
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References
Lin YL (2000) The design of inventory control model for dummy/control wafers at the furnace area in the wafer fab. Dissertation, National Chiao Tung University, Hsin-Chu, Taiwan
Spearman ML, Woodurff DL (1990) CONWIP: A pull alternative to Kanban. Int J Prod Res 28(5):879–894
Chen HC, Lee CE (2000) Control and dummy wafers management. J Chin Inst Ind Eng 17(4):437–449
Chung SH, Yang MH, Cheng CM (1997) The design of due date assignment model and the determination of flow time control parameters for the wafer fabrication factories. IEEE Trans Compon Packag Manuf Technol 20(4):278–287
Kroese DP, Nicola VF (1999) Efficient simulation of a tandem Jackson network. Proceedings of the 1999 Winter Simulation Conference, pp 411–419
Kumar S, Kumar PR (2001) Queuing network models in the design and analysis of semiconductor wafer fabs. IEEE Trans Robot Automat 17(5):548–561
Xiao H (2001) Introduction to semiconductor manufacturing technology. Prentice-Hall, New York
Jackson JR (1957) Networks of waiting Lines. Oper Res 5:518–521
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Chung, SH., Pearn, W. & Kang, HY. A linear programming model for the control wafers downgrading problem. Int J Adv Manuf Technol 25, 377–384 (2005). https://doi.org/10.1007/s00170-003-1854-0
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DOI: https://doi.org/10.1007/s00170-003-1854-0