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An AFM scanning moiré technique for the inspection of surface deformations

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Abstract

An atomic force microscope (AFM) scanning moiré technique has been developed and verified in preparation for the measurement of deformations of single point diamond-turned surfaces. It is a non-destructive measurement method without introducing external reference and specimen gratings. This technique has also been successfully applied to measure thermal deformations of electronics packages without introducing an external reference grating. The principle of the formation of an AFM scanning moiré and strain measurement using this technique is explained in detail. Several important issues in its applications such as the measuring errors, scanning directions and selection of the number of scan lines are also discussed.

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References

  1. Chaloux LE (1984) Part fixturing for diamond machining. SPIE 508:109–111

    Google Scholar 

  2. Glass AJ, Guenther AH (1979) Laser induced damage in optical materials. Appl Opt 18(3):2112–2128

    Google Scholar 

  3. Gao HL, Wang NY (1993) Possible damage mechanism of the dielectric coatings for a KrF laser. Appl Opt 32:7084–7088

    CAS  Google Scholar 

  4. Han B (1998) Recent advancements of moiré and microscopic moiré interferometry for thermal deformation analyses of microelectronic devices. Exp Techniqu 38:278–288

    Google Scholar 

  5. Theocaris PS (1969) Moiré fringes in strain analysis. Pergamon, New York

  6. Pericles ST (1969) Moiré fringes in strain analysis. Pergamon, London

  7. Morimoto Y, Hayashi T(1984) Deformation measurement during powder compaction by a scanning moiré method. Exp Mech 24:112–116

    Google Scholar 

  8. Chen H, Liu D, Lee A (2000) Moiré in atomic force microscope. Exp Tech 24:31–32

    Google Scholar 

  9. Lu YG, Zhong ZW, Yu J, Xie H, Ngoi BKA, Chai GB, Asundi A (2001) Thermal deformation measurement of electronic packages using atomic force microscope scanning moiré technique. Review of Scientific Instruments 72(4):2180–2185

    Article  CAS  Google Scholar 

  10. Cao QX (1983) Principle and application of high-frequency grating moiré (in Chinese). Dissertation, Tsinghua University

  11. Digital instruments (1995) Dimension 3000 instruction manual

  12. Rabinovich S (1994) Measurement error: theory and practice. Springer, Berlin, Heidelberg, New York

    Google Scholar 

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Authors and Affiliations

  1. School of MPE, Nanyang Technological University, 639798, Singapore, Singapore

    Z. W. Zhong & Y. G. Lu

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  1. Z. W. Zhong
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  2. Y. G. Lu
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Correspondence to Z. W. Zhong.

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Zhong, Z.W., Lu, Y.G. An AFM scanning moiré technique for the inspection of surface deformations. Int J Adv Manuf Technol 23, 462–466 (2004). https://doi.org/10.1007/s00170-003-1770-3

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  • DOI: https://doi.org/10.1007/s00170-003-1770-3

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