Deposition of C60 polymer films under various plasma conditions

Abstract.

We studied the deposition of C₆₀ polymer films under different Ar plasma conditions. The films were deposited at a pressure range between 1.3 and 40 Pa, and the input power was varied from 10 to 70 W. The films were investigated by Raman spectroscopy to confirm the C-C valence states of the polymeric phases. C₆₀ polymers were formed under various experimental conditions. However, the depositions resulted in non-uniform films consisting of unpolymerized C₆₀, dimers, linear chains and polymeric planes. Amorphous carbon was found in the films deposited at 13 and 20 Pa (50 W input power) and 13 Pa (70 W).